Selected papers revised from the proceedings of the Sixth International Symposium on Sputtering and Plasma Processes: 13 - 15 June 2001, Japan
Gespeichert in:
| Körperschaft: | |
|---|---|
| Format: | Tagungsbericht Buch |
| Sprache: | English |
| Veröffentlicht: |
Oxford
Pergamon
2002
|
| Schlagworte: | |
| Beschreibung: | Literaturangaben. - In: Vacuum ; 66 (2002),3/4 : Special issue |
| Beschreibung: | S. 189 - 529 Ill., graph. Darst. |
Internformat
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| index_date | 2024-07-02T16:09:04Z |
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| physical | S. 189 - 529 Ill., graph. Darst. |
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| spelling | International Symposium on Sputtering and Plasma Processes 6 2001 Kanazawa Verfasser (DE-588)10091760-4 aut Selected papers revised from the proceedings of the Sixth International Symposium on Sputtering and Plasma Processes 13 - 15 June 2001, Japan Oxford Pergamon 2002 S. 189 - 529 Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Literaturangaben. - In: Vacuum ; 66 (2002),3/4 : Special issue Dünnschichttechnik (DE-588)4136339-5 gnd rswk-swf Plasmatechnik (DE-588)4140353-8 gnd rswk-swf (DE-588)1071861417 Konferenzschrift gnd-content Dünnschichttechnik (DE-588)4136339-5 s DE-604 Plasmatechnik (DE-588)4140353-8 s Kinbara, Akira Sonstige oth |
| spellingShingle | Selected papers revised from the proceedings of the Sixth International Symposium on Sputtering and Plasma Processes 13 - 15 June 2001, Japan Dünnschichttechnik (DE-588)4136339-5 gnd Plasmatechnik (DE-588)4140353-8 gnd |
| subject_GND | (DE-588)4136339-5 (DE-588)4140353-8 (DE-588)1071861417 |
| title | Selected papers revised from the proceedings of the Sixth International Symposium on Sputtering and Plasma Processes 13 - 15 June 2001, Japan |
| title_auth | Selected papers revised from the proceedings of the Sixth International Symposium on Sputtering and Plasma Processes 13 - 15 June 2001, Japan |
| title_exact_search | Selected papers revised from the proceedings of the Sixth International Symposium on Sputtering and Plasma Processes 13 - 15 June 2001, Japan |
| title_exact_search_txtP | Selected papers revised from the proceedings of the Sixth International Symposium on Sputtering and Plasma Processes 13 - 15 June 2001, Japan |
| title_full | Selected papers revised from the proceedings of the Sixth International Symposium on Sputtering and Plasma Processes 13 - 15 June 2001, Japan |
| title_fullStr | Selected papers revised from the proceedings of the Sixth International Symposium on Sputtering and Plasma Processes 13 - 15 June 2001, Japan |
| title_full_unstemmed | Selected papers revised from the proceedings of the Sixth International Symposium on Sputtering and Plasma Processes 13 - 15 June 2001, Japan |
| title_short | Selected papers revised from the proceedings of the Sixth International Symposium on Sputtering and Plasma Processes |
| title_sort | selected papers revised from the proceedings of the sixth international symposium on sputtering and plasma processes 13 15 june 2001 japan |
| title_sub | 13 - 15 June 2001, Japan |
| topic | Dünnschichttechnik (DE-588)4136339-5 gnd Plasmatechnik (DE-588)4140353-8 gnd |
| topic_facet | Dünnschichttechnik Plasmatechnik Konferenzschrift |
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