Science and technology of semiconductor surface preparation: symposium held April 1 - 3, 1997, San Francisco, California, USA
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Pittsburgh, Pa.
Materials Research Soc.
1997
|
| Schriftenreihe: | Materials Research Society symposium proceedings
477 |
| Schlagworte: | |
| Beschreibung: | XIII, 545 S. Ill., graph. Darst. |
| ISBN: | 1558993819 |
Internformat
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Datensatz im Suchindex
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| illustrated | Illustrated |
| index_date | 2024-07-02T16:14:00Z |
| indexdate | 2024-07-09T20:50:13Z |
| institution | BVB |
| isbn | 1558993819 |
| language | English |
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| physical | XIII, 545 S. Ill., graph. Darst. |
| publishDate | 1997 |
| publishDateSearch | 1997 |
| publishDateSort | 1997 |
| publisher | Materials Research Soc. |
| record_format | marc |
| series | Materials Research Society symposium proceedings |
| series2 | Materials Research Society symposium proceedings |
| spelling | Science and technology of semiconductor surface preparation symposium held April 1 - 3, 1997, San Francisco, California, USA Pittsburgh, Pa. Materials Research Soc. 1997 XIII, 545 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Materials Research Society symposium proceedings 477 Semiconductors Cleaning Congresses Semiconductors Surfaces Congresses Surface chemistry Congresses Surface preparation Congresses Halbleiteroberfläche (DE-588)4137418-6 gnd rswk-swf Oberflächenbehandlung (DE-588)4042908-8 gnd rswk-swf (DE-588)1071861417 Konferenzschrift gnd-content Oberflächenbehandlung (DE-588)4042908-8 s DE-604 Halbleiteroberfläche (DE-588)4137418-6 s Higashi, Gregg S. Sonstige oth Materials Research Society symposium proceedings 477 (DE-604)BV001899105 |
| spellingShingle | Science and technology of semiconductor surface preparation symposium held April 1 - 3, 1997, San Francisco, California, USA Materials Research Society symposium proceedings Semiconductors Cleaning Congresses Semiconductors Surfaces Congresses Surface chemistry Congresses Surface preparation Congresses Halbleiteroberfläche (DE-588)4137418-6 gnd Oberflächenbehandlung (DE-588)4042908-8 gnd |
| subject_GND | (DE-588)4137418-6 (DE-588)4042908-8 (DE-588)1071861417 |
| title | Science and technology of semiconductor surface preparation symposium held April 1 - 3, 1997, San Francisco, California, USA |
| title_auth | Science and technology of semiconductor surface preparation symposium held April 1 - 3, 1997, San Francisco, California, USA |
| title_exact_search | Science and technology of semiconductor surface preparation symposium held April 1 - 3, 1997, San Francisco, California, USA |
| title_exact_search_txtP | Science and technology of semiconductor surface preparation symposium held April 1 - 3, 1997, San Francisco, California, USA |
| title_full | Science and technology of semiconductor surface preparation symposium held April 1 - 3, 1997, San Francisco, California, USA |
| title_fullStr | Science and technology of semiconductor surface preparation symposium held April 1 - 3, 1997, San Francisco, California, USA |
| title_full_unstemmed | Science and technology of semiconductor surface preparation symposium held April 1 - 3, 1997, San Francisco, California, USA |
| title_short | Science and technology of semiconductor surface preparation |
| title_sort | science and technology of semiconductor surface preparation symposium held april 1 3 1997 san francisco california usa |
| title_sub | symposium held April 1 - 3, 1997, San Francisco, California, USA |
| topic | Semiconductors Cleaning Congresses Semiconductors Surfaces Congresses Surface chemistry Congresses Surface preparation Congresses Halbleiteroberfläche (DE-588)4137418-6 gnd Oberflächenbehandlung (DE-588)4042908-8 gnd |
| topic_facet | Semiconductors Cleaning Congresses Semiconductors Surfaces Congresses Surface chemistry Congresses Surface preparation Congresses Halbleiteroberfläche Oberflächenbehandlung Konferenzschrift |
| volume_link | (DE-604)BV001899105 |
| work_keys_str_mv | AT higashigreggs scienceandtechnologyofsemiconductorsurfacepreparationsymposiumheldapril131997sanfranciscocaliforniausa |