Proceedings of the 3. International Autumn Meeting Gettering and Defect Engineering in the Semiconductor Technology:
Gespeichert in:
| Körperschaft: | |
|---|---|
| Format: | Tagungsbericht Buch |
| Sprache: | Undetermined |
| Veröffentlicht: |
Brookfield, VT [u.a.]
Sci-Tech Publ.
1989
|
| Schriftenreihe: | Diffusion and defect data
Pt. B, Solid state phenomena ; 6/7 |
| Schlagworte: | |
| Beschreibung: | IX, 607 S. Ill., graph. Darst. |
| ISBN: | 3908044049 |
Internformat
MARC
| LEADER | 00000nam a2200000zcb4500 | ||
|---|---|---|---|
| 001 | BV022029363 | ||
| 003 | DE-604 | ||
| 005 | 20110722 | ||
| 007 | t | ||
| 008 | 910128s1989 ad|| |||| 00||| und d | ||
| 020 | |a 3908044049 |9 3-908044-04-9 | ||
| 035 | |a (OCoLC)635317528 | ||
| 035 | |a (DE-599)BVBBV022029363 | ||
| 040 | |a DE-604 |b ger | ||
| 041 | |a und | ||
| 049 | |a DE-706 | ||
| 084 | |a UP 3250 |0 (DE-625)146380: |2 rvk | ||
| 084 | |a PHY 696f |2 stub | ||
| 111 | 2 | |a GADEST |n 3 |d 1989 |c Garzau |j Verfasser |0 (DE-588)5043024-5 |4 aut | |
| 245 | 1 | 0 | |a Proceedings of the 3. International Autumn Meeting Gettering and Defect Engineering in the Semiconductor Technology |c GADEST '89. Ed. by M. Kittler |
| 246 | 1 | 3 | |a Gettering and defect engineering in the semiconductor technology |
| 264 | 1 | |a Brookfield, VT [u.a.] |b Sci-Tech Publ. |c 1989 | |
| 300 | |a IX, 607 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 1 | |a Diffusion and defect data : Pt. B, Solid state phenomena |v 6/7 | |
| 650 | 0 | 7 | |a Gitterbaufehler |0 (DE-588)4125030-8 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Halbleiter |0 (DE-588)4022993-2 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a VLSI |0 (DE-588)4117388-0 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Halbleiterphysik |0 (DE-588)4113829-6 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |y 1989 |z Garzau |2 gnd-content | |
| 689 | 0 | 0 | |a Halbleiter |0 (DE-588)4022993-2 |D s |
| 689 | 0 | 1 | |a Gitterbaufehler |0 (DE-588)4125030-8 |D s |
| 689 | 0 | |5 DE-604 | |
| 689 | 1 | 0 | |a Halbleiterphysik |0 (DE-588)4113829-6 |D s |
| 689 | 1 | 1 | |a VLSI |0 (DE-588)4117388-0 |D s |
| 689 | 1 | 2 | |a Gitterbaufehler |0 (DE-588)4125030-8 |D s |
| 689 | 1 | |5 DE-604 | |
| 700 | 1 | |a Kittler, Martin |e Sonstige |4 oth | |
| 830 | 0 | |a Diffusion and defect data |v Pt. B, Solid state phenomena ; 6/7 |w (DE-604)BV021637351 |9 6/7 | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-015244011 | ||
Datensatz im Suchindex
| _version_ | 1804136003471933440 |
|---|---|
| adam_txt | |
| any_adam_object | |
| any_adam_object_boolean | |
| author_corporate | GADEST Garzau |
| author_corporate_role | aut |
| author_facet | GADEST Garzau |
| author_sort | GADEST Garzau |
| building | Verbundindex |
| bvnumber | BV022029363 |
| classification_rvk | UP 3250 |
| classification_tum | PHY 696f |
| ctrlnum | (OCoLC)635317528 (DE-599)BVBBV022029363 |
| discipline | Physik |
| discipline_str_mv | Physik |
| format | Conference Proceeding Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01857nam a2200469zcb4500</leader><controlfield tag="001">BV022029363</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20110722 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">910128s1989 ad|| |||| 00||| und d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">3908044049</subfield><subfield code="9">3-908044-04-9</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)635317528</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV022029363</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield></datafield><datafield tag="041" ind1=" " ind2=" "><subfield