Special section on statistical metrology: [ ... papers presented at the IWSM '99 in Kyoto, Japan ]
Gespeichert in:
| Format: | Tagungsbericht Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
New York, NY
Inst. of Electrical and Electronics Engineers
2000
|
| Schlagworte: | |
| Beschreibung: | Literaturangaben. - In: IEEE transactions on semiconductor manufacturing ; 13 (2000),4 |
| Beschreibung: | S. 393 - 496 Ill., graph. Darst. |
Internformat
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| 700 | 1 | |a Masuda, Hiroo |e Sonstige |4 oth | |
| 711 | 2 | |a International Workshop on Statistical Metrology |n 4 |d 1999 |c Kyōto |j Sonstige |0 (DE-588)10016106-6 |4 oth | |
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| index_date | 2024-07-02T16:08:35Z |
| indexdate | 2024-07-09T20:48:21Z |
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| physical | S. 393 - 496 Ill., graph. Darst. |
| publishDate | 2000 |
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| publisher | Inst. of Electrical and Electronics Engineers |
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| spelling | Special section on statistical metrology [ ... papers presented at the IWSM '99 in Kyoto, Japan ] New York, NY Inst. of Electrical and Electronics Engineers 2000 S. 393 - 496 Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Literaturangaben. - In: IEEE transactions on semiconductor manufacturing ; 13 (2000),4 Messtechnik (DE-588)4114575-6 gnd rswk-swf Statistik (DE-588)4056995-0 gnd rswk-swf Halbleitertechnologie (DE-588)4158814-9 gnd rswk-swf VLSI (DE-588)4117388-0 gnd rswk-swf (DE-588)1071861417 Konferenzschrift gnd-content Statistik (DE-588)4056995-0 s DE-604 Messtechnik (DE-588)4114575-6 s VLSI (DE-588)4117388-0 s Halbleitertechnologie (DE-588)4158814-9 s Masuda, Hiroo Sonstige oth International Workshop on Statistical Metrology 4 1999 Kyōto Sonstige (DE-588)10016106-6 oth |
| spellingShingle | Special section on statistical metrology [ ... papers presented at the IWSM '99 in Kyoto, Japan ] Messtechnik (DE-588)4114575-6 gnd Statistik (DE-588)4056995-0 gnd Halbleitertechnologie (DE-588)4158814-9 gnd VLSI (DE-588)4117388-0 gnd |
| subject_GND | (DE-588)4114575-6 (DE-588)4056995-0 (DE-588)4158814-9 (DE-588)4117388-0 (DE-588)1071861417 |
| title | Special section on statistical metrology [ ... papers presented at the IWSM '99 in Kyoto, Japan ] |
| title_auth | Special section on statistical metrology [ ... papers presented at the IWSM '99 in Kyoto, Japan ] |
| title_exact_search | Special section on statistical metrology [ ... papers presented at the IWSM '99 in Kyoto, Japan ] |
| title_exact_search_txtP | Special section on statistical metrology [ ... papers presented at the IWSM '99 in Kyoto, Japan ] |
| title_full | Special section on statistical metrology [ ... papers presented at the IWSM '99 in Kyoto, Japan ] |
| title_fullStr | Special section on statistical metrology [ ... papers presented at the IWSM '99 in Kyoto, Japan ] |
| title_full_unstemmed | Special section on statistical metrology [ ... papers presented at the IWSM '99 in Kyoto, Japan ] |
| title_short | Special section on statistical metrology |
| title_sort | special section on statistical metrology papers presented at the iwsm 99 in kyoto japan |
| title_sub | [ ... papers presented at the IWSM '99 in Kyoto, Japan ] |
| topic | Messtechnik (DE-588)4114575-6 gnd Statistik (DE-588)4056995-0 gnd Halbleitertechnologie (DE-588)4158814-9 gnd VLSI (DE-588)4117388-0 gnd |
| topic_facet | Messtechnik Statistik Halbleitertechnologie VLSI Konferenzschrift |
| work_keys_str_mv | AT masudahiroo specialsectiononstatisticalmetrologypaperspresentedattheiwsm99inkyotojapan AT internationalworkshoponstatisticalmetrologykyoto specialsectiononstatisticalmetrologypaperspresentedattheiwsm99inkyotojapan |