Papers from the seventh International Workshop on Fabrication, Characterization, and Modeling of Ultra-Shallow Doping Profiles in Semiconductors: 26 April - 1 May 2003, Santa Cruz, California
Gespeichert in:
| Körperschaft: | |
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| Format: | Tagungsbericht Buch |
| Sprache: | English |
| Veröffentlicht: |
New York, NY
American Vacuum Soc.
2004
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| Schlagworte: | |
| Beschreibung: | Literaturangaben. - In: Journal of vacuum science & technology : Second series : B, Microelectronics and nanometer structure ; 22 (2004),1 |
| Beschreibung: | S. 288 - 478 Ill., graph. Darst. |
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| 111 | 2 | |a International Workshop on Fabrication, Characterization, and Modeling of Ultra Shallow Doping Profiles in Semiconductors |n 7 |d 2003 |c Santa Cruz, Calif. |j Verfasser |0 (DE-588)5568921-8 |4 aut | |
| 245 | 1 | 0 | |a Papers from the seventh International Workshop on Fabrication, Characterization, and Modeling of Ultra-Shallow Doping Profiles in Semiconductors |b 26 April - 1 May 2003, Santa Cruz, California |
| 264 | 1 | |a New York, NY |b American Vacuum Soc. |c 2004 | |
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Datensatz im Suchindex
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| author_sort | International Workshop on Fabrication, Characterization, and Modeling of Ultra Shallow Doping Profiles in Semiconductors Santa Cruz, Calif |
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| index_date | 2024-07-02T16:10:38Z |
| indexdate | 2024-07-09T20:48:54Z |
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| language | English |
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| physical | S. 288 - 478 Ill., graph. Darst. |
| publishDate | 2004 |
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| publisher | American Vacuum Soc. |
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| spelling | International Workshop on Fabrication, Characterization, and Modeling of Ultra Shallow Doping Profiles in Semiconductors 7 2003 Santa Cruz, Calif. Verfasser (DE-588)5568921-8 aut Papers from the seventh International Workshop on Fabrication, Characterization, and Modeling of Ultra-Shallow Doping Profiles in Semiconductors 26 April - 1 May 2003, Santa Cruz, California New York, NY American Vacuum Soc. 2004 S. 288 - 478 Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Literaturangaben. - In: Journal of vacuum science & technology : Second series : B, Microelectronics and nanometer structure ; 22 (2004),1 Dotierungsprofil (DE-588)4150495-1 gnd rswk-swf Halbleiter (DE-588)4022993-2 gnd rswk-swf (DE-588)1071861417 Konferenzschrift gnd-content Dotierungsprofil (DE-588)4150495-1 s Halbleiter (DE-588)4022993-2 s 1\p DE-604 Ronsheim, Paul Sonstige oth 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Papers from the seventh International Workshop on Fabrication, Characterization, and Modeling of Ultra-Shallow Doping Profiles in Semiconductors 26 April - 1 May 2003, Santa Cruz, California Dotierungsprofil (DE-588)4150495-1 gnd Halbleiter (DE-588)4022993-2 gnd |
| subject_GND | (DE-588)4150495-1 (DE-588)4022993-2 (DE-588)1071861417 |
| title | Papers from the seventh International Workshop on Fabrication, Characterization, and Modeling of Ultra-Shallow Doping Profiles in Semiconductors 26 April - 1 May 2003, Santa Cruz, California |
| title_auth | Papers from the seventh International Workshop on Fabrication, Characterization, and Modeling of Ultra-Shallow Doping Profiles in Semiconductors 26 April - 1 May 2003, Santa Cruz, California |
| title_exact_search | Papers from the seventh International Workshop on Fabrication, Characterization, and Modeling of Ultra-Shallow Doping Profiles in Semiconductors 26 April - 1 May 2003, Santa Cruz, California |
| title_exact_search_txtP | Papers from the seventh International Workshop on Fabrication, Characterization, and Modeling of Ultra-Shallow Doping Profiles in Semiconductors 26 April - 1 May 2003, Santa Cruz, California |
| title_full | Papers from the seventh International Workshop on Fabrication, Characterization, and Modeling of Ultra-Shallow Doping Profiles in Semiconductors 26 April - 1 May 2003, Santa Cruz, California |
| title_fullStr | Papers from the seventh International Workshop on Fabrication, Characterization, and Modeling of Ultra-Shallow Doping Profiles in Semiconductors 26 April - 1 May 2003, Santa Cruz, California |
| title_full_unstemmed | Papers from the seventh International Workshop on Fabrication, Characterization, and Modeling of Ultra-Shallow Doping Profiles in Semiconductors 26 April - 1 May 2003, Santa Cruz, California |
| title_short | Papers from the seventh International Workshop on Fabrication, Characterization, and Modeling of Ultra-Shallow Doping Profiles in Semiconductors |
| title_sort | papers from the seventh international workshop on fabrication characterization and modeling of ultra shallow doping profiles in semiconductors 26 april 1 may 2003 santa cruz california |
| title_sub | 26 April - 1 May 2003, Santa Cruz, California |
| topic | Dotierungsprofil (DE-588)4150495-1 gnd Halbleiter (DE-588)4022993-2 gnd |
| topic_facet | Dotierungsprofil Halbleiter Konferenzschrift |
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