Formation of silicon nitride: from the 19th to the 21th century ; [a comprehensive summary and guide to the world literature]
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
Uetikon-Zuerich [u.a.]
Trans Tech Publ.
2005
|
| Schriftenreihe: | Materials science foundations
22/24 |
| Schlagworte: | |
| Online-Zugang: | Inhaltsverzeichnis |
| Beschreibung: | Literaturangaben |
| Beschreibung: | X, 948 S. Ill., graph. Darst. |
| ISBN: | 0878494928 |
Internformat
MARC
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| 100 | 1 | |a Sangster, Raymond C. |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Formation of silicon nitride |b from the 19th to the 21th century ; [a comprehensive summary and guide to the world literature] |c Raymond C. Sangster |
| 264 | 1 | |a Uetikon-Zuerich [u.a.] |b Trans Tech Publ. |c 2005 | |
| 300 | |a X, 948 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 1 | |a Materials science foundations |v 22/24 | |
| 500 | |a Literaturangaben | ||
| 650 | 0 | 7 | |a Halbleitertechnologie |0 (DE-588)4158814-9 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Siliciumnitrid |0 (DE-588)4127841-0 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Kristallzüchtung |0 (DE-588)4140616-3 |2 gnd |9 rswk-swf |
| 689 | 0 | 0 | |a Siliciumnitrid |0 (DE-588)4127841-0 |D s |
| 689 | 0 | |5 DE-604 | |
| 689 | 1 | 0 | |a Kristallzüchtung |0 (DE-588)4140616-3 |D s |
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| 830 | 0 | |a Materials science foundations |v 22/24 |w (DE-604)BV012703911 |9 22 | |
| 856 | 4 | 2 | |m Digitalisierung UB Bayreuth |q application/pdf |u http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=015299702&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |3 Inhaltsverzeichnis |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-015299702 | ||
Datensatz im Suchindex
| _version_ | 1804136060457844736 |
|---|---|
| adam_text | CONTENTS
Preface v
Contents
vii
Acronyms and Abbreviations; Units
χ
Part A. In the Beginning
.....................................................1
Chapter A-l
.
From the Cosmic to the Mundane
...............................1
Chapter A-2. Book Purpose and Design, Writing Conventions
...................3
Chapter A-3. Historical Comments re Silicon Nitride Studies
....................6
Chapter A-4. Natural Occurrence of Si3N4
..................................12
Chapter A-5. Major Reviews on Formation of Silicon Nitride
...................17
Part B. Technical Context of Silicon Nitride Formation
...........................19
Chapter B-l. The Si-N System
...........................................21
Chapter B-2. Si3N4 Phases and Crystallography
..............................23
Chapter B-3. Phase Chemistry of a-Si3N4
-
a-SijN,
- ß-Si3N4 ...................33
Chapter B-4. High Pressure Phase Chemistry of Si3N4
.........................54
Chapter B-5. Silicon Nitride Solid Solutions
................................64
Chapter B-6. Phase Diagram Sources for Si3N4
&
SiAlON Ceramic Systems
.......73
Chapter B-7. Thermodynamics of Si3N4
....................................85
Chapter B-8. Self-diffusion in Si3N4
.......................................92
Chapter B-9. Compositional and Phase Analysis of Si3N4
......................94
Chapter B-IO. Si3N4 Toxicology and Safety
................................119
Chapter B-l
1.
Engineering Aspects of Silicon Nitride Production
..............121
Chapter B-12. General Comments on Formation Chemistry of Silicon Nitride
.....124
Part
C. Si3N4
Products, Uses and Markets
.....................................127
Chapter
С
-l.
Survey of Applications and Markets for Si3N4 Materials
...........129
Chapter C-2. Sintered Silicon Nitride Ceramics
.............................148
Chapter C-3. Overview of Production of Silicon Nitride Powders
...............182
Chapter C-4. Overview of Si3N4 Whiskers, Fibers, and Filaments
...............198
Chapter C-5. Overview: Si3N4 Films, Coatings, Membranes, Massive CVD
.......201
Chapter C-6. Si3N4 Products by Transformation of Si3N4 Source Materials
........206
Part D. Si3N4 by Reaction of Si(cr) Surfaces and N-Species
.......................213
Chapter D-l. Comments re
SifoC^/N-Species
Preparative Reactions
...........215
Chapter D-2. Si3N4 from Siicr/surface) /N2(g)
..............................220
Chapter D-3. Si3N4 from SifcryActivated Nitrogen
..........................249
Chapter D-4.
