APA-Zitierstil (7. Ausg.)

(1997). Science and technology of semiconductor surface preparation: Symposium held April 1 - 3, 1997, San Francisco, California, USA. Materials Research Soc.

Chicago-Zitierstil (17. Ausg.)

Science and Technology of Semiconductor Surface Preparation: Symposium Held April 1 - 3, 1997, San Francisco, California, USA. Pittsburgh, Pa: Materials Research Soc, 1997.

MLA-Zitierstil (9. Ausg.)

Science and Technology of Semiconductor Surface Preparation: Symposium Held April 1 - 3, 1997, San Francisco, California, USA. Materials Research Soc, 1997.