Mechanical properties of CMOS thin films:
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Mikrofilm Buch |
| Sprache: | English |
| Veröffentlicht: |
1999
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| Ausgabe: | [Mikrofiche-Ausg.] |
| Schriftenreihe: | ETH-Diss
13457 |
| Schlagworte: | |
| Beschreibung: | Zürich, Techn. Hochsch., Diss., 1999. -Zsfassung in dt. Sprache. -Mikrofiche-Ausg.: 2 Mikrofiches |
| Beschreibung: | 143 S. graph. Darst. |
Internformat
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Datensatz im Suchindex
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| author | Ziebart, Volker 1969- |
| author_GND | (DE-588)122072901 |
| author_facet | Ziebart, Volker 1969- |
| author_role | aut |
| author_sort | Ziebart, Volker 1969- |
| author_variant | v z vz |
| building | Verbundindex |
| bvnumber | BV022068413 |
| ctrlnum | (OCoLC)633227697 (DE-599)BVBBV022068413 |
| edition | [Mikrofiche-Ausg.] |
| format | Microfilm Book |
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| genre_facet | Hochschulschrift |
| id | DE-604.BV022068413 |
| illustrated | Illustrated |
| index_date | 2024-07-02T16:13:48Z |
| indexdate | 2024-07-09T20:50:08Z |
| institution | BVB |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-015283188 |
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| physical | 143 S. graph. Darst. |
| publishDate | 1999 |
| publishDateSearch | 1999 |
| publishDateSort | 1999 |
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| series | ETH-Diss |
| series2 | ETH-Diss |
| spelling | Ziebart, Volker 1969- Verfasser (DE-588)122072901 aut Mechanical properties of CMOS thin films presented by Volker Ziebart [Mikrofiche-Ausg.] 1999 143 S. graph. Darst. h rdamedia he rdacarrier ETH-Diss 13457 Zürich, Techn. Hochsch., Diss., 1999. -Zsfassung in dt. Sprache. -Mikrofiche-Ausg.: 2 Mikrofiches Siliciumbauelement (DE-588)4181368-6 gnd rswk-swf Mikromechanik (DE-588)4205811-9 gnd rswk-swf CMOS-Schaltung (DE-588)4148111-2 gnd rswk-swf Mechanische Eigenschaft (DE-588)4217961-0 gnd rswk-swf Eigenspannung (DE-588)4013788-0 gnd rswk-swf Sensor (DE-588)4038824-4 gnd rswk-swf CMOS (DE-588)4010319-5 gnd rswk-swf Biegefestigkeit (DE-588)4145333-5 gnd rswk-swf Dünne Schicht (DE-588)4136925-7 gnd rswk-swf 1\p (DE-588)4113937-9 Hochschulschrift gnd-content Sensor (DE-588)4038824-4 s DE-604 Biegefestigkeit (DE-588)4145333-5 s CMOS-Schaltung (DE-588)4148111-2 s Siliciumbauelement (DE-588)4181368-6 s Mikromechanik (DE-588)4205811-9 s CMOS (DE-588)4010319-5 s Dünne Schicht (DE-588)4136925-7 s Eigenspannung (DE-588)4013788-0 s Mechanische Eigenschaft (DE-588)4217961-0 s 2\p DE-604 ETH-Diss 13457 (DE-604)BV021854884 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 2\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Ziebart, Volker 1969- Mechanical properties of CMOS thin films ETH-Diss Siliciumbauelement (DE-588)4181368-6 gnd Mikromechanik (DE-588)4205811-9 gnd CMOS-Schaltung (DE-588)4148111-2 gnd Mechanische Eigenschaft (DE-588)4217961-0 gnd Eigenspannung (DE-588)4013788-0 gnd Sensor (DE-588)4038824-4 gnd CMOS (DE-588)4010319-5 gnd Biegefestigkeit (DE-588)4145333-5 gnd Dünne Schicht (DE-588)4136925-7 gnd |
| subject_GND | (DE-588)4181368-6 (DE-588)4205811-9 (DE-588)4148111-2 (DE-588)4217961-0 (DE-588)4013788-0 (DE-588)4038824-4 (DE-588)4010319-5 (DE-588)4145333-5 (DE-588)4136925-7 (DE-588)4113937-9 |
| title | Mechanical properties of CMOS thin films |
| title_auth | Mechanical properties of CMOS thin films |
| title_exact_search | Mechanical properties of CMOS thin films |
| title_exact_search_txtP | Mechanical properties of CMOS thin films |
| title_full | Mechanical properties of CMOS thin films presented by Volker Ziebart |
| title_fullStr | Mechanical properties of CMOS thin films presented by Volker Ziebart |
| title_full_unstemmed | Mechanical properties of CMOS thin films presented by Volker Ziebart |
| title_short | Mechanical properties of CMOS thin films |
| title_sort | mechanical properties of cmos thin films |
| topic | Siliciumbauelement (DE-588)4181368-6 gnd Mikromechanik (DE-588)4205811-9 gnd CMOS-Schaltung (DE-588)4148111-2 gnd Mechanische Eigenschaft (DE-588)4217961-0 gnd Eigenspannung (DE-588)4013788-0 gnd Sensor (DE-588)4038824-4 gnd CMOS (DE-588)4010319-5 gnd Biegefestigkeit (DE-588)4145333-5 gnd Dünne Schicht (DE-588)4136925-7 gnd |
| topic_facet | Siliciumbauelement Mikromechanik CMOS-Schaltung Mechanische Eigenschaft Eigenspannung Sensor CMOS Biegefestigkeit Dünne Schicht Hochschulschrift |
| volume_link | (DE-604)BV021854884 |
| work_keys_str_mv | AT ziebartvolker mechanicalpropertiesofcmosthinfilms |