Si(cr)/N-Ions
I. Basic Phenomena of Si3N4 Formation
.............255
Chapter D-5.
Si(cr)/N-ions
П.
Ion Plating of
Si3N4
Surface Films
...............272
Chapter D-6. SKcryN-Ions
Ш.
Ion Implantation of Buried Si3N4 Layers
..........284
Part E. Si3N4 Powder Formation from Si(powder)/N2(g)
..........................307
Chapter E-l
.
Basic Phenomena in Si3N4 Formation via Si(powder)/N2(g)
.........308
Chapter E-2. Si3N4 Powder from Si(powder)/N2/(Irnpurities
&
Additives)
........321
Chapter E-3. Preparation of Si3N4 Powder via Si(powder)/N2
..................344
viii Formation
of Silicon
Nitride: From the 19th to the 21st Century
Part F. Fabrication of Reaction Bonded Silicon Nitride
...........................357
Chapter F-l. RBSN Introduction and Summation
...........................359
Chapter F-2. Reaction Bonded Silicon Nitride Basics
........................368
Chapter F-3. RBSN Si Powder Effects and Processing
.......................390
Chapter F-4. RBSN Green Shape Effects, Forming, Presintering, Machining
......396
Chapter F-5. RBSN Nitridation
..........................................407
Chapter F-6. RBSN Product-Process Observations
..........................416
Chapter F-7. RBSN Coating and Impregnation
.............................426
Chapter F-8. Variant Versions of Reaction Bonded Si3N4
.....................432
Chapter F-9. Doped/Filled/Reinforced RBSN Ceramics
......................437
Chapter F-10. SRBSN: Post-sintering of RBSN
.............................442
Part G. Si3N4 from Si/N, Under Vigorous Conditions
............................449
Chapter G-l. Si3N4 Formation via Si(C)/N2 Reactions
........................450
Chapter G-2. Si(powder)/N2(g) Combustion Synthesis of Si3N4
.................455
Chapter G-3. SHS Production of Si3N4 Powders, Whiskers and Fibers
...........470
Chapter G-4. Si3N4 by Si/N2 Reactive Sputtering
............................475
Chapter G-5. Si3N4 via Si/N2 Reaction in Thermal Plasmas
....................487
Chapter G-6. Si3N4 Formation via Si(g)/N2, N, N-plasma, N-ion Reactions
.......490
Chapter G-7. Si3N4 Formation via Si7(N-plasma, N-ion) Reactions
.............494
Chapter G-8. Mechano(-electro)chemical Nitridation of Si Powder
.............495
Part H. Si3N4 Formation by Reaction of Si with N-Compounds
....................497
Chapter
Н
-l.
Introduction to Si/N-Compound Reactions
......................498
Chapter H-2. Si3N4 Formation by Thermal Reactions of Si(s)/NH3(g)
............501
Chapter H-3. Si3N4 via Stimulated reactions of Si(s)/NH3(g)
...................524
Chapter H-4. Si3N4 Formation in Other
Si/NH-,
Reaction Systems
..............530
Chapter H-5. Si(powder)/NH3(g) Powder Production in Thermal Plasmas
........535
Chapter H-6. Si3N4 from Si(s) plus N-N bonded and Other N-Compounds
........539
Partí.
Si3N4 by Nitridation ofSi-0 Based Materials
.............................545
Chapter
1-І.
Si3N4 Formation via SiO(g,s)/(N2,NH3)/(H2,C,CH4)
................547
Chapter
Í-2.
Si3N4 via
С
-Free Nitridation of
SiOĄ, SiO2,
Si2N2O
..............550
Chapter
Í-3.
SiOj/C/N^ Si3N4 by Carbothermal Nitridation of SiO2
.............557
Chapter
Í-4.
Si3N4 via Other SiO2 Carbothermal Nitridation Systems
............596
Chapter
Í-5.
SiO2 Carbothermal Nitridation Impurity/Additive Effects
...........602
Chapter
Í-6.
Si3N4 via Carbonitridation of Si-0 Containing Materials
............613
Part J. Si3N4 Formation from Si-N Based Materials
..............................627
Chapter J-l. Introduction to Si3N4 from Si-N Based Materials
..................628
Chapter J-2. Si3N4 Formation by Reactions of Si-N Materials
..................629
Chapter J-3. Si3N4 from Pyrolysis/Nitridation of Si-N-H Materials, General
.......630
Chapter J-4. Si3N4 Preparation by Pyrolysis of Si(NH)2
.......................639
Chapter J-5. Si3N4 via Decomposition of Other Si-N-X Compounds
.............658
Raymond C. Sangs
ter
ix
Part
К.
