Papers from the 13th International Vacuum Microelectronics Conference:
Gespeichert in:
| Körperschaft: | |
|---|---|
| Format: | Tagungsbericht Buch |
| Sprache: | English |
| Veröffentlicht: |
New York, NY
American Vacuum Soc.
2001
|
| Schlagworte: | |
| Beschreibung: | Literaturangaben. - In: Journal of vacuum science & technology : Second series : B, Microelectronics and nanometer structures ; 19 (2001),3 |
| Beschreibung: | S. 604 - 1090 Ill., graph. Darst. |
Internformat
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Datensatz im Suchindex
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| author_sort | International Vacuum Microelectronics Conference Kanton, Stadt |
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| indexdate | 2024-07-09T20:48:24Z |
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| physical | S. 604 - 1090 Ill., graph. Darst. |
| publishDate | 2001 |
| publishDateSearch | 2001 |
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| publisher | American Vacuum Soc. |
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| spelling | International Vacuum Microelectronics Conference 13 2000 Kanton, Stadt Verfasser (DE-588)5528663-X aut Papers from the 13th International Vacuum Microelectronics Conference New York, NY American Vacuum Soc. 2001 S. 604 - 1090 Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Literaturangaben. - In: Journal of vacuum science & technology : Second series : B, Microelectronics and nanometer structures ; 19 (2001),3 Vakuum (DE-588)4062266-6 gnd rswk-swf Mikroelektronik (DE-588)4039207-7 gnd rswk-swf (DE-588)1071861417 Konferenzschrift gnd-content Mikroelektronik (DE-588)4039207-7 s DE-604 Vakuum (DE-588)4062266-6 s |
| spellingShingle | Papers from the 13th International Vacuum Microelectronics Conference Vakuum (DE-588)4062266-6 gnd Mikroelektronik (DE-588)4039207-7 gnd |
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| title | Papers from the 13th International Vacuum Microelectronics Conference |
| title_auth | Papers from the 13th International Vacuum Microelectronics Conference |
| title_exact_search | Papers from the 13th International Vacuum Microelectronics Conference |
| title_exact_search_txtP | Papers from the 13th International Vacuum Microelectronics Conference |
| title_full | Papers from the 13th International Vacuum Microelectronics Conference |
| title_fullStr | Papers from the 13th International Vacuum Microelectronics Conference |
| title_full_unstemmed | Papers from the 13th International Vacuum Microelectronics Conference |
| title_short | Papers from the 13th International Vacuum Microelectronics Conference |
| title_sort | papers from the 13th international vacuum microelectronics conference |
| topic | Vakuum (DE-588)4062266-6 gnd Mikroelektronik (DE-588)4039207-7 gnd |
| topic_facet | Vakuum Mikroelektronik Konferenzschrift |
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