Plasma processing: [... a collection of reviews and regular papers presented at the 3rd International Conference on Reactive Plasmas ( ICRP-3 ) ... held at Nara-ken New Public Hall, in Nara, on January 21 - 24, 1997 ...]
Gespeichert in:
| Format: | Tagungsbericht Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Tokyo
Japan Soc. of Applied Physics
1997
|
| Schlagworte: | |
| Beschreibung: | Literaturangaben. - In: Japanese journal of applied physics / 1 ; 36 (1997),7B : Special issue |
| Beschreibung: | S. 4547 - 5024 Ill., graph. Darst. |
Internformat
MARC
| LEADER | 00000nam a2200000zc 4500 | ||
|---|---|---|---|
| 001 | BV021942315 | ||
| 003 | DE-604 | ||
| 005 | 20040302000000.0 | ||
| 007 | t | ||
| 008 | 980925s1997 ad|| |||| 10||| eng d | ||
| 035 | |a (OCoLC)633045776 | ||
| 035 | |a (DE-599)BVBBV021942315 | ||
| 040 | |a DE-604 |b ger | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-706 | ||
| 245 | 1 | 0 | |a Plasma processing |b [... a collection of reviews and regular papers presented at the 3rd International Conference on Reactive Plasmas ( ICRP-3 ) ... held at Nara-ken New Public Hall, in Nara, on January 21 - 24, 1997 ...] |
| 264 | 1 | |a Tokyo |b Japan Soc. of Applied Physics |c 1997 | |
| 300 | |a S. 4547 - 5024 |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 500 | |a Literaturangaben. - In: Japanese journal of applied physics / 1 ; 36 (1997),7B : Special issue | ||
| 650 | 0 | 7 | |a Plasmatechnik |0 (DE-588)4140353-8 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Plasmaphysik |0 (DE-588)4046259-6 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |2 gnd-content | |
| 689 | 0 | 0 | |a Plasmaphysik |0 (DE-588)4046259-6 |D s |
| 689 | 0 | |5 DE-604 | |
| 689 | 1 | 0 | |a Plasmatechnik |0 (DE-588)4140353-8 |D s |
| 689 | 1 | |5 DE-604 | |
| 700 | 1 | |a Kawai, Yoshinobu |e Sonstige |4 oth | |
| 711 | 2 | |a ICRP |n 3 |d 1997 |c Nara |j Sonstige |0 (DE-588)1901354-1 |4 oth | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-015157465 | ||
Datensatz im Suchindex
| _version_ | 1804135903443025920 |
|---|---|
| adam_txt | |
| any_adam_object | |
| any_adam_object_boolean | |
| building | Verbundindex |
| bvnumber | BV021942315 |
| ctrlnum | (OCoLC)633045776 (DE-599)BVBBV021942315 |
| format | Conference Proceeding Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01371nam a2200349zc 4500</leader><controlfield tag="001">BV021942315</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20040302000000.0</controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">980925s1997 ad|| |||| 10||| eng d</controlfield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)633045776</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV021942315</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-706</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Plasma processing</subfield><subfield code="b">[... a collection of reviews and regular papers presented at the 3rd International Conference on Reactive Plasmas ( ICRP-3 ) ... held at Nara-ken New Public Hall, in Nara, on January 21 - 24, 1997 ...]</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Tokyo</subfield><subfield code="b">Japan Soc. of Applied Physics</subfield><subfield code="c">1997</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">S. 4547 - 5024</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Literaturangaben. - In: Japanese journal of applied physics / 1 ; 36 (1997),7B : Special issue</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Plasmatechnik</subfield><subfield code="0">(DE-588)4140353-8</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Plasmaphysik</subfield><subfield code="0">(DE-588)4046259-6</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)1071861417</subfield><subfield code="a">Konferenzschrift</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Plasmaphysik</subfield><subfield code="0">(DE-588)4046259-6</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="1" ind2="0"><subfield code="a">Plasmatechnik</subfield><subfield code="0">(DE-588)4140353-8</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="1" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Kawai, Yoshinobu</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="711" ind1="2" ind2=" "><subfield code="a">ICRP</subfield><subfield code="n">3</subfield><subfield code="d">1997</subfield><subfield code="c">Nara</subfield><subfield code="j">Sonstige</subfield><subfield code="0">(DE-588)1901354-1</subfield><subfield code="4">oth</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-015157465</subfield></datafield></record></collection> |
