IEEE SEMI International Semiconductor Manufacturing Science Symposium: 4 June 15 - 16, 1992, San Francisco, CA, USA
Gespeichert in:
| Körperschaft: | |
|---|---|
| Format: | Tagungsbericht Buch |
| Sprache: | English |
| Veröffentlicht: |
Piscataway, NJ
IEEE Service Center
1992
|
| Schlagworte: | |
| Beschreibung: | IX, 146 S. Ill., graph. Darst. |
| ISBN: | 0780306805 0780306813 0780306821 |
Internformat
MARC
| LEADER | 00000nam a2200000zcc4500 | ||
|---|---|---|---|
| 001 | BV022037239 | ||
| 003 | DE-604 | ||
| 005 | 20060314000000.0 | ||
| 007 | t | ||
| 008 | 960614s1992 |||| 10||| eng d | ||
| 020 | |a 0780306805 |9 0-7803-0680-5 | ||
| 020 | |a 0780306813 |9 0-7803-0681-3 | ||
| 020 | |a 0780306821 |9 0-7803-0682-1 | ||
| 035 | |a (OCoLC)26572334 | ||
| 035 | |a (DE-599)BVBBV022037239 | ||
| 040 | |a DE-604 |b ger | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-706 | ||
| 050 | 0 | |a TK7836 | |
| 082 | 0 | |a 621.381/52 |2 20 | |
| 111 | 2 | |a International Semiconductor Manufacturing Science Symposium |j Verfasser |0 (DE-588)5017027-2 |4 aut | |
| 245 | 1 | 0 | |a IEEE SEMI International Semiconductor Manufacturing Science Symposium |n 4 |p June 15 - 16, 1992, San Francisco, CA, USA |
| 264 | 1 | |a Piscataway, NJ |b IEEE Service Center |c 1992 | |
| 300 | |a IX, 146 S. Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 650 | 4 | |a Computer integrated manufacturing systems |v Congresses | |
| 650 | 4 | |a Electronic industries |v Congresses | |
| 650 | 4 | |a Semiconductors |x Design and construction |v Congresses | |
| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |2 gnd-content | |
| 773 | 0 | 8 | |w (DE-604)BV021848901 |g 4 |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-015251914 | ||
Datensatz im Suchindex
| _version_ | 1804136012259000320 |
|---|---|
| adam_txt | |
| any_adam_object | |
| any_adam_object_boolean | |
| author_corporate | International Semiconductor Manufacturing Science Symposium |
| author_corporate_role | aut |
| author_facet | International Semiconductor Manufacturing Science Symposium |
| author_sort | International Semiconductor Manufacturing Science Symposium |
| building | Verbundindex |
| bvnumber | BV022037239 |
| callnumber-first | T - Technology |
| callnumber-label | TK7836 |
| callnumber-raw | TK7836 |
| callnumber-search | TK7836 |
| callnumber-sort | TK 47836 |
| callnumber-subject | TK - Electrical and Nuclear Engineering |
| ctrlnum | (OCoLC)26572334 (DE-599)BVBBV022037239 |
| dewey-full | 621.381/52 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.381/52 |
| dewey-search | 621.381/52 |
| dewey-sort | 3621.381 252 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| discipline_str_mv | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Conference Proceeding Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01273nam a2200361zcc4500</leader><controlfield tag="001">BV022037239</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20060314000000.0</controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">960614s1992 |||| 10||| eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">0780306805</subfield><subfield code="9">0-7803-0680-5</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">0780306813</subfield><subfield code="9">0-7803-0681-3</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">0780306821</subfield><subfield code="9">0-7803-0682-1</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)26572334</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV022037239</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-706</subfield></datafield><datafield tag="050" ind1=" " ind2="0"><subfield code="a">TK7836</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">621.381/52</subfield><subfield code="2">20</subfield></datafield><datafield tag="111" ind1="2" ind2=" "><subfield code="a">International Semiconductor Manufacturing Science Symposium</subfield><subfield code="j">Verfasser</subfield><subfield code="0">(DE-588)5017027-2</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">IEEE SEMI International Semiconductor Manufacturing Science Symposium</subfield><subfield code="n">4</subfield><subfield code="p">June 15 - 16, 1992, San Francisco, CA, USA</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Piscataway, NJ</subfield><subfield code="b">IEEE Service Center</subfield><subfield code="c">1992</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">IX, 146 S. Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Computer integrated manufacturing systems</subfield><subfield code="v">Congresses</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Electronic industries</subfield><subfield code="v">Congresses</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Semiconductors</subfield><subfield code="x">Design and construction</subfield><subfield code="v">Congresses</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)1071861417</subfield><subfield code="a">Konferenzschrift</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="773" ind1="0" ind2="8"><subfield code="w">(DE-604)BV021848901</subfield><subfield code="g">4</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-015251914</subfield></datafield></record></collection> |
| genre | (DE-588)1071861417 Konferenzschrift gnd-content |
| genre_facet | Konferenzschrift |
| id | DE-604.BV022037239 |
| illustrated | Not Illustrated |
| index_date | 2024-07-02T16:12:50Z |
| indexdate | 2024-07-09T20:49:38Z |
| institution | BVB |
| institution_GND | (DE-588)5017027-2 |
| isbn | 0780306805 0780306813 0780306821 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-015251914 |
| oclc_num | 26572334 |
| open_access_boolean | |
| owner | DE-706 |
| owner_facet | DE-706 |
| physical | IX, 146 S. Ill., graph. Darst. |
| publishDate | 1992 |
| publishDateSearch | 1992 |
| publishDateSort | 1992 |
| publisher | IEEE Service Center |
| record_format | marc |
| spelling | International Semiconductor Manufacturing Science Symposium Verfasser (DE-588)5017027-2 aut IEEE SEMI International Semiconductor Manufacturing Science Symposium 4 June 15 - 16, 1992, San Francisco, CA, USA Piscataway, NJ IEEE Service Center 1992 IX, 146 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Computer integrated manufacturing systems Congresses Electronic industries Congresses Semiconductors Design and construction Congresses (DE-588)1071861417 Konferenzschrift gnd-content (DE-604)BV021848901 4 |
| spellingShingle | IEEE SEMI International Semiconductor Manufacturing Science Symposium Computer integrated manufacturing systems Congresses Electronic industries Congresses Semiconductors Design and construction Congresses |
| subject_GND | (DE-588)1071861417 |
| title | IEEE SEMI International Semiconductor Manufacturing Science Symposium |
| title_auth | IEEE SEMI International Semiconductor Manufacturing Science Symposium |
| title_exact_search | IEEE SEMI International Semiconductor Manufacturing Science Symposium |
| title_exact_search_txtP | IEEE SEMI International Semiconductor Manufacturing Science Symposium |
| title_full | IEEE SEMI International Semiconductor Manufacturing Science Symposium 4 June 15 - 16, 1992, San Francisco, CA, USA |
| title_fullStr | IEEE SEMI International Semiconductor Manufacturing Science Symposium 4 June 15 - 16, 1992, San Francisco, CA, USA |
| title_full_unstemmed | IEEE SEMI International Semiconductor Manufacturing Science Symposium 4 June 15 - 16, 1992, San Francisco, CA, USA |
| title_short | IEEE SEMI International Semiconductor Manufacturing Science Symposium |
| title_sort | ieee semi international semiconductor manufacturing science symposium june 15 16 1992 san francisco ca usa |
| topic | Computer integrated manufacturing systems Congresses Electronic industries Congresses Semiconductors Design and construction Congresses |
| topic_facet | Computer integrated manufacturing systems Congresses Electronic industries Congresses Semiconductors Design and construction Congresses Konferenzschrift |
| volume_link | (DE-604)BV021848901 |
| work_keys_str_mv | AT internationalsemiconductormanufacturingsciencesymposium ieeesemiinternationalsemiconductormanufacturingsciencesymposium4 |