The International Symposium Ion Implantation and Other Application of Ions and Electrons: ION 2002 ; 10 - 13 June 2002, Kazimierz Dolny, Poland
Gespeichert in:
| Körperschaft: | |
|---|---|
| Format: | Tagungsbericht Buch |
| Sprache: | English |
| Veröffentlicht: |
Oxford [u.a.]
Pergamon
2003
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| Schlagworte: | |
| Beschreibung: | Literaturangaben. - In: Vacuum ; 70 (2003),2/3 : Special issue |
| Beschreibung: | S. 73 - 475 Ill., graph. Darst. |
Internformat
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Datensatz im Suchindex
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| author_corporate | International Symposium Ion Implantation and Other Application of Ions and Electrons Kazimierz Dolny |
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| author_facet | International Symposium Ion Implantation and Other Application of Ions and Electrons Kazimierz Dolny |
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| index_date | 2024-07-02T16:10:19Z |
| indexdate | 2024-07-09T20:48:49Z |
| institution | BVB |
| institution_GND | (DE-588)16147116-X |
| language | English |
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| physical | S. 73 - 475 Ill., graph. Darst. |
| publishDate | 2003 |
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| publisher | Pergamon |
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| spelling | International Symposium Ion Implantation and Other Application of Ions and Electrons 2002 Kazimierz Dolny Verfasser (DE-588)16147116-X aut The International Symposium Ion Implantation and Other Application of Ions and Electrons ION 2002 ; 10 - 13 June 2002, Kazimierz Dolny, Poland Oxford [u.a.] Pergamon 2003 S. 73 - 475 Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Literaturangaben. - In: Vacuum ; 70 (2003),2/3 : Special issue Halbleitertechnologie (DE-588)4158814-9 gnd rswk-swf Ionenstrahl (DE-588)4162347-2 gnd rswk-swf Ionenimplantation (DE-588)4027606-5 gnd rswk-swf Elektronenstrahl (DE-588)4151894-9 gnd rswk-swf (DE-588)1071861417 Konferenzschrift gnd-content Ionenimplantation (DE-588)4027606-5 s DE-604 Elektronenstrahl (DE-588)4151894-9 s Halbleitertechnologie (DE-588)4158814-9 s Ionenstrahl (DE-588)4162347-2 s Michalak, Leszek Sonstige oth |
| spellingShingle | The International Symposium Ion Implantation and Other Application of Ions and Electrons ION 2002 ; 10 - 13 June 2002, Kazimierz Dolny, Poland Halbleitertechnologie (DE-588)4158814-9 gnd Ionenstrahl (DE-588)4162347-2 gnd Ionenimplantation (DE-588)4027606-5 gnd Elektronenstrahl (DE-588)4151894-9 gnd |
| subject_GND | (DE-588)4158814-9 (DE-588)4162347-2 (DE-588)4027606-5 (DE-588)4151894-9 (DE-588)1071861417 |
| title | The International Symposium Ion Implantation and Other Application of Ions and Electrons ION 2002 ; 10 - 13 June 2002, Kazimierz Dolny, Poland |
| title_auth | The International Symposium Ion Implantation and Other Application of Ions and Electrons ION 2002 ; 10 - 13 June 2002, Kazimierz Dolny, Poland |
| title_exact_search | The International Symposium Ion Implantation and Other Application of Ions and Electrons ION 2002 ; 10 - 13 June 2002, Kazimierz Dolny, Poland |
| title_exact_search_txtP | The International Symposium Ion Implantation and Other Application of Ions and Electrons ION 2002 ; 10 - 13 June 2002, Kazimierz Dolny, Poland |
| title_full | The International Symposium Ion Implantation and Other Application of Ions and Electrons ION 2002 ; 10 - 13 June 2002, Kazimierz Dolny, Poland |
| title_fullStr | The International Symposium Ion Implantation and Other Application of Ions and Electrons ION 2002 ; 10 - 13 June 2002, Kazimierz Dolny, Poland |
| title_full_unstemmed | The International Symposium Ion Implantation and Other Application of Ions and Electrons ION 2002 ; 10 - 13 June 2002, Kazimierz Dolny, Poland |
| title_short | The International Symposium Ion Implantation and Other Application of Ions and Electrons |
| title_sort | the international symposium ion implantation and other application of ions and electrons ion 2002 10 13 june 2002 kazimierz dolny poland |
| title_sub | ION 2002 ; 10 - 13 June 2002, Kazimierz Dolny, Poland |
| topic | Halbleitertechnologie (DE-588)4158814-9 gnd Ionenstrahl (DE-588)4162347-2 gnd Ionenimplantation (DE-588)4027606-5 gnd Elektronenstrahl (DE-588)4151894-9 gnd |
| topic_facet | Halbleitertechnologie Ionenstrahl Ionenimplantation Elektronenstrahl Konferenzschrift |
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