Comparative Overview and Summary of Si3N4 CVD
......................661
Chapter K-l. Chemical Vapor Deposition of Si3N4: Fundamentals
..............662
Chapter K-2. Methods for CVD of Si3N4 Thin Films
.........................679
Part L. Si3N4 by CVD Nitridation of
Si
-Н
Compounds
...........................701
Chapter L-l. Preamble: Si3N4 CVD from Silanes
............................703
Chapter L-2. Si3N4 Chemical Vapor Deposition from SilfylN^
.................704
Chapter L-3. Si3N4 from SiH4/NH3 Thermal Reactions
.......................724
Chapter L-4. Si3N4 Formation via Stimulated CVD from SiH4/NH3
.............757
Chapter L-5.
SiH4/NH3(g)
Formation of Si3N4 Powder
.......................773
Chapter L-6. Si3N4 Formation from SiH4/N2H4(/NH3,N2,H2)
...................785
Chapter L-7. Si3N4 via Other SiHx CVD Nitridation Systems
..................789
Part M. Si3N4 by CVD Nitridation of Si Halides and Halosilanes
...................795
Chapter M-l
.
Preamble re Si3N4 CVD from Si Halides and Halosilanes
..........797
Chapter M-2. Si3N4 via CVD Nitridation of Silicon Fluorides
..................799
Chapter M-3. Si3N4 Formation via SiCl4/(N2,NH3)(/H2JAr,He) Reactions
.........808
Chapter M-4. Si3N4 from
SiCl4/NH3
Reactions in Thermal Plasmas
.............834
Chapter M-5. Si3N4 Formation in Other SiClx Nitridation Systems
..............844
Chapter M-6. Si3N4 by Nitridation CVD from SiHCl3
........................850
Chapter M-7. Si3N4 Formation via SiH2Cl2 Nitridation
.......................855
Chapter M-8. Si3N4 by CVD Nitridation of SiH3Cl, SiBr4, SiHBr3, Sil4
..........880
Part
N.
Si3N4 Formation in Si-C-N Systems
....................................883
Chapter N-l. Si3N4 from Si-C-N-Hi-Cl) CVD Reaction Systems
...............884
Chapter N-2. Si3N4 via Pyrolysis/Nitridation of SiC and Si-C-N Materials
.......898
Chapter N-3. Si3N4 from Pyrolysis/Nitridation of Organosilicon Polymers
.......905
Part O. Si3N4 Formation in Si-N-X Systems, X
=
B, P, S, Fe, Other
.................927
Chapter
О
-l.
Si3N4 Formation in
Si-N-(B,
P, S) Systems
....................928
Chapter O-2. Si3N4 in-situ Formation in Iron and Steel Alloys
................931
Chapter O-3. Si3N4 Preparation by Reactions of Fe-Si Alloys and N2
...........940
Chapter O-4. Si3N4 Formation in Non-Fe Metal-Silicon-Nitrogen Systems
......941
Index
..................................................................946
About the Author
........................................................948
Illustrative Applications
...............................................212,356
Parts B-0 each begin with their own tables of contents, which for each Chapter include section
and subsection headings (listing all Si-N reactants and reaction promoters described in the text),
plus all Figures and numbered (major) Tables. A Reference list concludes each Chapter.
An
Ѓ
is used instead of I for the Part between
H
and J, to forestall misreading I as
1.
|
| adam_txt |
CONTENTS
Preface v
Contents
vii
Acronyms and Abbreviations; Units
χ
Part A. In the Beginning
.1
Chapter A-l
.
From the Cosmic to the Mundane
.1
Chapter A-2. Book Purpose and Design, Writing Conventions
.3
Chapter A-3. Historical Comments re Silicon Nitride Studies
.6
Chapter A-4. Natural Occurrence of Si3N4
.12
Chapter A-5. Major Reviews on Formation of Silicon Nitride
.17
Part B. Technical Context of Silicon Nitride Formation
.19
Chapter B-l. The Si-N System
.21
Chapter B-2. Si3N4 Phases and Crystallography
.23
Chapter B-3. Phase Chemistry of a-Si3N4
-
a-SijN,
- ß-Si3N4 .33
Chapter B-4. High Pressure Phase Chemistry of Si3N4
.54
Chapter B-5. Silicon Nitride Solid Solutions
.64
Chapter B-6. Phase Diagram Sources for Si3N4
&
SiAlON Ceramic Systems
.73
Chapter B-7. Thermodynamics of Si3N4
.85
Chapter B-8. Self-diffusion in Si3N4
.92
Chapter B-9. Compositional and Phase Analysis of Si3N4
.94
Chapter B-IO. Si3N4 Toxicology and Safety
.119
Chapter B-l
1.
