Proceedings of the 12th Symposium on Plasma Science for Materials ( SPSM-12 ): Tokyo, Japan, 16 - 17 June 1999
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Bibliographic Details
Corporate Author: Symposium on Plasma Science for Materials Tokio (Author)
Format: Conference Proceeding Book
Language:English
Published: Amsterdam [u.a.] Elsevier 2001
Subjects:
Item Description:Literaturangaben. - In: Thin solid films ; 386 (2001),2
Physical Description:VII S., S. 133 - 316 Ill., graph. Darst.

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