Special section on chemical-mechanical planarization:
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Piscataway, NJ
IEEE Service Center
1998
|
| Schlagworte: | |
| Beschreibung: | Literaturangaben. - In: Journal of electronic materials ; 27 (1998),10 |
| Beschreibung: | S. 1067 - 1111 Ill., graph. Darst. |
Internformat
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Datensatz im Suchindex
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| id | DE-604.BV021948414 |
| illustrated | Illustrated |
| index_date | 2024-07-02T16:07:31Z |
| indexdate | 2024-07-09T20:48:02Z |
| institution | BVB |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-015163564 |
| oclc_num | 633291712 |
| open_access_boolean | |
| owner | DE-706 |
| owner_facet | DE-706 |
| physical | S. 1067 - 1111 Ill., graph. Darst. |
| publishDate | 1998 |
| publishDateSearch | 1998 |
| publishDateSort | 1998 |
| publisher | IEEE Service Center |
| record_format | marc |
| spelling | Special section on chemical-mechanical planarization Piscataway, NJ IEEE Service Center 1998 S. 1067 - 1111 Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Literaturangaben. - In: Journal of electronic materials ; 27 (1998),10 Festkörperphysik (DE-588)4016921-2 gnd rswk-swf Oberflächenphysik (DE-588)4134881-3 gnd rswk-swf Festkörperphysik (DE-588)4016921-2 s DE-604 Oberflächenphysik (DE-588)4134881-3 s |
| spellingShingle | Special section on chemical-mechanical planarization Festkörperphysik (DE-588)4016921-2 gnd Oberflächenphysik (DE-588)4134881-3 gnd |
| subject_GND | (DE-588)4016921-2 (DE-588)4134881-3 |
| title | Special section on chemical-mechanical planarization |
| title_auth | Special section on chemical-mechanical planarization |
| title_exact_search | Special section on chemical-mechanical planarization |
| title_exact_search_txtP | Special section on chemical-mechanical planarization |
| title_full | Special section on chemical-mechanical planarization |
| title_fullStr | Special section on chemical-mechanical planarization |
| title_full_unstemmed | Special section on chemical-mechanical planarization |
| title_short | Special section on chemical-mechanical planarization |
| title_sort | special section on chemical mechanical planarization |
| topic | Festkörperphysik (DE-588)4016921-2 gnd Oberflächenphysik (DE-588)4134881-3 gnd |
| topic_facet | Festkörperphysik Oberflächenphysik |