Proceedings of the ... International Vacuum Microelectronics Conference: 5 (1992) 13 - 17 July 1992, Hotel Chateau : Wilhelminenberg, Vienna, Austria
Gespeichert in:
| Körperschaft: | |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
New York
American Inst. of Physics
1993
|
| Beschreibung: | In: Journal of vacuum science & technology / 2 / B ; 11 (1993), 2 |
| Beschreibung: | S. 350 - 530 Ill., graph. Darst. |
Internformat
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| index_date | 2024-07-02T16:13:51Z |
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| physical | S. 350 - 530 Ill., graph. Darst. |
| publishDate | 1993 |
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| spelling | International Vacuum Microelectronics Conference Verfasser (DE-588)16144606-1 aut Proceedings of the ... International Vacuum Microelectronics Conference 5 (1992) 13 - 17 July 1992, Hotel Chateau : Wilhelminenberg, Vienna, Austria New York American Inst. of Physics 1993 S. 350 - 530 Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier In: Journal of vacuum science & technology / 2 / B ; 11 (1993), 2 Mitterauer, Johannes 1936- Sonstige (DE-588)136281605 oth Baptist, Robert Sonstige oth Temple, Dorota Sonstige oth (DE-604)BV021855184 2,B,11,1 |
| spellingShingle | Proceedings of the ... International Vacuum Microelectronics Conference |
| title | Proceedings of the ... International Vacuum Microelectronics Conference |
| title_auth | Proceedings of the ... International Vacuum Microelectronics Conference |
| title_exact_search | Proceedings of the ... International Vacuum Microelectronics Conference |
| title_exact_search_txtP | Proceedings of the ... International Vacuum Microelectronics Conference |
| title_full | Proceedings of the ... International Vacuum Microelectronics Conference 5 (1992) 13 - 17 July 1992, Hotel Chateau : Wilhelminenberg, Vienna, Austria |
| title_fullStr | Proceedings of the ... International Vacuum Microelectronics Conference 5 (1992) 13 - 17 July 1992, Hotel Chateau : Wilhelminenberg, Vienna, Austria |
| title_full_unstemmed | Proceedings of the ... International Vacuum Microelectronics Conference 5 (1992) 13 - 17 July 1992, Hotel Chateau : Wilhelminenberg, Vienna, Austria |
| title_short | Proceedings of the ... International Vacuum Microelectronics Conference |
| title_sort | proceedings of the international vacuum microelectronics conference 13 17 july 1992 hotel chateau wilhelminenberg vienna austria |
| volume_link | (DE-604)BV021855184 |
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