Papers from the 13th International Vacuum Microelectronics Conference:
Saved in:
| Corporate Author: | |
|---|---|
| Format: | Conference Proceeding Book |
| Language: | English |
| Published: |
New York, NY
American Vacuum Soc.
2001
|
| Subjects: | |
| Item Description: | Literaturangaben. - In: Journal of vacuum science & technology : Second series : B, Microelectronics and nanometer structures ; 19 (2001),3 |
| Physical Description: | S. 604 - 1090 Ill., graph. Darst. |
Staff View
MARC
| LEADER | 00000nam a2200000zc 4500 | ||
|---|---|---|---|
| 001 | BV021965324 | ||
| 003 | DE-604 | ||
| 005 | 20040302000000.0 | ||
| 007 | t | ||
| 008 | 020522s2001 ad|| |||| 10||| eng d | ||
| 035 | |a (OCoLC)59482493 | ||
| 035 | |a (DE-599)BVBBV021965324 | ||
| 040 | |a DE-604 |b ger | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-706 | ||
| 111 | 2 | |a International Vacuum Microelectronics Conference |n 13 |d 2000 |c Kanton, Stadt |j Verfasser |0 (DE-588)5528663-X |4 aut | |
| 245 | 1 | 0 | |a Papers from the 13th International Vacuum Microelectronics Conference |
| 264 | 1 | |a New York, NY |b American Vacuum Soc. |c 2001 | |
| 300 | |a S. 604 - 1090 |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 500 | |a Literaturangaben. - In: Journal of vacuum science & technology : Second series : B, Microelectronics and nanometer structures ; 19 (2001),3 | ||
| 650 | 0 | 7 | |a Vakuum |0 (DE-588)4062266-6 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Mikroelektronik |0 (DE-588)4039207-7 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |2 gnd-content | |
| 689 | 0 | 0 | |a Mikroelektronik |0 (DE-588)4039207-7 |D s |
| 689 | 0 | |5 DE-604 | |
| 689 | 1 | 0 | |a Vakuum |0 (DE-588)4062266-6 |D s |
| 689 | 1 | |5 DE-604 | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-015180474 | ||
Record in the Search Index
| _version_ | 1804135934530158592 |
|---|---|
| adam_txt | |
| any_adam_object | |
| any_adam_object_boolean | |
| author_corporate | International Vacuum Microelectronics Conference Kanton, Stadt |
| author_corporate_role | aut |
| author_facet | International Vacuum Microelectronics Conference Kanton, Stadt |
| author_sort | International Vacuum Microelectronics Conference Kanton, Stadt |
| building | Verbundindex |
| bvnumber | BV021965324 |
| ctrlnum | (OCoLC)59482493 (DE-599)BVBBV021965324 |
| format | Conference Proceeding Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01260nam a2200337zc 4500</leader><controlfield tag="001">BV021965324</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20040302000000.0</controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">020522s2001 ad|| |||| 10||| eng d</controlfield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)59482493</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV021965324</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-706</subfield></datafield><datafield tag="111" ind1="2" ind2=" "><subfield code="a">International Vacuum Microelectronics Conference</subfield><subfield code="n">13</subfield><subfield code="d">2000</subfield><subfield code="c">Kanton, Stadt</subfield><subfield code="j">Verfasser</subfield><subfield code="0">(DE-588)5528663-X</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Papers from the 13th International Vacuum Microelectronics Conference</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">New York, NY</subfield><subfield code="b">American Vacuum Soc.</subfield><subfield code="c">2001</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">S. 604 - 1090</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Literaturangaben. - In: Journal of vacuum science & technology : Second series : B, Microelectronics and nanometer structures ; 19 (2001),3</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Vakuum</subfield><subfield code="0">(DE-588)4062266-6</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Mikroelektronik</subfield><subfield code="0">(DE-588)4039207-7</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)1071861417</subfield><subfield code="a">Konferenzschrift</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Mikroelektronik</subfield><subfield code="0">(DE-588)4039207-7</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="1" ind2="0"><subfield code="a">Vakuum</subfield><subfield code="0">(DE-588)4062266-6</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="1" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-015180474</subfield></datafield></record></collection> |
| genre | (DE-588)1071861417 Konferenzschrift gnd-content |
| genre_facet | Konferenzschrift |
| id | DE-604.BV021965324 |
| illustrated | Illustrated |
| index_date | 2024-07-02T16:08:51Z |
| indexdate | 2024-07-09T20:48:24Z |
| institution | BVB |
| institution_GND | (DE-588)5528663-X |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-015180474 |
| oclc_num | 59482493 |
| open_access_boolean | |
| owner | DE-706 |
| owner_facet | DE-706 |
| physical | S. 604 - 1090 Ill., graph. Darst. |
| publishDate | 2001 |
| publishDateSearch | 2001 |
| publishDateSort | 2001 |
| publisher | American Vacuum Soc. |
| record_format | marc |
| spelling | International Vacuum Microelectronics Conference 13 2000 Kanton, Stadt Verfasser (DE-588)5528663-X aut Papers from the 13th International Vacuum Microelectronics Conference New York, NY American Vacuum Soc. 2001 S. 604 - 1090 Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Literaturangaben. - In: Journal of vacuum science & technology : Second series : B, Microelectronics and nanometer structures ; 19 (2001),3 Vakuum (DE-588)4062266-6 gnd rswk-swf Mikroelektronik (DE-588)4039207-7 gnd rswk-swf (DE-588)1071861417 Konferenzschrift gnd-content Mikroelektronik (DE-588)4039207-7 s DE-604 Vakuum (DE-588)4062266-6 s |
| spellingShingle | Papers from the 13th International Vacuum Microelectronics Conference Vakuum (DE-588)4062266-6 gnd Mikroelektronik (DE-588)4039207-7 gnd |
| subject_GND | (DE-588)4062266-6 (DE-588)4039207-7 (DE-588)1071861417 |
| title | Papers from the 13th International Vacuum Microelectronics Conference |
| title_auth | Papers from the 13th International Vacuum Microelectronics Conference |
| title_exact_search | Papers from the 13th International Vacuum Microelectronics Conference |
| title_exact_search_txtP | Papers from the 13th International Vacuum Microelectronics Conference |
| title_full | Papers from the 13th International Vacuum Microelectronics Conference |
| title_fullStr | Papers from the 13th International Vacuum Microelectronics Conference |
| title_full_unstemmed | Papers from the 13th International Vacuum Microelectronics Conference |
| title_short | Papers from the 13th International Vacuum Microelectronics Conference |
| title_sort | papers from the 13th international vacuum microelectronics conference |
| topic | Vakuum (DE-588)4062266-6 gnd Mikroelektronik (DE-588)4039207-7 gnd |
| topic_facet | Vakuum Mikroelektronik Konferenzschrift |
| work_keys_str_mv | AT internationalvacuummicroelectronicsconferencekantonstadt papersfromthe13thinternationalvacuummicroelectronicsconference |