| genre | (DE-588)1071861417 Konferenzschrift gnd-content |
| genre_facet | Konferenzschrift |
| id | DE-604.BV021942315 |
| illustrated | Illustrated |
| index_date | 2024-07-02T16:07:04Z |
| indexdate | 2024-07-09T20:47:54Z |
| institution | BVB |
| institution_GND | (DE-588)1901354-1 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-015157465 |
| oclc_num | 633045776 |
| open_access_boolean | |
| owner | DE-706 |
| owner_facet | DE-706 |
| physical | S. 4547 - 5024 Ill., graph. Darst. |
| publishDate | 1997 |
| publishDateSearch | 1997 |
| publishDateSort | 1997 |
| publisher | Japan Soc. of Applied Physics |
| record_format | marc |
| spelling | Plasma processing [... a collection of reviews and regular papers presented at the 3rd International Conference on Reactive Plasmas ( ICRP-3 ) ... held at Nara-ken New Public Hall, in Nara, on January 21 - 24, 1997 ...] Tokyo Japan Soc. of Applied Physics 1997 S. 4547 - 5024 Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Literaturangaben. - In: Japanese journal of applied physics / 1 ; 36 (1997),7B : Special issue Plasmatechnik (DE-588)4140353-8 gnd rswk-swf Plasmaphysik (DE-588)4046259-6 gnd rswk-swf (DE-588)1071861417 Konferenzschrift gnd-content Plasmaphysik (DE-588)4046259-6 s DE-604 Plasmatechnik (DE-588)4140353-8 s Kawai, Yoshinobu Sonstige oth ICRP 3 1997 Nara Sonstige (DE-588)1901354-1 oth |
| spellingShingle | Plasma processing [... a collection of reviews and regular papers presented at the 3rd International Conference on Reactive Plasmas ( ICRP-3 ) ... held at Nara-ken New Public Hall, in Nara, on January 21 - 24, 1997 ...] Plasmatechnik (DE-588)4140353-8 gnd Plasmaphysik (DE-588)4046259-6 gnd |
| subject_GND | (DE-588)4140353-8 (DE-588)4046259-6 (DE-588)1071861417 |
| title | Plasma processing [... a collection of reviews and regular papers presented at the 3rd International Conference on Reactive Plasmas ( ICRP-3 ) ... held at Nara-ken New Public Hall, in Nara, on January 21 - 24, 1997 ...] |
| title_auth | Plasma processing [... a collection of reviews and regular papers presented at the 3rd International Conference on Reactive Plasmas ( ICRP-3 ) ... held at Nara-ken New Public Hall, in Nara, on January 21 - 24, 1997 ...] |
| title_exact_search | Plasma processing [... a collection of reviews and regular papers presented at the 3rd International Conference on Reactive Plasmas ( ICRP-3 ) ... held at Nara-ken New Public Hall, in Nara, on January 21 - 24, 1997 ...] |
| title_exact_search_txtP | Plasma processing [... a collection of reviews and regular papers presented at the 3rd International Conference on Reactive Plasmas ( ICRP-3 ) ... held at Nara-ken New Public Hall, in Nara, on January 21 - 24, 1997 ...] |
| title_full | Plasma processing [... a collection of reviews and regular papers presented at the 3rd International Conference on Reactive Plasmas ( ICRP-3 ) ... held at Nara-ken New Public Hall, in Nara, on January 21 - 24, 1997 ...] |
| title_fullStr | Plasma processing [... a collection of reviews and regular papers presented at the 3rd International Conference on Reactive Plasmas ( ICRP-3 ) ... held at Nara-ken New Public Hall, in Nara, on January 21 - 24, 1997 ...] |
| title_full_unstemmed | Plasma processing [... a collection of reviews and regular papers presented at the 3rd International Conference on Reactive Plasmas ( ICRP-3 ) ... held at Nara-ken New Public Hall, in Nara, on January 21 - 24, 1997 ...] |
| title_short | Plasma processing |
| title_sort | plasma processing a collection of reviews and regular papers presented at the 3rd international conference on reactive plasmas icrp 3 held at nara ken new public hall in nara on january 21 24 1997 |
| title_sub | [... a collection of reviews and regular papers presented at the 3rd International Conference on Reactive Plasmas ( ICRP-3 ) ... held at Nara-ken New Public Hall, in Nara, on January 21 - 24, 1997 ...] |
| topic | Plasmatechnik (DE-588)4140353-8 gnd Plasmaphysik (DE-588)4046259-6 gnd |
| topic_facet | Plasmatechnik Plasmaphysik Konferenzschrift |
| work_keys_str_mv | AT kawaiyoshinobu plasmaprocessingacollectionofreviewsandregularpaperspresentedatthe3rdinternationalconferenceonreactiveplasmasicrp3heldatnarakennewpublichallinnaraonjanuary21241997 AT icrpnara plasmaprocessingacollectionofreviewsandregularpaperspresentedatthe3rdinternationalconferenceonreactiveplasmasicrp3heldatnarakennewpublichallinnaraonjanuary21241997 |