Rapid thermal processing of electronic materials: symposium held April 21 - 23, 1987, Anaheim, California, USA
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Pittsburgh, Pa
Materials Research Soc.
1987
|
| Schriftenreihe: | Materials Research Society symposia proceedings
92 |
| Schlagworte: | |
| Beschreibung: | XVII, 485 S. Ill., graph. Darst. |
| ISBN: | 0931837596 |
Internformat
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Datensatz im Suchindex
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| callnumber-subject | TK - Electrical and Nuclear Engineering |
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| dewey-full | 621.3815/2 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
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| dewey-search | 621.3815/2 |
| dewey-sort | 3621.3815 12 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| discipline_str_mv | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Book |
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| illustrated | Illustrated |
| index_date | 2024-07-02T16:14:00Z |
| indexdate | 2024-07-09T20:50:13Z |
| institution | BVB |
| isbn | 0931837596 |
| language | English |
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| physical | XVII, 485 S. Ill., graph. Darst. |
| publishDate | 1987 |
| publishDateSearch | 1987 |
| publishDateSort | 1987 |
| publisher | Materials Research Soc. |
| record_format | marc |
| series | Materials Research Society symposia proceedings |
| series2 | Materials Research Society symposia proceedings |
| spelling | Rapid thermal processing of electronic materials symposium held April 21 - 23, 1987, Anaheim, California, USA Pittsburgh, Pa Materials Research Soc. 1987 XVII, 485 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Materials Research Society symposia proceedings 92 Rapid thermal processing Congresses Semiconductor doping Congresses Semiconductors Heat treatment Congresses Rapid thermal processing (DE-588)4347011-7 gnd rswk-swf Wärmebehandlung (DE-588)4064180-6 gnd rswk-swf Halbleiter (DE-588)4022993-2 gnd rswk-swf Dotierung (DE-588)4130672-7 gnd rswk-swf (DE-588)1071861417 Konferenzschrift gnd-content Rapid thermal processing (DE-588)4347011-7 s DE-604 Halbleiter (DE-588)4022993-2 s Dotierung (DE-588)4130672-7 s 1\p DE-604 Wärmebehandlung (DE-588)4064180-6 s 2\p DE-604 Wilson, Syd R. Sonstige oth Materials Research Society symposia proceedings 92 (DE-604)BV001899105 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 2\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Rapid thermal processing of electronic materials symposium held April 21 - 23, 1987, Anaheim, California, USA Materials Research Society symposia proceedings Rapid thermal processing Congresses Semiconductor doping Congresses Semiconductors Heat treatment Congresses Rapid thermal processing (DE-588)4347011-7 gnd Wärmebehandlung (DE-588)4064180-6 gnd Halbleiter (DE-588)4022993-2 gnd Dotierung (DE-588)4130672-7 gnd |
| subject_GND | (DE-588)4347011-7 (DE-588)4064180-6 (DE-588)4022993-2 (DE-588)4130672-7 (DE-588)1071861417 |
| title | Rapid thermal processing of electronic materials symposium held April 21 - 23, 1987, Anaheim, California, USA |
| title_auth | Rapid thermal processing of electronic materials symposium held April 21 - 23, 1987, Anaheim, California, USA |
| title_exact_search | Rapid thermal processing of electronic materials symposium held April 21 - 23, 1987, Anaheim, California, USA |
| title_exact_search_txtP | Rapid thermal processing of electronic materials symposium held April 21 - 23, 1987, Anaheim, California, USA |
| title_full | Rapid thermal processing of electronic materials symposium held April 21 - 23, 1987, Anaheim, California, USA |
| title_fullStr | Rapid thermal processing of electronic materials symposium held April 21 - 23, 1987, Anaheim, California, USA |
| title_full_unstemmed | Rapid thermal processing of electronic materials symposium held April 21 - 23, 1987, Anaheim, California, USA |
| title_short | Rapid thermal processing of electronic materials |
| title_sort | rapid thermal processing of electronic materials symposium held april 21 23 1987 anaheim california usa |
| title_sub | symposium held April 21 - 23, 1987, Anaheim, California, USA |
| topic | Rapid thermal processing Congresses Semiconductor doping Congresses Semiconductors Heat treatment Congresses Rapid thermal processing (DE-588)4347011-7 gnd Wärmebehandlung (DE-588)4064180-6 gnd Halbleiter (DE-588)4022993-2 gnd Dotierung (DE-588)4130672-7 gnd |
| topic_facet | Rapid thermal processing Congresses Semiconductor doping Congresses Semiconductors Heat treatment Congresses Rapid thermal processing Wärmebehandlung Halbleiter Dotierung Konferenzschrift |
| volume_link | (DE-604)BV001899105 |
| work_keys_str_mv | AT wilsonsydr rapidthermalprocessingofelectronicmaterialssymposiumheldapril21231987anaheimcaliforniausa |