APA (7th ed.) Citation

Coburn, J. W. (1986). Plasma processing: Symposium held April 15-18, 1986, Palo Alto, Calif., USA. Materials Research Soc.

Chicago Style (17th ed.) Citation

Coburn, J. W. Plasma Processing: Symposium Held April 15-18, 1986, Palo Alto, Calif., USA. Pittsburgh, Pa: Materials Research Soc, 1986.

MLA (9th ed.) Citation

Coburn, J. W. Plasma Processing: Symposium Held April 15-18, 1986, Palo Alto, Calif., USA. Materials Research Soc, 1986.