Ion implantation equipment & techniques: proceedings of the fifth International Conference on Ion Implantation Equipment & techniques ; Jeffersonville VT, USA, July 23-27, 1984
Gespeichert in:
| Format: | Tagungsbericht Buch |
|---|---|
| Sprache: | Undetermined |
| Veröffentlicht: |
Amsterdam
North-Holland
1985
|
| Schlagworte: | |
| Beschreibung: | In: Nuclear instruments and methods in physics research / B. Vol. 6, 1985 |
| Beschreibung: | XIV, 451 S. Ill., graph. Darst. |
Internformat
MARC
| LEADER | 00000nam a2200000zc 4500 | ||
|---|---|---|---|
| 001 | BV021999738 | ||
| 003 | DE-604 | ||
| 005 | 20060630000000.0 | ||
| 007 | t | ||
| 008 | 861013s1985 ad|| |||| 00||| und d | ||
| 035 | |a (OCoLC)634876979 | ||
| 035 | |a (DE-599)BVBBV021999738 | ||
| 040 | |a DE-604 |b ger | ||
| 041 | |a und | ||
| 049 | |a DE-706 | ||
| 245 | 1 | 0 | |a Ion implantation equipment & techniques |b proceedings of the fifth International Conference on Ion Implantation Equipment & techniques ; Jeffersonville VT, USA, July 23-27, 1984 |
| 246 | 1 | 3 | |a Ion implantation equipment and techniques |
| 264 | 1 | |a Amsterdam |b North-Holland |c 1985 | |
| 300 | |a XIV, 451 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 500 | |a In: Nuclear instruments and methods in physics research / B. Vol. 6, 1985 | ||
| 650 | 0 | 7 | |a Ionenimplantation |0 (DE-588)4027606-5 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |2 gnd-content | |
| 689 | 0 | 0 | |a Ionenimplantation |0 (DE-588)4027606-5 |D s |
| 689 | 0 | |5 DE-604 | |
| 700 | 1 | |a Ziegler, James F. |e Sonstige |4 oth | |
| 711 | 2 | |a International Conference on Ion Implantation Equipment and Techniques |n 5 |d 1984 |c Jeffersonville, Vt. |j Sonstige |0 (DE-588)5246314-X |4 oth | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-015214301 | ||
Datensatz im Suchindex
| _version_ | 1804135974832177152 |
|---|---|
| adam_txt | |
| any_adam_object | |
| any_adam_object_boolean | |
| building | Verbundindex |
| bvnumber | BV021999738 |
| ctrlnum | (OCoLC)634876979 (DE-599)BVBBV021999738 |
| format | Conference Proceeding Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01301nam a2200325zc 4500</leader><controlfield tag="001">BV021999738</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20060630000000.0</controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">861013s1985 ad|| |||| 00||| und d</controlfield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)634876979</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV021999738</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield></datafield><datafield tag="041" ind1=" " ind2=" "><subfield code="a">und</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-706</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Ion implantation equipment & techniques</subfield><subfield code="b">proceedings of the fifth International Conference on Ion Implantation Equipment & techniques ; Jeffersonville VT, USA, July 23-27, 1984</subfield></datafield><datafield tag="246" ind1="1" ind2="3"><subfield code="a">Ion implantation equipment and techniques</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Amsterdam</subfield><subfield code="b">North-Holland</subfield><subfield code="c">1985</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">XIV, 451 S.</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">In: Nuclear instruments and methods in physics research / B. Vol. 6, 1985</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Ionenimplantation</subfield><subfield code="0">(DE-588)4027606-5</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)1071861417</subfield><subfield code="a">Konferenzschrift</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Ionenimplantation</subfield><subfield code="0">(DE-588)4027606-5</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Ziegler, James F.</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="711" ind1="2" ind2=" "><subfield code="a">International Conference on Ion Implantation Equipment and Techniques</subfield><subfield code="n">5</subfield><subfield code="d">1984</subfield><subfield code="c">Jeffersonville, Vt.</subfield><subfield code="j">Sonstige</subfield><subfield code="0">(DE-588)5246314-X</subfield><subfield code="4">oth</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-015214301</subfield></datafield></record></collection> |
