(1999). Micromechanics: Special double issue of the Micromechanics section of Sensors and actuators, based on contributions revised from the technical digest of the Eleventh IEEE International Workshop on Micro Electro Mechanical Systems ( MEMS-98 ) ; Heidelberg, Germany, 25 - 29 January 1998. Elsevier.
Chicago-Zitierstil (17. Ausg.)Micromechanics: Special Double Issue of the Micromechanics Section of Sensors and Actuators, Based on Contributions Revised from the Technical Digest of the Eleventh IEEE International Workshop on Micro Electro Mechanical Systems ( MEMS-98 ) ; Heidelberg, Germany, 25 - 29 January 1998. Elsevier, 1999.
MLA-Zitierstil (9. Ausg.)Micromechanics: Special Double Issue of the Micromechanics Section of Sensors and Actuators, Based on Contributions Revised from the Technical Digest of the Eleventh IEEE International Workshop on Micro Electro Mechanical Systems ( MEMS-98 ) ; Heidelberg, Germany, 25 - 29 January 1998. Elsevier, 1999.