Special section on ICMTS '96:
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Bibliographic Details
Corporate Author: ICMTS Trient (Author)
Format: Conference Proceeding Book
Language:English
Published: New York, NY Inst. of Electrical and Electronics Engineers 1997
Subjects:
Item Description:Literaturangaben. - In: IEEE transactions on semiconductor manufacturing ; 10 (1997),2
Physical Description:S. 193 - 321 Ill., graph. Darst.

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