| genre | (DE-588)1071861417 Konferenzschrift gnd-content |
| genre_facet | Konferenzschrift |
| id | DE-604.BV021999738 |
| illustrated | Illustrated |
| index_date | 2024-07-02T16:11:20Z |
| indexdate | 2024-07-09T20:49:02Z |
| institution | BVB |
| institution_GND | (DE-588)5246314-X |
| language | Undetermined |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-015214301 |
| oclc_num | 634876979 |
| open_access_boolean | |
| owner | DE-706 |
| owner_facet | DE-706 |
| physical | XIV, 451 S. Ill., graph. Darst. |
| publishDate | 1985 |
| publishDateSearch | 1985 |
| publishDateSort | 1985 |
| publisher | North-Holland |
| record_format | marc |
| spelling | Ion implantation equipment & techniques proceedings of the fifth International Conference on Ion Implantation Equipment & techniques ; Jeffersonville VT, USA, July 23-27, 1984 Ion implantation equipment and techniques Amsterdam North-Holland 1985 XIV, 451 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier In: Nuclear instruments and methods in physics research / B. Vol. 6, 1985 Ionenimplantation (DE-588)4027606-5 gnd rswk-swf (DE-588)1071861417 Konferenzschrift gnd-content Ionenimplantation (DE-588)4027606-5 s DE-604 Ziegler, James F. Sonstige oth International Conference on Ion Implantation Equipment and Techniques 5 1984 Jeffersonville, Vt. Sonstige (DE-588)5246314-X oth |
| spellingShingle | Ion implantation equipment & techniques proceedings of the fifth International Conference on Ion Implantation Equipment & techniques ; Jeffersonville VT, USA, July 23-27, 1984 Ionenimplantation (DE-588)4027606-5 gnd |
| subject_GND | (DE-588)4027606-5 (DE-588)1071861417 |
| title | Ion implantation equipment & techniques proceedings of the fifth International Conference on Ion Implantation Equipment & techniques ; Jeffersonville VT, USA, July 23-27, 1984 |
| title_alt | Ion implantation equipment and techniques |
| title_auth | Ion implantation equipment & techniques proceedings of the fifth International Conference on Ion Implantation Equipment & techniques ; Jeffersonville VT, USA, July 23-27, 1984 |
| title_exact_search | Ion implantation equipment & techniques proceedings of the fifth International Conference on Ion Implantation Equipment & techniques ; Jeffersonville VT, USA, July 23-27, 1984 |
| title_exact_search_txtP | Ion implantation equipment & techniques proceedings of the fifth International Conference on Ion Implantation Equipment & techniques ; Jeffersonville VT, USA, July 23-27, 1984 |
| title_full | Ion implantation equipment & techniques proceedings of the fifth International Conference on Ion Implantation Equipment & techniques ; Jeffersonville VT, USA, July 23-27, 1984 |
| title_fullStr | Ion implantation equipment & techniques proceedings of the fifth International Conference on Ion Implantation Equipment & techniques ; Jeffersonville VT, USA, July 23-27, 1984 |
| title_full_unstemmed | Ion implantation equipment & techniques proceedings of the fifth International Conference on Ion Implantation Equipment & techniques ; Jeffersonville VT, USA, July 23-27, 1984 |
| title_short | Ion implantation equipment & techniques |
| title_sort | ion implantation equipment techniques proceedings of the fifth international conference on ion implantation equipment techniques jeffersonville vt usa july 23 27 1984 |
| title_sub | proceedings of the fifth International Conference on Ion Implantation Equipment & techniques ; Jeffersonville VT, USA, July 23-27, 1984 |
| topic | Ionenimplantation (DE-588)4027606-5 gnd |
| topic_facet | Ionenimplantation Konferenzschrift |
| work_keys_str_mv | AT zieglerjamesf ionimplantationequipmenttechniquesproceedingsofthefifthinternationalconferenceonionimplantationequipmenttechniquesjeffersonvillevtusajuly23271984 AT internationalconferenceonionimplantationequipmentandtechniquesjeffersonvillevt ionimplantationequipmenttechniquesproceedingsofthefifthinternationalconferenceonionimplantationequipmenttechniquesjeffersonvillevtusajuly23271984 AT zieglerjamesf ionimplantationequipmentandtechniques AT internationalconferenceonionimplantationequipmentandtechniquesjeffersonvillevt ionimplantationequipmentandtechniques |