Papers from the ... International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication: 41 (1997)
Gespeichert in:
| Körperschaft: | |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
New York
American Inst. of Physics
1997
|
| Beschreibung: | Literaturangaben. - In: Journal of vacuum science & technology : Second series : B, Microelectronics and nanometer structure ; 15 (1997),6 |
| Beschreibung: | S. 1853 - 3075 Ill., graph. Darst. |
Internformat
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| 500 | |a Literaturangaben. - In: Journal of vacuum science & technology : Second series : B, Microelectronics and nanometer structure ; 15 (1997),6 | ||
| 700 | 1 | |a Kern, Dieter |e Sonstige |4 oth | |
| 700 | 1 | |a Pang, Stella W. |e Sonstige |4 oth | |
| 700 | 1 | |a Marrian, Christie R. K. |e Sonstige |4 oth | |
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| illustrated | Illustrated |
| index_date | 2024-07-02T16:14:09Z |
| indexdate | 2024-07-09T20:50:17Z |
| institution | BVB |
| institution_GND | (DE-588)16145128-7 |
| language | English |
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| physical | S. 1853 - 3075 Ill., graph. Darst. |
| publishDate | 1997 |
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| spelling | International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication Verfasser (DE-588)16145128-7 aut Papers from the ... International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication 41 (1997) New York American Inst. of Physics 1997 S. 1853 - 3075 Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Literaturangaben. - In: Journal of vacuum science & technology : Second series : B, Microelectronics and nanometer structure ; 15 (1997),6 Kern, Dieter Sonstige oth Pang, Stella W. Sonstige oth Marrian, Christie R. K. Sonstige oth (DE-604)BV021857305 2,B,15,2 |
| spellingShingle | Papers from the ... International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication |
| title | Papers from the ... International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication |
| title_auth | Papers from the ... International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication |
| title_exact_search | Papers from the ... International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication |
| title_exact_search_txtP | Papers from the ... International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication |
| title_full | Papers from the ... International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication 41 (1997) |
| title_fullStr | Papers from the ... International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication 41 (1997) |
| title_full_unstemmed | Papers from the ... International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication 41 (1997) |
| title_short | Papers from the ... International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication |
| title_sort | papers from the international conference on electron ion and photon beam technology and nanofabrication |
| volume_link | (DE-604)BV021857305 |
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