Papers presented at CHiPPS - 2002: (challenges in predictive process simulation) ; 13 - 17 October 2002, Prague, Czech Republic
Gespeichert in:
| Körperschaft: | |
|---|---|
| Format: | Tagungsbericht Buch |
| Sprache: | English |
| Veröffentlicht: |
Oxford [u.a.]
Pergamon
2003
|
| Schlagworte: | |
| Beschreibung: | Literaturangaben. - In: Materials science in semiconductor processing ; 6 (2003),1/3 |
| Beschreibung: | VII, 164 S. Ill., graph. Darst. |
Internformat
MARC
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| 264 | 1 | |a Oxford [u.a.] |b Pergamon |c 2003 | |
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| 700 | 1 | |a Dabrowski, Jarek |e Sonstige |4 oth | |
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Datensatz im Suchindex
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| author_corporate | ChiPPS Prag |
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| author_sort | ChiPPS Prag |
| building | Verbundindex |
| bvnumber | BV021987160 |
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| index_date | 2024-07-02T16:10:19Z |
| indexdate | 2024-07-09T20:48:49Z |
| institution | BVB |
| institution_GND | (DE-588)5553259-7 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-015202074 |
| oclc_num | 249169262 |
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| owner | DE-706 |
| owner_facet | DE-706 |
| physical | VII, 164 S. Ill., graph. Darst. |
| publishDate | 2003 |
| publishDateSearch | 2003 |
| publishDateSort | 2003 |
| publisher | Pergamon |
| record_format | marc |
| spelling | ChiPPS 2 2002 Prag Verfasser (DE-588)5553259-7 aut Papers presented at CHiPPS - 2002 (challenges in predictive process simulation) ; 13 - 17 October 2002, Prague, Czech Republic Oxford [u.a.] Pergamon 2003 VII, 164 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Literaturangaben. - In: Materials science in semiconductor processing ; 6 (2003),1/3 Halbleitertechnologie (DE-588)4158814-9 gnd rswk-swf Prozesssimulation (DE-588)4176077-3 gnd rswk-swf (DE-588)1071861417 Konferenzschrift gnd-content Halbleitertechnologie (DE-588)4158814-9 s DE-604 Prozesssimulation (DE-588)4176077-3 s Dabrowski, Jarek Sonstige oth |
| spellingShingle | Papers presented at CHiPPS - 2002 (challenges in predictive process simulation) ; 13 - 17 October 2002, Prague, Czech Republic Halbleitertechnologie (DE-588)4158814-9 gnd Prozesssimulation (DE-588)4176077-3 gnd |
| subject_GND | (DE-588)4158814-9 (DE-588)4176077-3 (DE-588)1071861417 |
| title | Papers presented at CHiPPS - 2002 (challenges in predictive process simulation) ; 13 - 17 October 2002, Prague, Czech Republic |
| title_auth | Papers presented at CHiPPS - 2002 (challenges in predictive process simulation) ; 13 - 17 October 2002, Prague, Czech Republic |
| title_exact_search | Papers presented at CHiPPS - 2002 (challenges in predictive process simulation) ; 13 - 17 October 2002, Prague, Czech Republic |
| title_exact_search_txtP | Papers presented at CHiPPS - 2002 (challenges in predictive process simulation) ; 13 - 17 October 2002, Prague, Czech Republic |
| title_full | Papers presented at CHiPPS - 2002 (challenges in predictive process simulation) ; 13 - 17 October 2002, Prague, Czech Republic |
| title_fullStr | Papers presented at CHiPPS - 2002 (challenges in predictive process simulation) ; 13 - 17 October 2002, Prague, Czech Republic |
| title_full_unstemmed | Papers presented at CHiPPS - 2002 (challenges in predictive process simulation) ; 13 - 17 October 2002, Prague, Czech Republic |
| title_short | Papers presented at CHiPPS - 2002 |
| title_sort | papers presented at chipps 2002 challenges in predictive process simulation 13 17 october 2002 prague czech republic |
| title_sub | (challenges in predictive process simulation) ; 13 - 17 October 2002, Prague, Czech Republic |
| topic | Halbleitertechnologie (DE-588)4158814-9 gnd Prozesssimulation (DE-588)4176077-3 gnd |
| topic_facet | Halbleitertechnologie Prozesssimulation Konferenzschrift |
| work_keys_str_mv | AT chippsprag paperspresentedatchipps2002challengesinpredictiveprocesssimulation1317october2002pragueczechrepublic AT dabrowskijarek paperspresentedatchipps2002challengesinpredictiveprocesssimulation1317october2002pragueczechrepublic |