Engineering Aspects of Silicon Nitride Production
.121
Chapter B-12. General Comments on Formation Chemistry of Silicon Nitride
.124
Part
C. Si3N4
Products, Uses and Markets
.127
Chapter
С
-l.
Survey of Applications and Markets for Si3N4 Materials
.129
Chapter C-2. Sintered Silicon Nitride Ceramics
.148
Chapter C-3. Overview of Production of Silicon Nitride Powders
.182
Chapter C-4. Overview of Si3N4 Whiskers, Fibers, and Filaments
.198
Chapter C-5. Overview: Si3N4 Films, Coatings, Membranes, Massive CVD
.201
Chapter C-6. Si3N4 Products by Transformation of Si3N4 Source Materials
.206
Part D. Si3N4 by Reaction of Si(cr) Surfaces and N-Species
.213
Chapter D-l. Comments re
SifoC^/N-Species
Preparative Reactions
.215
Chapter D-2. Si3N4 from Siicr/surface) /N2(g)
.220
Chapter D-3. Si3N4 from SifcryActivated Nitrogen
.249
Chapter D-4.
Si(cr)/N-Ions
I. Basic Phenomena of Si3N4 Formation
.255
Chapter D-5.
Si(cr)/N-ions
П.
Ion Plating of
Si3N4
Surface Films
.272
Chapter D-6. SKcryN-Ions
Ш.
Ion Implantation of Buried Si3N4 Layers
.284
Part E. Si3N4 Powder Formation from Si(powder)/N2(g)
.307
Chapter E-l
.
Basic Phenomena in Si3N4 Formation via Si(powder)/N2(g)
.308
Chapter E-2. Si3N4 Powder from Si(powder)/N2/(Irnpurities
&
Additives)
.321
Chapter E-3. Preparation of Si3N4 Powder via Si(powder)/N2
.344
viii Formation
of Silicon
Nitride: From the 19th to the 21st Century
Part F. Fabrication of Reaction Bonded Silicon Nitride
.357
Chapter F-l. RBSN Introduction and Summation
.359
Chapter F-2. Reaction Bonded Silicon Nitride Basics
.368
Chapter F-3. RBSN Si Powder Effects and Processing
.390
Chapter F-4. RBSN Green Shape Effects, Forming, Presintering, Machining
.396
Chapter F-5. RBSN Nitridation
.407
Chapter F-6. RBSN Product-Process Observations
.416
Chapter F-7. RBSN Coating and Impregnation
.426
Chapter F-8. Variant Versions of Reaction Bonded Si3N4
.432
Chapter F-9. Doped/Filled/Reinforced RBSN Ceramics
.437
Chapter F-10. SRBSN: Post-sintering of RBSN
.442
Part G. Si3N4 from Si/N, Under Vigorous Conditions
.449
Chapter G-l. Si3N4 Formation via Si(C)/N2 Reactions
.450
Chapter G-2. Si(powder)/N2(g) Combustion Synthesis of Si3N4
.455
Chapter G-3. SHS Production of Si3N4 Powders, Whiskers and Fibers
.470
Chapter G-4. Si3N4 by Si/N2 Reactive Sputtering
.475
Chapter G-5. Si3N4 via Si/N2 Reaction in Thermal Plasmas
.487
Chapter G-6. Si3N4 Formation via Si(g)/N2, N, N-plasma, N-ion Reactions
.490
Chapter G-7. Si3N4 Formation via Si7(N-plasma, N-ion) Reactions
.494
Chapter G-8. Mechano(-electro)chemical Nitridation of Si Powder
.495
Part H. Si3N4 Formation by Reaction of Si with N-Compounds
.497
Chapter
Н
-l.
Introduction to Si/N-Compound Reactions
.498
Chapter H-2. Si3N4 Formation by Thermal Reactions of Si(s)/NH3(g)
.501
Chapter H-3. Si3N4 via Stimulated reactions of Si(s)/NH3(g)
.524
Chapter H-4. Si3N4 Formation in Other
Si/NH-,
Reaction Systems
.530
Chapter H-5. Si(powder)/NH3(g) Powder Production in Thermal Plasmas
.535
Chapter H-6. Si3N4 from Si(s) plus N-N bonded and Other N-Compounds
.539
Partí.
