Proceedings of the Eighth Canadian Semiconductor Technology Conference: 12 - 15 August 1997, The Château Laurier Hotel, Ottawa, Canada
Gespeichert in:
| Körperschaft: | |
|---|---|
| Format: | Tagungsbericht Buch |
| Sprache: | English |
| Veröffentlicht: |
New York
American Inst. of Physics
1998
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| Schlagworte: | |
| Beschreibung: | Literaturangaben. - In: Journal of vacuum science and technology / 2 / A ; 16 (1998),2 |
| Beschreibung: | S. 771 - 911 Ill., graph. Darst. |
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| spelling | Canadian Semiconductor Technology Conference 8 1997 Ottawa Verfasser (DE-588)5284588-6 aut Proceedings of the Eighth Canadian Semiconductor Technology Conference 12 - 15 August 1997, The Château Laurier Hotel, Ottawa, Canada New York American Inst. of Physics 1998 S. 771 - 911 Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Literaturangaben. - In: Journal of vacuum science and technology / 2 / A ; 16 (1998),2 Halbleitertechnologie (DE-588)4158814-9 gnd rswk-swf (DE-588)1071861417 Konferenzschrift gnd-content Halbleitertechnologie (DE-588)4158814-9 s DE-604 Janz, Siegfried Sonstige oth |
| spellingShingle | Proceedings of the Eighth Canadian Semiconductor Technology Conference 12 - 15 August 1997, The Château Laurier Hotel, Ottawa, Canada Halbleitertechnologie (DE-588)4158814-9 gnd |
| subject_GND | (DE-588)4158814-9 (DE-588)1071861417 |
| title | Proceedings of the Eighth Canadian Semiconductor Technology Conference 12 - 15 August 1997, The Château Laurier Hotel, Ottawa, Canada |
| title_auth | Proceedings of the Eighth Canadian Semiconductor Technology Conference 12 - 15 August 1997, The Château Laurier Hotel, Ottawa, Canada |
| title_exact_search | Proceedings of the Eighth Canadian Semiconductor Technology Conference 12 - 15 August 1997, The Château Laurier Hotel, Ottawa, Canada |
| title_exact_search_txtP | Proceedings of the Eighth Canadian Semiconductor Technology Conference 12 - 15 August 1997, The Château Laurier Hotel, Ottawa, Canada |
| title_full | Proceedings of the Eighth Canadian Semiconductor Technology Conference 12 - 15 August 1997, The Château Laurier Hotel, Ottawa, Canada |
| title_fullStr | Proceedings of the Eighth Canadian Semiconductor Technology Conference 12 - 15 August 1997, The Château Laurier Hotel, Ottawa, Canada |
| title_full_unstemmed | Proceedings of the Eighth Canadian Semiconductor Technology Conference 12 - 15 August 1997, The Château Laurier Hotel, Ottawa, Canada |
| title_short | Proceedings of the Eighth Canadian Semiconductor Technology Conference |
| title_sort | proceedings of the eighth canadian semiconductor technology conference 12 15 august 1997 the chateau laurier hotel ottawa canada |
| title_sub | 12 - 15 August 1997, The Château Laurier Hotel, Ottawa, Canada |
| topic | Halbleitertechnologie (DE-588)4158814-9 gnd |
| topic_facet | Halbleitertechnologie Konferenzschrift |
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