Special issue of the sputtering and plasma processes: based on selected papers revised from the proceedings of the Fourth International Symposium on Sputtering and Plasma Processes ; Kanazawa, Japan, 4 - 6 June 1997
Gespeichert in:
| Format: | Tagungsbericht Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Oxford
Pergamon
1998
|
| Schlagworte: | |
| Beschreibung: | Literaturangaben. - In: Vacuum ; 51 (1998),4 : Special issue |
| Beschreibung: | S. 475 - 795 Ill., graph. Darst. |
Internformat
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| index_date | 2024-07-02T16:07:22Z |
| indexdate | 2024-07-09T20:48:00Z |
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| language | English |
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| physical | S. 475 - 795 Ill., graph. Darst. |
| publishDate | 1998 |
| publishDateSearch | 1998 |
| publishDateSort | 1998 |
| publisher | Pergamon |
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| spelling | Special issue of the sputtering and plasma processes based on selected papers revised from the proceedings of the Fourth International Symposium on Sputtering and Plasma Processes ; Kanazawa, Japan, 4 - 6 June 1997 Oxford Pergamon 1998 S. 475 - 795 Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Literaturangaben. - In: Vacuum ; 51 (1998),4 : Special issue Plasmatechnik (DE-588)4140353-8 gnd rswk-swf Dünnschichttechnik (DE-588)4136339-5 gnd rswk-swf (DE-588)1071861417 Konferenzschrift gnd-content Dünnschichttechnik (DE-588)4136339-5 s DE-604 Plasmatechnik (DE-588)4140353-8 s Kinbara, Akira Sonstige oth International Symposium on Sputtering and Plasma Processes 4 1997 Kanazawa Sonstige (DE-588)5311765-7 oth |
| spellingShingle | Special issue of the sputtering and plasma processes based on selected papers revised from the proceedings of the Fourth International Symposium on Sputtering and Plasma Processes ; Kanazawa, Japan, 4 - 6 June 1997 Plasmatechnik (DE-588)4140353-8 gnd Dünnschichttechnik (DE-588)4136339-5 gnd |
| subject_GND | (DE-588)4140353-8 (DE-588)4136339-5 (DE-588)1071861417 |
| title | Special issue of the sputtering and plasma processes based on selected papers revised from the proceedings of the Fourth International Symposium on Sputtering and Plasma Processes ; Kanazawa, Japan, 4 - 6 June 1997 |
| title_auth | Special issue of the sputtering and plasma processes based on selected papers revised from the proceedings of the Fourth International Symposium on Sputtering and Plasma Processes ; Kanazawa, Japan, 4 - 6 June 1997 |
| title_exact_search | Special issue of the sputtering and plasma processes based on selected papers revised from the proceedings of the Fourth International Symposium on Sputtering and Plasma Processes ; Kanazawa, Japan, 4 - 6 June 1997 |
| title_exact_search_txtP | Special issue of the sputtering and plasma processes based on selected papers revised from the proceedings of the Fourth International Symposium on Sputtering and Plasma Processes ; Kanazawa, Japan, 4 - 6 June 1997 |
| title_full | Special issue of the sputtering and plasma processes based on selected papers revised from the proceedings of the Fourth International Symposium on Sputtering and Plasma Processes ; Kanazawa, Japan, 4 - 6 June 1997 |
| title_fullStr | Special issue of the sputtering and plasma processes based on selected papers revised from the proceedings of the Fourth International Symposium on Sputtering and Plasma Processes ; Kanazawa, Japan, 4 - 6 June 1997 |
| title_full_unstemmed | Special issue of the sputtering and plasma processes based on selected papers revised from the proceedings of the Fourth International Symposium on Sputtering and Plasma Processes ; Kanazawa, Japan, 4 - 6 June 1997 |
| title_short | Special issue of the sputtering and plasma processes |
| title_sort | special issue of the sputtering and plasma processes based on selected papers revised from the proceedings of the fourth international symposium on sputtering and plasma processes kanazawa japan 4 6 june 1997 |
| title_sub | based on selected papers revised from the proceedings of the Fourth International Symposium on Sputtering and Plasma Processes ; Kanazawa, Japan, 4 - 6 June 1997 |
| topic | Plasmatechnik (DE-588)4140353-8 gnd Dünnschichttechnik (DE-588)4136339-5 gnd |
| topic_facet | Plasmatechnik Dünnschichttechnik Konferenzschrift |
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