International Workshop on Fabrication, Characterization, and Modeling of Ultra Shallow Doping Profiles in Semiconductors Santa Cruz, Calif. (2004). Papers from the seventh International Workshop on Fabrication, Characterization, and Modeling of Ultra-Shallow Doping Profiles in Semiconductors: 26 April - 1 May 2003, Santa Cruz, California. American Vacuum Soc.
Chicago-Zitierstil (17. Ausg.)International Workshop on Fabrication, Characterization, and Modeling of Ultra Shallow Doping Profiles in Semiconductors Santa Cruz, Calif. Papers from the Seventh International Workshop on Fabrication, Characterization, and Modeling of Ultra-Shallow Doping Profiles in Semiconductors: 26 April - 1 May 2003, Santa Cruz, California. New York, NY: American Vacuum Soc, 2004.
MLA-Zitierstil (9. Ausg.)International Workshop on Fabrication, Characterization, and Modeling of Ultra Shallow Doping Profiles in Semiconductors Santa Cruz, Calif. Papers from the Seventh International Workshop on Fabrication, Characterization, and Modeling of Ultra-Shallow Doping Profiles in Semiconductors: 26 April - 1 May 2003, Santa Cruz, California. American Vacuum Soc, 2004.