ASMC ... proceedings: 1992 September 30 - October 1,1992. Cambridge, Massachusetts
Gespeichert in:
| Körperschaft: | |
|---|---|
| Format: | Tagungsbericht Buch |
| Sprache: | English |
| Veröffentlicht: |
Piscataway, NJ
IEEE Service Center [u.a.]
1992
|
| Beschreibung: | V, 230 S. Ill., graph. Darst. |
| ISBN: | 0780307402 0780307410 0780307429 |
Internformat
MARC
| LEADER | 00000nam a2200000zcc4500 | ||
|---|---|---|---|
| 001 | BV022047035 | ||
| 003 | DE-604 | ||
| 005 | 20060314000000.0 | ||
| 007 | t | ||
| 008 | 960614s1992 ad|| |||| 10||| eng d | ||
| 020 | |a 0780307402 |9 0-7803-0740-2 | ||
| 020 | |a 0780307410 |9 0-7803-0741-0 | ||
| 020 | |a 0780307429 |9 0-7803-0742-9 | ||
| 035 | |a (OCoLC)633186163 | ||
| 035 | |a (DE-599)BVBBV022047035 | ||
| 040 | |a DE-604 |b ger | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-706 | ||
| 111 | 2 | |a Advanced Semiconductor Manufacturing Conference and Workshop |j Verfasser |0 (DE-588)5032658-2 |4 aut | |
| 245 | 1 | 0 | |a ASMC ... proceedings |n 1992 |p September 30 - October 1,1992. Cambridge, Massachusetts |c IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop |
| 264 | 1 | |a Piscataway, NJ |b IEEE Service Center [u.a.] |c 1992 | |
| 300 | |a V, 230 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 773 | 0 | 8 | |w (DE-604)BV021850673 |g 1992 |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-015261743 | ||
Datensatz im Suchindex
| _version_ | 1804136022372515840 |
|---|---|
| adam_txt | |
| any_adam_object | |
| any_adam_object_boolean | |
| author_corporate | Advanced Semiconductor Manufacturing Conference and Workshop |
| author_corporate_role | aut |
| author_facet | Advanced Semiconductor Manufacturing Conference and Workshop |
| author_sort | Advanced Semiconductor Manufacturing Conference and Workshop |
| building | Verbundindex |
| bvnumber | BV022047035 |
| ctrlnum | (OCoLC)633186163 (DE-599)BVBBV022047035 |
| format | Conference Proceeding Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01016nam a2200289zcc4500</leader><controlfield tag="001">BV022047035</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20060314000000.0</controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">960614s1992 ad|| |||| 10||| eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">0780307402</subfield><subfield code="9">0-7803-0740-2</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">0780307410</subfield><subfield code="9">0-7803-0741-0</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">0780307429</subfield><subfield code="9">0-7803-0742-9</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)633186163</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV022047035</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-706</subfield></datafield><datafield tag="111" ind1="2" ind2=" "><subfield code="a">Advanced Semiconductor Manufacturing Conference and Workshop</subfield><subfield code="j">Verfasser</subfield><subfield code="0">(DE-588)5032658-2</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">ASMC ... proceedings</subfield><subfield code="n">1992</subfield><subfield code="p">September 30 - October 1,1992. Cambridge, Massachusetts</subfield><subfield code="c">IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Piscataway, NJ</subfield><subfield code="b">IEEE Service Center [u.a.]</subfield><subfield code="c">1992</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">V, 230 S.</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="773" ind1="0" ind2="8"><subfield code="w">(DE-604)BV021850673</subfield><subfield code="g">1992</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-015261743</subfield></datafield></record></collection> |
| id | DE-604.BV022047035 |
| illustrated | Illustrated |
| index_date | 2024-07-02T16:13:11Z |
| indexdate | 2024-07-09T20:49:47Z |
| institution | BVB |
| institution_GND | (DE-588)5032658-2 |
| isbn | 0780307402 0780307410 0780307429 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-015261743 |
| oclc_num | 633186163 |
| open_access_boolean | |
| owner | DE-706 |
| owner_facet | DE-706 |
| physical | V, 230 S. Ill., graph. Darst. |
| publishDate | 1992 |
| publishDateSearch | 1992 |
| publishDateSort | 1992 |
| publisher | IEEE Service Center [u.a.] |
| record_format | marc |
| spelling | Advanced Semiconductor Manufacturing Conference and Workshop Verfasser (DE-588)5032658-2 aut ASMC ... proceedings 1992 September 30 - October 1,1992. Cambridge, Massachusetts IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop Piscataway, NJ IEEE Service Center [u.a.] 1992 V, 230 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier (DE-604)BV021850673 1992 |
| spellingShingle | ASMC ... proceedings |
| title | ASMC ... proceedings |
| title_auth | ASMC ... proceedings |
| title_exact_search | ASMC ... proceedings |
| title_exact_search_txtP | ASMC ... proceedings |
| title_full | ASMC ... proceedings 1992 September 30 - October 1,1992. Cambridge, Massachusetts IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop |
| title_fullStr | ASMC ... proceedings 1992 September 30 - October 1,1992. Cambridge, Massachusetts IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop |
| title_full_unstemmed | ASMC ... proceedings 1992 September 30 - October 1,1992. Cambridge, Massachusetts IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop |
| title_short | ASMC ... proceedings |
| title_sort | asmc proceedings september 30 october 1 1992 cambridge massachusetts |
| volume_link | (DE-604)BV021850673 |
| work_keys_str_mv | AT advancedsemiconductormanufacturingconferenceandworkshop asmcproceedings1992 |