ASMC ... proceedings: 1993 Theme: Factory of the future : October 18 - 19, 1993, Boston, Massachusetts
Gespeichert in:
| Körperschaft: | |
|---|---|
| Format: | Tagungsbericht Buch |
| Sprache: | English |
| Veröffentlicht: |
Piscataway, NJ
IEEE Service Center [u.a.]
1993
|
| Schriftenreihe: | ASMC ... proceedings
1993 |
| Beschreibung: | VI, 253 S. graph. Darst. |
| ISBN: | 0780313666 0780313674 0780313682 |
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Datensatz im Suchindex
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| indexdate | 2024-07-09T20:49:47Z |
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| isbn | 0780313666 0780313674 0780313682 |
| language | English |
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| publishDate | 1993 |
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| spelling | Advanced Semiconductor Manufacturing Conference and Workshop Verfasser (DE-588)5032658-2 aut ASMC ... proceedings 1993 Theme: Factory of the future : October 18 - 19, 1993, Boston, Massachusetts IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop Piscataway, NJ IEEE Service Center [u.a.] 1993 VI, 253 S. graph. Darst. txt rdacontent n rdamedia nc rdacarrier ASMC ... proceedings 1993 (DE-604)BV021850673 1993 |
| spellingShingle | ASMC ... proceedings |
| title | ASMC ... proceedings |
| title_auth | ASMC ... proceedings |
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| title_full | ASMC ... proceedings 1993 Theme: Factory of the future : October 18 - 19, 1993, Boston, Massachusetts IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop |
| title_fullStr | ASMC ... proceedings 1993 Theme: Factory of the future : October 18 - 19, 1993, Boston, Massachusetts IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop |
| title_full_unstemmed | ASMC ... proceedings 1993 Theme: Factory of the future : October 18 - 19, 1993, Boston, Massachusetts IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop |
| title_short | ASMC ... proceedings |
| title_sort | asmc proceedings theme factory of the future october 18 19 1993 boston massachusetts |
| volume_link | (DE-604)BV021850673 |
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