Special section on ICMTS '98: [ICMTS '98 was held in Kanazawa, Japan, March 23 - 26, 1998]
Saved in:
| Corporate Author: | |
|---|---|
| Format: | Conference Proceeding Book |
| Language: | English |
| Published: |
New York, NY
Inst. of Electrical and Electronics Engineers
1999
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| Subjects: | |
| Item Description: | Literaturangaben. - In: IEEE transactions on semiconductor manufacturing ; 12 (1999),2 |
| Physical Description: | S. 153 - 268 Ill., graph. Darst. |
Staff View
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| spelling | International Conference on Microelectronic Test Structures 11 1998 Kanazawa Verfasser (DE-588)5318567-5 aut Special section on ICMTS '98 [ICMTS '98 was held in Kanazawa, Japan, March 23 - 26, 1998] New York, NY Inst. of Electrical and Electronics Engineers 1999 S. 153 - 268 Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Literaturangaben. - In: IEEE transactions on semiconductor manufacturing ; 12 (1999),2 Integrierte Schaltung (DE-588)4027242-4 gnd rswk-swf Testauswertung (DE-588)4124305-5 gnd rswk-swf (DE-588)1071861417 Konferenzschrift gnd-content Integrierte Schaltung (DE-588)4027242-4 s Testauswertung (DE-588)4124305-5 s DE-604 |
| spellingShingle | Special section on ICMTS '98 [ICMTS '98 was held in Kanazawa, Japan, March 23 - 26, 1998] Integrierte Schaltung (DE-588)4027242-4 gnd Testauswertung (DE-588)4124305-5 gnd |
| subject_GND | (DE-588)4027242-4 (DE-588)4124305-5 (DE-588)1071861417 |
| title | Special section on ICMTS '98 [ICMTS '98 was held in Kanazawa, Japan, March 23 - 26, 1998] |
| title_auth | Special section on ICMTS '98 [ICMTS '98 was held in Kanazawa, Japan, March 23 - 26, 1998] |
| title_exact_search | Special section on ICMTS '98 [ICMTS '98 was held in Kanazawa, Japan, March 23 - 26, 1998] |
| title_exact_search_txtP | Special section on ICMTS '98 [ICMTS '98 was held in Kanazawa, Japan, March 23 - 26, 1998] |
| title_full | Special section on ICMTS '98 [ICMTS '98 was held in Kanazawa, Japan, March 23 - 26, 1998] |
| title_fullStr | Special section on ICMTS '98 [ICMTS '98 was held in Kanazawa, Japan, March 23 - 26, 1998] |
| title_full_unstemmed | Special section on ICMTS '98 [ICMTS '98 was held in Kanazawa, Japan, March 23 - 26, 1998] |
| title_short | Special section on ICMTS '98 |
| title_sort | special section on icmts 98 icmts 98 was held in kanazawa japan march 23 26 1998 |
| title_sub | [ICMTS '98 was held in Kanazawa, Japan, March 23 - 26, 1998] |
| topic | Integrierte Schaltung (DE-588)4027242-4 gnd Testauswertung (DE-588)4124305-5 gnd |
| topic_facet | Integrierte Schaltung Testauswertung Konferenzschrift |
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