code="a">und</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-706</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">UP 3250</subfield><subfield code="0">(DE-625)146380:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">PHY 696f</subfield><subfield code="2">stub</subfield></datafield><datafield tag="111" ind1="2" ind2=" "><subfield code="a">GADEST</subfield><subfield code="n">3</subfield><subfield code="d">1989</subfield><subfield code="c">Garzau</subfield><subfield code="j">Verfasser</subfield><subfield code="0">(DE-588)5043024-5</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Proceedings of the 3. International Autumn Meeting Gettering and Defect Engineering in the Semiconductor Technology</subfield><subfield code="c">GADEST '89. Ed. by M. Kittler</subfield></datafield><datafield tag="246" ind1="1" ind2="3"><subfield code="a">Gettering and defect engineering in the semiconductor technology</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Brookfield, VT [u.a.]</subfield><subfield code="b">Sci-Tech Publ.</subfield><subfield code="c">1989</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">IX, 607 S.</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="1" ind2=" "><subfield code="a">Diffusion and defect data : Pt. B, Solid state phenomena</subfield><subfield code="v">6/7</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Gitterbaufehler</subfield><subfield code="0">(DE-588)4125030-8</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Halbleiter</subfield><subfield code="0">(DE-588)4022993-2</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">VLSI</subfield><subfield code="0">(DE-588)4117388-0</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Halbleiterphysik</subfield><subfield code="0">(DE-588)4113829-6</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)1071861417</subfield><subfield code="a">Konferenzschrift</subfield><subfield code="y">1989</subfield><subfield code="z">Garzau</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Halbleiter</subfield><subfield code="0">(DE-588)4022993-2</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Gitterbaufehler</subfield><subfield code="0">(DE-588)4125030-8</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="1" ind2="0"><subfield code="a">Halbleiterphysik</subfield><subfield code="0">(DE-588)4113829-6</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="1" ind2="1"><subfield code="a">VLSI</subfield><subfield code="0">(DE-588)4117388-0</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="1" ind2="2"><subfield code="a">Gitterbaufehler</subfield><subfield code="0">(DE-588)4125030-8</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="1" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Kittler, Martin</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="830" ind1=" " ind2="0"><subfield code="a">Diffusion and defect data</subfield><subfield code="v">Pt. B, Solid state phenomena ; 6/7</subfield><subfield code="w">(DE-604)BV021637351</subfield><subfield code="9">6/7</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-015244011</subfield></datafield></record></collection> |
| genre | (DE-588)1071861417 Konferenzschrift 1989 Garzau gnd-content |
| genre_facet | Konferenzschrift 1989 Garzau |
| id | DE-604.BV022029363 |
| illustrated | Illustrated |
| index_date | 2024-07-02T16:12:32Z |
| indexdate | 2024-07-09T20:49:29Z |
| institution | BVB |
| institution_GND | (DE-588)5043024-5 |
| isbn | 3908044049 |
| language | Undetermined |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-015244011 |
| oclc_num | 635317528 |
| open_access_boolean | |
| owner | DE-706 |
| owner_facet | DE-706 |
| physical | IX, 607 S. Ill., graph. Darst. |
