Contamination-free manufacturing for semiconductors and other precision products:
Gespeichert in:
Format: | Buch |
---|---|
Sprache: | English |
Veröffentlicht: |
New York [u.a.]
Dekker
2001
|
Schlagworte: | |
Beschreibung: | Literaturangaben |
Beschreibung: | X, 448 S. graph. Darst. |
ISBN: | 0824703804 |
Internformat
MARC
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245 | 1 | 0 | |a Contamination-free manufacturing for semiconductors and other precision products |c ed. by Robert P. Donovan |
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300 | |a X, 448 S. |b graph. Darst. | ||
336 | |b txt |2 rdacontent | ||
337 | |b n |2 rdamedia | ||
338 | |b nc |2 rdacarrier | ||
500 | |a Literaturangaben | ||
650 | 4 | |a Semiconductors |x Defects | |
650 | 4 | |a Semiconductors |x Design and construction | |
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Datensatz im Suchindex
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adam_txt | |
any_adam_object | |
any_adam_object_boolean | |
building | Verbundindex |
bvnumber | BV021967421 |
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callnumber-label | TK7871 |
callnumber-raw | TK7871.85 |
callnumber-search | TK7871.85 |
callnumber-sort | TK 47871.85 |
callnumber-subject | TK - Electrical and Nuclear Engineering |
classification_rvk | ZN 4100 |
ctrlnum | (OCoLC)46456397 (DE-599)BVBBV021967421 |
dewey-full | 621.3815/2 |
dewey-hundreds | 600 - Technology (Applied sciences) |
dewey-ones | 621 - Applied physics |
dewey-raw | 621.3815/2 |
dewey-search | 621.3815/2 |
dewey-sort | 3621.3815 12 |
dewey-tens | 620 - Engineering and allied operations |
discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
discipline_str_mv | Elektrotechnik / Elektronik / Nachrichtentechnik |
format | Book |
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genre_facet | Aufsatzsammlung |
id | DE-604.BV021967421 |
illustrated | Illustrated |
index_date | 2024-07-02T16:09:01Z |
indexdate | 2024-07-09T20:48:26Z |
institution | BVB |
isbn | 0824703804 |
language | English |
oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-015182571 |
oclc_num | 46456397 |
open_access_boolean | |
owner | DE-706 |
owner_facet | DE-706 |
physical | X, 448 S. graph. Darst. |
publishDate | 2001 |
publishDateSearch | 2001 |
publishDateSort | 2001 |
publisher | Dekker |
record_format | marc |
spelling | Contamination-free manufacturing for semiconductors and other precision products ed. by Robert P. Donovan New York [u.a.] Dekker 2001 X, 448 S. graph. Darst. txt rdacontent n rdamedia nc rdacarrier Literaturangaben Semiconductors Defects Semiconductors Design and construction Fertigung (DE-588)4016899-2 gnd rswk-swf Halbleitertechnologie (DE-588)4158814-9 gnd rswk-swf (DE-588)4143413-4 Aufsatzsammlung gnd-content Fertigung (DE-588)4016899-2 s DE-604 Halbleitertechnologie (DE-588)4158814-9 s Donovan, Robert P. Sonstige oth |
spellingShingle | Contamination-free manufacturing for semiconductors and other precision products Semiconductors Defects Semiconductors Design and construction Fertigung (DE-588)4016899-2 gnd Halbleitertechnologie (DE-588)4158814-9 gnd |
subject_GND | (DE-588)4016899-2 (DE-588)4158814-9 (DE-588)4143413-4 |
title | Contamination-free manufacturing for semiconductors and other precision products |
title_auth | Contamination-free manufacturing for semiconductors and other precision products |
title_exact_search | Contamination-free manufacturing for semiconductors and other precision products |
title_exact_search_txtP | Contamination-free manufacturing for semiconductors and other precision products |
title_full | Contamination-free manufacturing for semiconductors and other precision products ed. by Robert P. Donovan |
title_fullStr | Contamination-free manufacturing for semiconductors and other precision products ed. by Robert P. Donovan |
title_full_unstemmed | Contamination-free manufacturing for semiconductors and other precision products ed. by Robert P. Donovan |
title_short | Contamination-free manufacturing for semiconductors and other precision products |
title_sort | contamination free manufacturing for semiconductors and other precision products |
topic | Semiconductors Defects Semiconductors Design and construction Fertigung (DE-588)4016899-2 gnd Halbleitertechnologie (DE-588)4158814-9 gnd |
topic_facet | Semiconductors Defects Semiconductors Design and construction Fertigung Halbleitertechnologie Aufsatzsammlung |
work_keys_str_mv | AT donovanrobertp contaminationfreemanufacturingforsemiconductorsandotherprecisionproducts |