Micro electro mechanical systems: proceedings ; an investigation of micro structures, sensors, actuators, machines and robots 6 Fort Lauderdale, Florida, February 7-10, 1993
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
New York, NY
Inst. of Electrical and Electronics Engineers
1993
|
| Beschreibung: | XVII, 295 S. Ill., graph. Darst. |
| ISBN: | 078030957X 0780309588 0780309596 |
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| illustrated | Illustrated |
| index_date | 2024-07-02T16:13:01Z |
| indexdate | 2024-07-09T20:49:43Z |
| institution | BVB |
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| isbn | 078030957X 0780309588 0780309596 |
| language | English |
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| physical | XVII, 295 S. Ill., graph. Darst. |
| publishDate | 1993 |
| publishDateSearch | 1993 |
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| publisher | Inst. of Electrical and Electronics Engineers |
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| spelling | Micro electro mechanical systems proceedings ; an investigation of micro structures, sensors, actuators, machines and robots 6 Fort Lauderdale, Florida, February 7-10, 1993 New York, NY Inst. of Electrical and Electronics Engineers 1993 XVII, 295 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Institute of Electrical and Electronics Engineers Sonstige (DE-588)1692-5 oth (DE-604)BV021849896 6 |
| spellingShingle | Micro electro mechanical systems proceedings ; an investigation of micro structures, sensors, actuators, machines and robots |
| title | Micro electro mechanical systems proceedings ; an investigation of micro structures, sensors, actuators, machines and robots |
| title_auth | Micro electro mechanical systems proceedings ; an investigation of micro structures, sensors, actuators, machines and robots |
| title_exact_search | Micro electro mechanical systems proceedings ; an investigation of micro structures, sensors, actuators, machines and robots |
| title_exact_search_txtP | Micro electro mechanical systems proceedings ; an investigation of micro structures, sensors, actuators, machines and robots |
| title_full | Micro electro mechanical systems proceedings ; an investigation of micro structures, sensors, actuators, machines and robots 6 Fort Lauderdale, Florida, February 7-10, 1993 |
| title_fullStr | Micro electro mechanical systems proceedings ; an investigation of micro structures, sensors, actuators, machines and robots 6 Fort Lauderdale, Florida, February 7-10, 1993 |
| title_full_unstemmed | Micro electro mechanical systems proceedings ; an investigation of micro structures, sensors, actuators, machines and robots 6 Fort Lauderdale, Florida, February 7-10, 1993 |
| title_short | Micro electro mechanical systems |
| title_sort | micro electro mechanical systems proceedings an investigation of micro structures sensors actuators machines and robots fort lauderdale florida february 7 10 1993 |
| title_sub | proceedings ; an investigation of micro structures, sensors, actuators, machines and robots |
| volume_link | (DE-604)BV021849896 |
| work_keys_str_mv | AT instituteofelectricalandelectronicsengineers microelectromechanicalsystemsproceedingsaninvestigationofmicrostructuressensorsactuatorsmachinesandrobots6 |