Si3N4 by Nitridation ofSi-0 Based Materials
.545
Chapter
1-І.
Si3N4 Formation via SiO(g,s)/(N2,NH3)/(H2,C,CH4)
.547
Chapter
Í-2.
Si3N4 via
С
-Free Nitridation of
SiOĄ, SiO2,
Si2N2O
.550
Chapter
Í-3.
SiOj/C/N^ Si3N4 by Carbothermal Nitridation of SiO2
.557
Chapter
Í-4.
Si3N4 via Other SiO2 Carbothermal Nitridation Systems
.596
Chapter
Í-5.
SiO2 Carbothermal Nitridation Impurity/Additive Effects
.602
Chapter
Í-6.
Si3N4 via Carbonitridation of Si-0 Containing Materials
.613
Part J. Si3N4 Formation from Si-N Based Materials
.627
Chapter J-l. Introduction to Si3N4 from Si-N Based Materials
.628
Chapter J-2. Si3N4 Formation by Reactions of Si-N Materials
.629
Chapter J-3. Si3N4 from Pyrolysis/Nitridation of Si-N-H Materials, General
.630
Chapter J-4. Si3N4 Preparation by Pyrolysis of Si(NH)2
.639
Chapter J-5. Si3N4 via Decomposition of Other Si-N-X Compounds
.658
Raymond C. Sangs
ter
ix
Part
К.
Comparative Overview and Summary of Si3N4 CVD
.661
Chapter K-l. Chemical Vapor Deposition of Si3N4: Fundamentals
.662
Chapter K-2. Methods for CVD of Si3N4 Thin Films
.679
Part L. Si3N4 by CVD Nitridation of
Si
-Н
Compounds
.701
Chapter L-l. Preamble: Si3N4 CVD from Silanes
.703
Chapter L-2. Si3N4 Chemical Vapor Deposition from SilfylN^
.704
Chapter L-3. Si3N4 from SiH4/NH3 Thermal Reactions
.724
Chapter L-4. Si3N4 Formation via Stimulated CVD from SiH4/NH3
.757
Chapter L-5.
SiH4/NH3(g)
Formation of Si3N4 Powder
.773
Chapter L-6. Si3N4 Formation from SiH4/N2H4(/NH3,N2,H2)
.785
Chapter L-7. Si3N4 via Other SiHx CVD Nitridation Systems
.789
Part M. Si3N4 by CVD Nitridation of Si Halides and Halosilanes
.795
Chapter M-l
.
Preamble re Si3N4 CVD from Si Halides and Halosilanes
.797
Chapter M-2. Si3N4 via CVD Nitridation of Silicon Fluorides
.799
Chapter M-3. Si3N4 Formation via SiCl4/(N2,NH3)(/H2JAr,He) Reactions
.808
Chapter M-4. Si3N4 from
SiCl4/NH3
Reactions in Thermal Plasmas
.834
Chapter M-5. Si3N4 Formation in Other SiClx Nitridation Systems
.844
Chapter M-6. Si3N4 by Nitridation CVD from SiHCl3
.850
Chapter M-7. Si3N4 Formation via SiH2Cl2 Nitridation
.855
Chapter M-8. Si3N4 by CVD Nitridation of SiH3Cl, SiBr4, SiHBr3, Sil4
.880
Part
N.
Si3N4 Formation in Si-C-N Systems
.883
Chapter N-l. Si3N4 from Si-C-N-Hi-Cl) CVD Reaction Systems
.884
Chapter N-2. Si3N4 via Pyrolysis/Nitridation of SiC and Si-C-N Materials
.898
Chapter N-3. Si3N4 from Pyrolysis/Nitridation of Organosilicon Polymers
.905
Part O. Si3N4 Formation in Si-N-X Systems, X
=
B, P, S, Fe, Other
.927
Chapter
О
-l.
Si3N4 Formation in
Si-N-(B,
P, S) Systems
.928
Chapter O-2. Si3N4 in-situ Formation in Iron and Steel Alloys
.931
Chapter O-3. Si3N4 Preparation by Reactions of Fe-Si Alloys and N2
.940
Chapter O-4. Si3N4 Formation in Non-Fe Metal-Silicon-Nitrogen Systems
.941
Index
.946
About the Author
.948
Illustrative Applications
.212,356
Parts B-0 each begin with their own tables of contents, which for each Chapter include section
and subsection headings (listing all Si-N reactants and reaction promoters described in the text),
plus all Figures and numbered (major) Tables. A Reference list concludes each Chapter.
