Plasma processing: symposium held April 15-18, 1986, Palo Alto, Calif., USA
Gespeichert in:
| Weitere Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
Pittsburgh, Pa.
Materials Research Soc.
1986
|
| Schriftenreihe: | Materials Research Society Symposia proceedings
68 |
| Schlagworte: | |
| Online-Zugang: | Inhaltsverzeichnis |
| Beschreibung: | XVII, 463 S. |
| ISBN: | 0931837340 |
Internformat
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Datensatz im Suchindex
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| genre_facet | Konferenzschrift 1986 Palo Alto |
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| illustrated | Not Illustrated |
| index_date | 2024-07-02T16:14:00Z |
| indexdate | 2024-07-09T20:50:13Z |
| institution | BVB |
| isbn | 0931837340 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-015288177 |
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| physical | XVII, 463 S. |
| publishDate | 1986 |
| publishDateSearch | 1986 |
| publishDateSort | 1986 |
| publisher | Materials Research Soc. |
| record_format | marc |
| series | Materials Research Society Symposia proceedings |
| series2 | Materials Research Society Symposia proceedings |
| spelling | Plasma processing symposium held April 15-18, 1986, Palo Alto, Calif., USA Pittsburgh, Pa. Materials Research Soc. 1986 XVII, 463 S. txt rdacontent n rdamedia nc rdacarrier Materials Research Society Symposia proceedings 68 Plasmaphysik (DE-588)4046259-6 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1986 Palo Alto gnd-content Plasmaphysik (DE-588)4046259-6 s DE-604 Coburn, J. W. edt Materials Research Society Symposia proceedings 68 (DE-604)BV001899105 68 http://www.gbv.de/dms/tib-ub-hannover/017978645.pdf Inhaltsverzeichnis |
| spellingShingle | Plasma processing symposium held April 15-18, 1986, Palo Alto, Calif., USA Materials Research Society Symposia proceedings Plasmaphysik (DE-588)4046259-6 gnd |
| subject_GND | (DE-588)4046259-6 (DE-588)1071861417 |
| title | Plasma processing symposium held April 15-18, 1986, Palo Alto, Calif., USA |
| title_auth | Plasma processing symposium held April 15-18, 1986, Palo Alto, Calif., USA |
| title_exact_search | Plasma processing symposium held April 15-18, 1986, Palo Alto, Calif., USA |
| title_exact_search_txtP | Plasma processing symposium held April 15-18, 1986, Palo Alto, Calif., USA |
| title_full | Plasma processing symposium held April 15-18, 1986, Palo Alto, Calif., USA |
| title_fullStr | Plasma processing symposium held April 15-18, 1986, Palo Alto, Calif., USA |
| title_full_unstemmed | Plasma processing symposium held April 15-18, 1986, Palo Alto, Calif., USA |
| title_short | Plasma processing |
| title_sort | plasma processing symposium held april 15 18 1986 palo alto calif usa |
| title_sub | symposium held April 15-18, 1986, Palo Alto, Calif., USA |
| topic | Plasmaphysik (DE-588)4046259-6 gnd |
| topic_facet | Plasmaphysik Konferenzschrift 1986 Palo Alto |
| url | http://www.gbv.de/dms/tib-ub-hannover/017978645.pdf |
| volume_link | (DE-604)BV001899105 |
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