ASMC ... proceedings: 1991 October 21-23, 1991, Boston, Massachusetts
Gespeichert in:
| Körperschaft: | |
|---|---|
| Format: | Tagungsbericht Buch |
| Sprache: | English |
| Veröffentlicht: |
Piscataway, NJ
IEEE Service Center [u.a.]
1991
|
| Beschreibung: | X, 212 S. Ill., graph. Darst. |
| ISBN: | 0780301528 0780301536 0780301544 |
Internformat
MARC
| LEADER | 00000nam a2200000zcc4500 | ||
|---|---|---|---|
| 001 | BV022047034 | ||
| 003 | DE-604 | ||
| 005 | 20060314000000.0 | ||
| 007 | t | ||
| 008 | 960614s1991 ad|| |||| 10||| eng d | ||
| 020 | |a 0780301528 |9 0-7803-0152-8 | ||
| 020 | |a 0780301536 |9 0-7803-0153-6 | ||
| 020 | |a 0780301544 |9 0-7803-0154-4 | ||
| 035 | |a (OCoLC)633186121 | ||
| 035 | |a (DE-599)BVBBV022047034 | ||
| 040 | |a DE-604 |b ger | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-706 | ||
| 111 | 2 | |a Advanced Semiconductor Manufacturing Conference and Workshop |j Verfasser |0 (DE-588)5032658-2 |4 aut | |
| 245 | 1 | 0 | |a ASMC ... proceedings |n 1991 |p October 21-23, 1991, Boston, Massachusetts |c IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop |
| 264 | 1 | |a Piscataway, NJ |b IEEE Service Center [u.a.] |c 1991 | |
| 300 | |a X, 212 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 773 | 0 | 8 | |w (DE-604)BV021850673 |g 1991 |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-015261742 | ||
Datensatz im Suchindex
| _version_ | 1804136022371467264 |
|---|---|
| adam_txt | |
| any_adam_object | |
| any_adam_object_boolean | |
| author_corporate | Advanced Semiconductor Manufacturing Conference and Workshop |
| author_corporate_role | aut |
| author_facet | Advanced Semiconductor Manufacturing Conference and Workshop |
| author_sort | Advanced Semiconductor Manufacturing Conference and Workshop |
| building | Verbundindex |
| bvnumber | BV022047034 |
| ctrlnum | (OCoLC)633186121 (DE-599)BVBBV022047034 |
| format | Conference Proceeding Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01003nam a2200289zcc4500</leader><controlfield tag="001">BV022047034</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20060314000000.0</controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">960614s1991 ad|| |||| 10||| eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">0780301528</subfield><subfield code="9">0-7803-0152-8</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">0780301536</subfield><subfield code="9">0-7803-0153-6</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">0780301544</subfield><subfield code="9">0-7803-0154-4</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)633186121</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV022047034</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-706</subfield></datafield><datafield tag="111" ind1="2" ind2=" "><subfield code="a">Advanced Semiconductor Manufacturing Conference and Workshop</subfield><subfield code="j">Verfasser</subfield><subfield code="0">(DE-588)5032658-2</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">ASMC ... proceedings</subfield><subfield code="n">1991</subfield><subfield code="p">October 21-23, 1991, Boston, Massachusetts</subfield><subfield code="c">IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Piscataway, NJ</subfield><subfield code="b">IEEE Service Center [u.a.]</subfield><subfield code="c">1991</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">X, 212 S.</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="773" ind1="0" ind2="8"><subfield code="w">(DE-604)BV021850673</subfield><subfield code="g">1991</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-015261742</subfield></datafield></record></collection> |
| id | DE-604.BV022047034 |
| illustrated | Illustrated |
| index_date | 2024-07-02T16:13:11Z |
| indexdate | 2024-07-09T20:49:47Z |
| institution | BVB |
| institution_GND | (DE-588)5032658-2 |
| isbn | 0780301528 0780301536 0780301544 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-015261742 |
| oclc_num | 633186121 |
| open_access_boolean | |
| owner | DE-706 |
| owner_facet | DE-706 |
| physical | X, 212 S. Ill., graph. Darst. |
| publishDate | 1991 |
| publishDateSearch | 1991 |
| publishDateSort | 1991 |
| publisher | IEEE Service Center [u.a.] |
| record_format | marc |
| spelling | Advanced Semiconductor Manufacturing Conference and Workshop Verfasser (DE-588)5032658-2 aut ASMC ... proceedings 1991 October 21-23, 1991, Boston, Massachusetts IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop Piscataway, NJ IEEE Service Center [u.a.] 1991 X, 212 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier (DE-604)BV021850673 1991 |
| spellingShingle | ASMC ... proceedings |
| title | ASMC ... proceedings |
| title_auth | ASMC ... proceedings |
| title_exact_search | ASMC ... proceedings |
| title_exact_search_txtP | ASMC ... proceedings |
| title_full | ASMC ... proceedings 1991 October 21-23, 1991, Boston, Massachusetts IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop |
| title_fullStr | ASMC ... proceedings 1991 October 21-23, 1991, Boston, Massachusetts IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop |
| title_full_unstemmed | ASMC ... proceedings 1991 October 21-23, 1991, Boston, Massachusetts IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop |
| title_short | ASMC ... proceedings |
| title_sort | asmc proceedings october 21 23 1991 boston massachusetts |
| volume_link | (DE-604)BV021850673 |
| work_keys_str_mv | AT advancedsemiconductormanufacturingconferenceandworkshop asmcproceedings1991 |