Defect Engineering of Advanced Semiconductor Devices: proceedings of the E-MRS 2001 spring meeting Symposium B on Defect Engineering of Advanced Semiconductor Devices ; Strasbourg, France, 4 - 8 June 2001
Gespeichert in:
Format: | Tagungsbericht Buch |
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Sprache: | English |
Veröffentlicht: |
Amsterdam [u.a.]
North-Holland
2002
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Schlagworte: | |
Beschreibung: | Literaturangaben. - In: Nuclear instruments & methods in physics research / B ; 186 (2002) |
Beschreibung: | XII, 454 S. Ill., graph. Darst. |
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physical | XII, 454 S. Ill., graph. Darst. |
publishDate | 2002 |
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spelling | Defect Engineering of Advanced Semiconductor Devices proceedings of the E-MRS 2001 spring meeting Symposium B on Defect Engineering of Advanced Semiconductor Devices ; Strasbourg, France, 4 - 8 June 2001 Amsterdam [u.a.] North-Holland 2002 XII, 454 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Literaturangaben. - In: Nuclear instruments & methods in physics research / B ; 186 (2002) Halbleiterschaltung (DE-588)4158811-3 gnd rswk-swf Halbleitertechnologie (DE-588)4158814-9 gnd rswk-swf Gitterbaufehler (DE-588)4125030-8 gnd rswk-swf (DE-588)1071861417 Konferenzschrift gnd-content Gitterbaufehler (DE-588)4125030-8 s DE-604 Halbleiterschaltung (DE-588)4158811-3 s Halbleitertechnologie (DE-588)4158814-9 s Privitera, Vittorio Sonstige oth European Materials Research Society Sonstige (DE-588)5000064-0 oth Symposium on Defect Engineering of Advanced Semiconductor Devices 2001 Straßburg Sonstige (DE-588)3051292-X oth |
spellingShingle | Defect Engineering of Advanced Semiconductor Devices proceedings of the E-MRS 2001 spring meeting Symposium B on Defect Engineering of Advanced Semiconductor Devices ; Strasbourg, France, 4 - 8 June 2001 Halbleiterschaltung (DE-588)4158811-3 gnd Halbleitertechnologie (DE-588)4158814-9 gnd Gitterbaufehler (DE-588)4125030-8 gnd |
subject_GND | (DE-588)4158811-3 (DE-588)4158814-9 (DE-588)4125030-8 (DE-588)1071861417 |
title | Defect Engineering of Advanced Semiconductor Devices proceedings of the E-MRS 2001 spring meeting Symposium B on Defect Engineering of Advanced Semiconductor Devices ; Strasbourg, France, 4 - 8 June 2001 |
title_auth | Defect Engineering of Advanced Semiconductor Devices proceedings of the E-MRS 2001 spring meeting Symposium B on Defect Engineering of Advanced Semiconductor Devices ; Strasbourg, France, 4 - 8 June 2001 |
title_exact_search | Defect Engineering of Advanced Semiconductor Devices proceedings of the E-MRS 2001 spring meeting Symposium B on Defect Engineering of Advanced Semiconductor Devices ; Strasbourg, France, 4 - 8 June 2001 |
title_exact_search_txtP | Defect Engineering of Advanced Semiconductor Devices proceedings of the E-MRS 2001 spring meeting Symposium B on Defect Engineering of Advanced Semiconductor Devices ; Strasbourg, France, 4 - 8 June 2001 |
title_full | Defect Engineering of Advanced Semiconductor Devices proceedings of the E-MRS 2001 spring meeting Symposium B on Defect Engineering of Advanced Semiconductor Devices ; Strasbourg, France, 4 - 8 June 2001 |
title_fullStr | Defect Engineering of Advanced Semiconductor Devices proceedings of the E-MRS 2001 spring meeting Symposium B on Defect Engineering of Advanced Semiconductor Devices ; Strasbourg, France, 4 - 8 June 2001 |
title_full_unstemmed | Defect Engineering of Advanced Semiconductor Devices proceedings of the E-MRS 2001 spring meeting Symposium B on Defect Engineering of Advanced Semiconductor Devices ; Strasbourg, France, 4 - 8 June 2001 |
title_short | Defect Engineering of Advanced Semiconductor Devices |
title_sort | defect engineering of advanced semiconductor devices proceedings of the e mrs 2001 spring meeting symposium b on defect engineering of advanced semiconductor devices strasbourg france 4 8 june 2001 |
title_sub | proceedings of the E-MRS 2001 spring meeting Symposium B on Defect Engineering of Advanced Semiconductor Devices ; Strasbourg, France, 4 - 8 June 2001 |
topic | Halbleiterschaltung (DE-588)4158811-3 gnd Halbleitertechnologie (DE-588)4158814-9 gnd Gitterbaufehler (DE-588)4125030-8 gnd |
topic_facet | Halbleiterschaltung Halbleitertechnologie Gitterbaufehler Konferenzschrift |
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