Papers from the ... International Plasma-Based Ion Implantation Workshop: 4 (1998) 2 - 4 June 1998, Dearborn, Michigan
Gespeichert in:
| Körperschaft: | |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
New York
American Inst. of Physics
1999
|
| Beschreibung: | Literaturangaben. - In: Journal of vacuum science & technology / 2 / B ; 17 (1999),2 |
| Beschreibung: | S. 793 - 901 Ill., graph. Darst. |
Internformat
MARC
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| 110 | 2 | |a International Plasma-Based Ion Implantation Workshop |e Verfasser |0 (DE-588)16146205-4 |4 aut | |
| 245 | 1 | 0 | |a Papers from the ... International Plasma-Based Ion Implantation Workshop |n 4 (1998) |p 2 - 4 June 1998, Dearborn, Michigan |c ed. for the conference: Joseph V. Mantese ... |
| 264 | 1 | |a New York |b American Inst. of Physics |c 1999 | |
| 300 | |a S. 793 - 901 |b Ill., graph. Darst. | ||
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| 338 | |b nc |2 rdacarrier | ||
| 500 | |a Literaturangaben. - In: Journal of vacuum science & technology / 2 / B ; 17 (1999),2 | ||
| 700 | 1 | |a Mantese, Joseph V. |e Sonstige |4 oth | |
| 773 | 0 | 8 | |w (DE-604)BV021860652 |g 2,B,17,1 |
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Datensatz im Suchindex
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| author_corporate_role | aut |
| author_facet | International Plasma-Based Ion Implantation Workshop |
| author_sort | International Plasma-Based Ion Implantation Workshop |
| building | Verbundindex |
| bvnumber | BV022091993 |
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| id | DE-604.BV022091993 |
| illustrated | Illustrated |
| index_date | 2024-07-02T16:14:49Z |
| indexdate | 2024-07-09T20:50:30Z |
| institution | BVB |
| institution_GND | (DE-588)16146205-4 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-015306832 |
| oclc_num | 634427020 |
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| owner | DE-706 |
| owner_facet | DE-706 |
| physical | S. 793 - 901 Ill., graph. Darst. |
| publishDate | 1999 |
| publishDateSearch | 1999 |
| publishDateSort | 1999 |
| publisher | American Inst. of Physics |
| record_format | marc |
| spelling | International Plasma-Based Ion Implantation Workshop Verfasser (DE-588)16146205-4 aut Papers from the ... International Plasma-Based Ion Implantation Workshop 4 (1998) 2 - 4 June 1998, Dearborn, Michigan ed. for the conference: Joseph V. Mantese ... New York American Inst. of Physics 1999 S. 793 - 901 Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Literaturangaben. - In: Journal of vacuum science & technology / 2 / B ; 17 (1999),2 Mantese, Joseph V. Sonstige oth (DE-604)BV021860652 2,B,17,1 |
| spellingShingle | Papers from the ... International Plasma-Based Ion Implantation Workshop |
| title | Papers from the ... International Plasma-Based Ion Implantation Workshop |
| title_auth | Papers from the ... International Plasma-Based Ion Implantation Workshop |
| title_exact_search | Papers from the ... International Plasma-Based Ion Implantation Workshop |
| title_exact_search_txtP | Papers from the ... International Plasma-Based Ion Implantation Workshop |
| title_full | Papers from the ... International Plasma-Based Ion Implantation Workshop 4 (1998) 2 - 4 June 1998, Dearborn, Michigan ed. for the conference: Joseph V. Mantese ... |
| title_fullStr | Papers from the ... International Plasma-Based Ion Implantation Workshop 4 (1998) 2 - 4 June 1998, Dearborn, Michigan ed. for the conference: Joseph V. Mantese ... |
| title_full_unstemmed | Papers from the ... International Plasma-Based Ion Implantation Workshop 4 (1998) 2 - 4 June 1998, Dearborn, Michigan ed. for the conference: Joseph V. Mantese ... |
| title_short | Papers from the ... International Plasma-Based Ion Implantation Workshop |
| title_sort | papers from the international plasma based ion implantation workshop 2 4 june 1998 dearborn michigan |
| volume_link | (DE-604)BV021860652 |
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