| publishDate | 1989 |
| publishDateSearch | 1989 |
| publishDateSort | 1989 |
| publisher | Sci-Tech Publ. |
| record_format | marc |
| series | Diffusion and defect data |
| series2 | Diffusion and defect data : Pt. B, Solid state phenomena |
| spelling | GADEST 3 1989 Garzau Verfasser (DE-588)5043024-5 aut Proceedings of the 3. International Autumn Meeting Gettering and Defect Engineering in the Semiconductor Technology GADEST '89. Ed. by M. Kittler Gettering and defect engineering in the semiconductor technology Brookfield, VT [u.a.] Sci-Tech Publ. 1989 IX, 607 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Diffusion and defect data : Pt. B, Solid state phenomena 6/7 Gitterbaufehler (DE-588)4125030-8 gnd rswk-swf Halbleiter (DE-588)4022993-2 gnd rswk-swf VLSI (DE-588)4117388-0 gnd rswk-swf Halbleiterphysik (DE-588)4113829-6 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1989 Garzau gnd-content Halbleiter (DE-588)4022993-2 s Gitterbaufehler (DE-588)4125030-8 s DE-604 Halbleiterphysik (DE-588)4113829-6 s VLSI (DE-588)4117388-0 s Kittler, Martin Sonstige oth Diffusion and defect data Pt. B, Solid state phenomena ; 6/7 (DE-604)BV021637351 6/7 |
| spellingShingle | Proceedings of the 3. International Autumn Meeting Gettering and Defect Engineering in the Semiconductor Technology Diffusion and defect data Gitterbaufehler (DE-588)4125030-8 gnd Halbleiter (DE-588)4022993-2 gnd VLSI (DE-588)4117388-0 gnd Halbleiterphysik (DE-588)4113829-6 gnd |
| subject_GND | (DE-588)4125030-8 (DE-588)4022993-2 (DE-588)4117388-0 (DE-588)4113829-6 (DE-588)1071861417 |
| title | Proceedings of the 3. International Autumn Meeting Gettering and Defect Engineering in the Semiconductor Technology |
| title_alt | Gettering and defect engineering in the semiconductor technology |
| title_auth | Proceedings of the 3. International Autumn Meeting Gettering and Defect Engineering in the Semiconductor Technology |
| title_exact_search | Proceedings of the 3. International Autumn Meeting Gettering and Defect Engineering in the Semiconductor Technology |
| title_exact_search_txtP | Proceedings of the 3. International Autumn Meeting Gettering and Defect Engineering in the Semiconductor Technology |
| title_full | Proceedings of the 3. International Autumn Meeting Gettering and Defect Engineering in the Semiconductor Technology GADEST '89. Ed. by M. Kittler |
| title_fullStr | Proceedings of the 3. International Autumn Meeting Gettering and Defect Engineering in the Semiconductor Technology GADEST '89. Ed. by M. Kittler |
| title_full_unstemmed | Proceedings of the 3. International Autumn Meeting Gettering and Defect Engineering in the Semiconductor Technology GADEST '89. Ed. by M. Kittler |
| title_short | Proceedings of the 3. International Autumn Meeting Gettering and Defect Engineering in the Semiconductor Technology |
| title_sort | proceedings of the 3 international autumn meeting gettering and defect engineering in the semiconductor technology |
| topic | Gitterbaufehler (DE-588)4125030-8 gnd Halbleiter (DE-588)4022993-2 gnd VLSI (DE-588)4117388-0 gnd Halbleiterphysik (DE-588)4113829-6 gnd |
| topic_facet | Gitterbaufehler Halbleiter VLSI Halbleiterphysik Konferenzschrift 1989 Garzau |
| volume_link | (DE-604)BV021637351 |
| work_keys_str_mv | AT gadestgarzau proceedingsofthe3internationalautumnmeetinggetteringanddefectengineeringinthesemiconductortechnology AT kittlermartin proceedingsofthe3internationalautumnmeetinggetteringanddefectengineeringinthesemiconductortechnology AT gadestgarzau getteringanddefectengineeringinthesemiconductortechnology AT kittlermartin getteringanddefectengineeringinthesemiconductortechnology |