(2003). Micromechanics: Special issue of the micromechanics section of sensors and actuators, based on contributions revised from the technical digest of the fifteenth IEEE International Workshop on Micro Electro Mechanical Systems (MEMS-2002) ; 20 - 24 January 2002, Las Vegas, NV, USA. Elsevier.
Chicago Style (17th ed.) CitationMicromechanics: Special Issue of the Micromechanics Section of Sensors and Actuators, Based on Contributions Revised from the Technical Digest of the Fifteenth IEEE International Workshop on Micro Electro Mechanical Systems (MEMS-2002) ; 20 - 24 January 2002, Las Vegas, NV, USA. Amsterdam [u.a.]: Elsevier, 2003.
MLA (9th ed.) CitationMicromechanics: Special Issue of the Micromechanics Section of Sensors and Actuators, Based on Contributions Revised from the Technical Digest of the Fifteenth IEEE International Workshop on Micro Electro Mechanical Systems (MEMS-2002) ; 20 - 24 January 2002, Las Vegas, NV, USA. Elsevier, 2003.