Ultra clean processing of silicon surfaces V: proceedings of the Fifth International Symposium on Ultra Clean Processing of Silicon Surfaces (UCPSS 2002) ; held in Ostend, Belgium, September 2002
Gespeichert in:
| Format: | Tagungsbericht Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Uetikon-Zürich
Scitec Publ.
2003
|
| Schriftenreihe: | Diffusion and defect data
B, Solid state phenomena ; 92 |
| Schlagworte: | |
| Beschreibung: | Literaturangaben. -Falsche Kongreßzählung auf dem Titelblatt |
| Beschreibung: | XIII, 311 S. Ill., graph. Darst. |
| ISBN: | 3908450780 |
Internformat
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Datensatz im Suchindex
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| genre_facet | Konferenzschrift |
| id | DE-604.BV022029402 |
| illustrated | Illustrated |
| index_date | 2024-07-02T16:12:32Z |
| indexdate | 2024-07-09T20:49:29Z |
| institution | BVB |
| institution_GND | (DE-588)6088689-4 |
| isbn | 3908450780 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-015244050 |
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| owner_facet | DE-706 |
| physical | XIII, 311 S. Ill., graph. Darst. |
| publishDate | 2003 |
| publishDateSearch | 2003 |
| publishDateSort | 2003 |
| publisher | Scitec Publ. |
| record_format | marc |
| series | Diffusion and defect data |
| series2 | Diffusion and defect data : B, Solid state phenomena |
| spelling | Ultra clean processing of silicon surfaces V proceedings of the Fifth International Symposium on Ultra Clean Processing of Silicon Surfaces (UCPSS 2002) ; held in Ostend, Belgium, September 2002 Uetikon-Zürich Scitec Publ. 2003 XIII, 311 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Diffusion and defect data : B, Solid state phenomena 92 Literaturangaben. -Falsche Kongreßzählung auf dem Titelblatt Oberflächenreinigung (DE-588)4204243-4 gnd rswk-swf Silicium (DE-588)4077445-4 gnd rswk-swf Reinraumtechnik (DE-588)4177592-2 gnd rswk-swf Halbleiter (DE-588)4022993-2 gnd rswk-swf (DE-588)1071861417 Konferenzschrift gnd-content Halbleiter (DE-588)4022993-2 s DE-604 Silicium (DE-588)4077445-4 s Reinraumtechnik (DE-588)4177592-2 s Oberflächenreinigung (DE-588)4204243-4 s Heyns, Marc Sonstige oth International Symposium on Ultra Clean Processing of Silicon Surfaces 6 2002 Ostende Sonstige (DE-588)6088689-4 oth Diffusion and defect data B, Solid state phenomena ; 92 (DE-604)BV021637351 92 |
| spellingShingle | Ultra clean processing of silicon surfaces V proceedings of the Fifth International Symposium on Ultra Clean Processing of Silicon Surfaces (UCPSS 2002) ; held in Ostend, Belgium, September 2002 Diffusion and defect data Oberflächenreinigung (DE-588)4204243-4 gnd Silicium (DE-588)4077445-4 gnd Reinraumtechnik (DE-588)4177592-2 gnd Halbleiter (DE-588)4022993-2 gnd |
| subject_GND | (DE-588)4204243-4 (DE-588)4077445-4 (DE-588)4177592-2 (DE-588)4022993-2 (DE-588)1071861417 |
| title | Ultra clean processing of silicon surfaces V proceedings of the Fifth International Symposium on Ultra Clean Processing of Silicon Surfaces (UCPSS 2002) ; held in Ostend, Belgium, September 2002 |
| title_auth | Ultra clean processing of silicon surfaces V proceedings of the Fifth International Symposium on Ultra Clean Processing of Silicon Surfaces (UCPSS 2002) ; held in Ostend, Belgium, September 2002 |
| title_exact_search | Ultra clean processing of silicon surfaces V proceedings of the Fifth International Symposium on Ultra Clean Processing of Silicon Surfaces (UCPSS 2002) ; held in Ostend, Belgium, September 2002 |
| title_exact_search_txtP | Ultra clean processing of silicon surfaces V proceedings of the Fifth International Symposium on Ultra Clean Processing of Silicon Surfaces (UCPSS 2002) ; held in Ostend, Belgium, September 2002 |
| title_full | Ultra clean processing of silicon surfaces V proceedings of the Fifth International Symposium on Ultra Clean Processing of Silicon Surfaces (UCPSS 2002) ; held in Ostend, Belgium, September 2002 |
| title_fullStr | Ultra clean processing of silicon surfaces V proceedings of the Fifth International Symposium on Ultra Clean Processing of Silicon Surfaces (UCPSS 2002) ; held in Ostend, Belgium, September 2002 |
| title_full_unstemmed | Ultra clean processing of silicon surfaces V proceedings of the Fifth International Symposium on Ultra Clean Processing of Silicon Surfaces (UCPSS 2002) ; held in Ostend, Belgium, September 2002 |
| title_short | Ultra clean processing of silicon surfaces V |
| title_sort | ultra clean processing of silicon surfaces v proceedings of the fifth international symposium on ultra clean processing of silicon surfaces ucpss 2002 held in ostend belgium september 2002 |
| title_sub | proceedings of the Fifth International Symposium on Ultra Clean Processing of Silicon Surfaces (UCPSS 2002) ; held in Ostend, Belgium, September 2002 |
| topic | Oberflächenreinigung (DE-588)4204243-4 gnd Silicium (DE-588)4077445-4 gnd Reinraumtechnik (DE-588)4177592-2 gnd Halbleiter (DE-588)4022993-2 gnd |
| topic_facet | Oberflächenreinigung Silicium Reinraumtechnik Halbleiter Konferenzschrift |
| volume_link | (DE-604)BV021637351 |
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