An
"Ѓ'
is used instead of "I" for the Part between
H
and J, to forestall misreading I as
1. |
| any_adam_object | 1 |
| any_adam_object_boolean | 1 |
| author | Sangster, Raymond C. |
| author_facet | Sangster, Raymond C. |
| author_role | aut |
| author_sort | Sangster, Raymond C. |
| author_variant | r c s rc rcs |
| building | Verbundindex |
| bvnumber | BV022084877 |
| classification_rvk | UQ 8200 |
| ctrlnum | (OCoLC)634238667 (DE-599)BVBBV022084877 |
| discipline | Physik |
| discipline_str_mv | Physik |
| format | Book |
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| id | DE-604.BV022084877 |
| illustrated | Illustrated |
| index_date | 2024-07-02T16:14:30Z |
| indexdate | 2024-07-09T20:50:24Z |
| institution | BVB |
| isbn | 0878494928 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-015299702 |
| oclc_num | 634238667 |
| open_access_boolean | |
| owner | DE-706 DE-703 |
| owner_facet | DE-706 DE-703 |
| physical | X, 948 S. Ill., graph. Darst. |
| publishDate | 2005 |
| publishDateSearch | 2005 |
| publishDateSort | 2005 |
| publisher | Trans Tech Publ. |
| record_format | marc |
| series | Materials science foundations |
| series2 | Materials science foundations |
| spelling | Sangster, Raymond C. Verfasser aut Formation of silicon nitride from the 19th to the 21th century ; [a comprehensive summary and guide to the world literature] Raymond C. Sangster Uetikon-Zuerich [u.a.] Trans Tech Publ. 2005 X, 948 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Materials science foundations 22/24 Literaturangaben Halbleitertechnologie (DE-588)4158814-9 gnd rswk-swf Siliciumnitrid (DE-588)4127841-0 gnd rswk-swf Kristallzüchtung (DE-588)4140616-3 gnd rswk-swf Siliciumnitrid (DE-588)4127841-0 s DE-604 Kristallzüchtung (DE-588)4140616-3 s Halbleitertechnologie (DE-588)4158814-9 s Materials science foundations 22/24 (DE-604)BV012703911 22 Digitalisierung UB Bayreuth application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=015299702&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Sangster, Raymond C. Formation of silicon nitride from the 19th to the 21th century ; [a comprehensive summary and guide to the world literature] Materials science foundations Halbleitertechnologie (DE-588)4158814-9 gnd Siliciumnitrid (DE-588)4127841-0 gnd Kristallzüchtung (DE-588)4140616-3 gnd |
| subject_GND | (DE-588)4158814-9 (DE-588)4127841-0 (DE-588)4140616-3 |
| title | Formation of silicon nitride from the 19th to the 21th century ; [a comprehensive summary and guide to the world literature] |
| title_auth | Formation of silicon nitride from the 19th to the 21th century ; [a comprehensive summary and guide to the world literature] |
| title_exact_search | Formation of silicon nitride from the 19th to the 21th century ; [a comprehensive summary and guide to the world literature] |
| title_exact_search_txtP | Formation of silicon nitride from the 19th to the 21th century ; [a comprehensive summary and guide to the world literature] |
| title_full | Formation of silicon nitride from the 19th to the 21th century ; [a comprehensive summary and guide to the world literature] Raymond C. Sangster |
| title_fullStr | Formation of silicon nitride from the 19th to the 21th century ; [a comprehensive summary and guide to the world literature] Raymond C. Sangster |
| title_full_unstemmed | Formation of silicon nitride from the 19th to the 21th century ; [a comprehensive summary and guide to the world literature] Raymond C. Sangster |
| title_short | Formation of silicon nitride |
| title_sort | formation of silicon nitride from the 19th to the 21th century a comprehensive summary and guide to the world literature |
| title_sub | from the 19th to the 21th century ; [a comprehensive summary and guide to the world literature] |
| topic | Halbleitertechnologie (DE-588)4158814-9 gnd Siliciumnitrid (DE-588)4127841-0 gnd Kristallzüchtung (DE-588)4140616-3 gnd |
| topic_facet | Halbleitertechnologie Siliciumnitrid Kristallzüchtung |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=015299702&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
| volume_link | (DE-604)BV012703911 |
| work_keys_str_mv | AT sangsterraymondc formationofsiliconnitridefromthe19thtothe21thcenturyacomprehensivesummaryandguidetotheworldliterature |