Papers from the ... International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication: 42 (1998) 26 - 29 May 1998, The Westin Hotel, Chicago, Illinois
Gespeichert in:
| Körperschaft: | |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
New York
American Inst. of Physics
1998
|
| Beschreibung: | Literaturangaben. - In: Journal of vacuum science & technology : Second series : B, Microelectronics and nanometer structure ; 16 (1998),6 |
| Beschreibung: | S. 3126 - 4126 Ill., graph. Darst. |
Internformat
MARC
| LEADER | 00000nam a2200000zcc4500 | ||
|---|---|---|---|
| 001 | BV022077676 | ||
| 003 | DE-604 | ||
| 005 | 19990519000000.0 | ||
| 007 | t | ||
| 008 | 990519s1998 ad|| |||| 10||| eng d | ||
| 035 | |a (OCoLC)634048873 | ||
| 035 | |a (DE-599)BVBBV022077676 | ||
| 040 | |a DE-604 |b ger | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-706 | ||
| 110 | 2 | |a International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication |e Verfasser |0 (DE-588)16145128-7 |4 aut | |
| 245 | 1 | 0 | |a Papers from the ... International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication |n 42 (1998) |p 26 - 29 May 1998, The Westin Hotel, Chicago, Illinois |c ed. for the conference: Christie Marrian |
| 264 | 1 | |a New York |b American Inst. of Physics |c 1998 | |
| 300 | |a S. 3126 - 4126 |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 500 | |a Literaturangaben. - In: Journal of vacuum science & technology : Second series : B, Microelectronics and nanometer structure ; 16 (1998),6 | ||
| 700 | 1 | |a Kern, Dieter |e Sonstige |4 oth | |
| 700 | 1 | |a Pang, Stella W. |e Sonstige |4 oth | |
| 700 | 1 | |a Marrian, Christie R. K. |e Sonstige |4 oth | |
| 773 | 0 | 8 | |w (DE-604)BV021857305 |g 2,B,16,3 |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-015292491 | ||
Datensatz im Suchindex
| _version_ | 1804136053280342016 |
|---|---|
| adam_txt | |
| any_adam_object | |
| any_adam_object_boolean | |
| author_corporate | International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication |
| author_corporate_role | aut |
| author_facet | International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication |
| author_sort | International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication |
| building | Verbundindex |
| bvnumber | BV022077676 |
| ctrlnum | (OCoLC)634048873 (DE-599)BVBBV022077676 |
| format | Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01285nam a2200301zcc4500</leader><controlfield tag="001">BV022077676</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">19990519000000.0</controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">990519s1998 ad|| |||| 10||| eng d</controlfield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)634048873</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV022077676</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-706</subfield></datafield><datafield tag="110" ind1="2" ind2=" "><subfield code="a">International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication</subfield><subfield code="e">Verfasser</subfield><subfield code="0">(DE-588)16145128-7</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Papers from the ... International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication</subfield><subfield code="n">42 (1998)</subfield><subfield code="p">26 - 29 May 1998, The Westin Hotel, Chicago, Illinois</subfield><subfield code="c">ed. for the conference: Christie Marrian</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">New York</subfield><subfield code="b">American Inst. of Physics</subfield><subfield code="c">1998</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">S. 3126 - 4126</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Literaturangaben. - In: Journal of vacuum science & technology : Second series : B, Microelectronics and nanometer structure ; 16 (1998),6</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Kern, Dieter</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Pang, Stella W.</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Marrian, Christie R. K.</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="773" ind1="0" ind2="8"><subfield code="w">(DE-604)BV021857305</subfield><subfield code="g">2,B,16,3</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-015292491</subfield></datafield></record></collection> |
| id | DE-604.BV022077676 |
| illustrated | Illustrated |
| index_date | 2024-07-02T16:14:09Z |
| indexdate | 2024-07-09T20:50:17Z |
| institution | BVB |
| institution_GND | (DE-588)16145128-7 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-015292491 |
| oclc_num | 634048873 |
| open_access_boolean | |
| owner | DE-706 |
| owner_facet | DE-706 |
| physical | S. 3126 - 4126 Ill., graph. Darst. |
| publishDate | 1998 |
| publishDateSearch | 1998 |
| publishDateSort | 1998 |
| publisher | American Inst. of Physics |
| record_format | marc |
| spelling | International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication Verfasser (DE-588)16145128-7 aut Papers from the ... International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication 42 (1998) 26 - 29 May 1998, The Westin Hotel, Chicago, Illinois ed. for the conference: Christie Marrian New York American Inst. of Physics 1998 S. 3126 - 4126 Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Literaturangaben. - In: Journal of vacuum science & technology : Second series : B, Microelectronics and nanometer structure ; 16 (1998),6 Kern, Dieter Sonstige oth Pang, Stella W. Sonstige oth Marrian, Christie R. K. Sonstige oth (DE-604)BV021857305 2,B,16,3 |
| spellingShingle | Papers from the ... International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication |
| title | Papers from the ... International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication |
| title_auth | Papers from the ... International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication |
| title_exact_search | Papers from the ... International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication |
| title_exact_search_txtP | Papers from the ... International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication |
| title_full | Papers from the ... International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication 42 (1998) 26 - 29 May 1998, The Westin Hotel, Chicago, Illinois ed. for the conference: Christie Marrian |
| title_fullStr | Papers from the ... International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication 42 (1998) 26 - 29 May 1998, The Westin Hotel, Chicago, Illinois ed. for the conference: Christie Marrian |
| title_full_unstemmed | Papers from the ... International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication 42 (1998) 26 - 29 May 1998, The Westin Hotel, Chicago, Illinois ed. for the conference: Christie Marrian |
| title_short | Papers from the ... International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication |
| title_sort | papers from the international conference on electron ion and photon beam technology and nanofabrication 26 29 may 1998 the westin hotel chicago illinois |
| volume_link | (DE-604)BV021857305 |
| work_keys_str_mv | AT internationalconferenceonelectronionandphotonbeamtechnologyandnanofabrication papersfromtheinternationalconferenceonelectronionandphotonbeamtechnologyandnanofabrication421998 AT kerndieter papersfromtheinternationalconferenceonelectronionandphotonbeamtechnologyandnanofabrication421998 AT pangstellaw papersfromtheinternationalconferenceonelectronionandphotonbeamtechnologyandnanofabrication421998 AT marrianchristierk papersfromtheinternationalconferenceonelectronionandphotonbeamtechnologyandnanofabrication421998 |