Papers from the ... International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication: 43 (1999) 1 - 4 June 1999, Marriott Resort, Marco Island, Florida
Gespeichert in:
| Körperschaft: | |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
New York
American Inst. of Physics
1999
|
| Beschreibung: | Literaturangaben. - In: Journal of vacuum science & technology : Second series : B, Microelectronics and nanometer structure ; 17 (1999),6 |
| Beschreibung: | S. 2679 - 3566 Ill., graph. Darst. |
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| 245 | 1 | 0 | |a Papers from the ... International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication |n 43 (1999) |p 1 - 4 June 1999, Marriott Resort, Marco Island, Florida |c ed. for the conference: Jack Wolfe |
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| 700 | 1 | |a Kern, Dieter |e Sonstige |4 oth | |
| 700 | 1 | |a Pang, Stella W. |e Sonstige |4 oth | |
| 700 | 1 | |a Marrian, Christie R. K. |e Sonstige |4 oth | |
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| illustrated | Illustrated |
| index_date | 2024-07-02T16:14:09Z |
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| physical | S. 2679 - 3566 Ill., graph. Darst. |
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| spelling | International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication Verfasser (DE-588)16145128-7 aut Papers from the ... International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication 43 (1999) 1 - 4 June 1999, Marriott Resort, Marco Island, Florida ed. for the conference: Jack Wolfe New York American Inst. of Physics 1999 S. 2679 - 3566 Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Literaturangaben. - In: Journal of vacuum science & technology : Second series : B, Microelectronics and nanometer structure ; 17 (1999),6 Kern, Dieter Sonstige oth Pang, Stella W. Sonstige oth Marrian, Christie R. K. Sonstige oth (DE-604)BV021857305 2,B,17,2 |
| spellingShingle | Papers from the ... International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication |
| title | Papers from the ... International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication |
| title_auth | Papers from the ... International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication |
| title_exact_search | Papers from the ... International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication |
| title_exact_search_txtP | Papers from the ... International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication |
| title_full | Papers from the ... International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication 43 (1999) 1 - 4 June 1999, Marriott Resort, Marco Island, Florida ed. for the conference: Jack Wolfe |
| title_fullStr | Papers from the ... International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication 43 (1999) 1 - 4 June 1999, Marriott Resort, Marco Island, Florida ed. for the conference: Jack Wolfe |
| title_full_unstemmed | Papers from the ... International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication 43 (1999) 1 - 4 June 1999, Marriott Resort, Marco Island, Florida ed. for the conference: Jack Wolfe |
| title_short | Papers from the ... International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication |
| title_sort | papers from the international conference on electron ion and photon beam technology and nanofabrication 1 4 june 1999 marriott resort marco island florida |
| volume_link | (DE-604)BV021857305 |
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