Special section on the 2000 International Symposium on Semiconductor Manufacturing:
Gespeichert in:
| Körperschaft: | |
|---|---|
| Format: | Tagungsbericht Buch |
| Sprache: | English |
| Veröffentlicht: |
New York, NY
Inst. of Electrical and Electronics Engineers
2001
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| Schlagworte: | |
| Beschreibung: | Literaturangaben. - In: IEEE transactions on semiconductor manufacturing ; 14 (2001),3 |
| Beschreibung: | S. 180 - 206 Ill., graph. Darst. |
Internformat
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Datensatz im Suchindex
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| spelling | International Symposium on Semiconductor Manufacturing 2000 Tokyo Verfasser (DE-588)16146684-9 aut Special section on the 2000 International Symposium on Semiconductor Manufacturing New York, NY Inst. of Electrical and Electronics Engineers 2001 S. 180 - 206 Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Literaturangaben. - In: IEEE transactions on semiconductor manufacturing ; 14 (2001),3 Halbleitertechnologie (DE-588)4158814-9 gnd rswk-swf (DE-588)1071861417 Konferenzschrift gnd-content Halbleitertechnologie (DE-588)4158814-9 s DE-604 |
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| title | Special section on the 2000 International Symposium on Semiconductor Manufacturing |
| title_auth | Special section on the 2000 International Symposium on Semiconductor Manufacturing |
| title_exact_search | Special section on the 2000 International Symposium on Semiconductor Manufacturing |
| title_exact_search_txtP | Special section on the 2000 International Symposium on Semiconductor Manufacturing |
| title_full | Special section on the 2000 International Symposium on Semiconductor Manufacturing |
| title_fullStr | Special section on the 2000 International Symposium on Semiconductor Manufacturing |
| title_full_unstemmed | Special section on the 2000 International Symposium on Semiconductor Manufacturing |
| title_short | Special section on the 2000 International Symposium on Semiconductor Manufacturing |
| title_sort | special section on the 2000 international symposium on semiconductor manufacturing |
| topic | Halbleitertechnologie (DE-588)4158814-9 gnd |
| topic_facet | Halbleitertechnologie Konferenzschrift |
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