Micromechanics: special issue of the Micromechanics section of Sensors and actuators, based on contributions revised from the technical digest of the Tenth IEEE International Workshop on Micro Electro Mechanical Systems ( MEMS-97 ), Nagoya, Japan, 26 - 30 January 1997
Gespeichert in:
| Format: | Tagungsbericht Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Elsevier
1998
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| Schlagworte: | |
| Beschreibung: | In: Sensors and actuators / A ; 64,1 (1998) |
| Beschreibung: | 115 S. Ill., graph. Darst. |
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| index_date | 2024-07-02T16:06:51Z |
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| spelling | Micromechanics special issue of the Micromechanics section of Sensors and actuators, based on contributions revised from the technical digest of the Tenth IEEE International Workshop on Micro Electro Mechanical Systems ( MEMS-97 ), Nagoya, Japan, 26 - 30 January 1997 Elsevier 1998 115 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier In: Sensors and actuators / A ; 64,1 (1998) Mikroelektronik (DE-588)4039207-7 gnd rswk-swf Mikromechanik (DE-588)4205811-9 gnd rswk-swf Mikrosensor (DE-588)4561097-6 gnd rswk-swf Mikroschaltung (DE-588)4169849-6 gnd rswk-swf (DE-588)1071861417 Konferenzschrift gnd-content Mikroelektronik (DE-588)4039207-7 s DE-604 Mikroschaltung (DE-588)4169849-6 s Mikromechanik (DE-588)4205811-9 s Mikrosensor (DE-588)4561097-6 s International Workshop on Micro-Electro-Mechanical Systems 10 1997 Nagoya Sonstige (DE-588)5266347-4 oth |
| spellingShingle | Micromechanics special issue of the Micromechanics section of Sensors and actuators, based on contributions revised from the technical digest of the Tenth IEEE International Workshop on Micro Electro Mechanical Systems ( MEMS-97 ), Nagoya, Japan, 26 - 30 January 1997 Mikroelektronik (DE-588)4039207-7 gnd Mikromechanik (DE-588)4205811-9 gnd Mikrosensor (DE-588)4561097-6 gnd Mikroschaltung (DE-588)4169849-6 gnd |
| subject_GND | (DE-588)4039207-7 (DE-588)4205811-9 (DE-588)4561097-6 (DE-588)4169849-6 (DE-588)1071861417 |
| title | Micromechanics special issue of the Micromechanics section of Sensors and actuators, based on contributions revised from the technical digest of the Tenth IEEE International Workshop on Micro Electro Mechanical Systems ( MEMS-97 ), Nagoya, Japan, 26 - 30 January 1997 |
| title_auth | Micromechanics special issue of the Micromechanics section of Sensors and actuators, based on contributions revised from the technical digest of the Tenth IEEE International Workshop on Micro Electro Mechanical Systems ( MEMS-97 ), Nagoya, Japan, 26 - 30 January 1997 |
| title_exact_search | Micromechanics special issue of the Micromechanics section of Sensors and actuators, based on contributions revised from the technical digest of the Tenth IEEE International Workshop on Micro Electro Mechanical Systems ( MEMS-97 ), Nagoya, Japan, 26 - 30 January 1997 |
| title_exact_search_txtP | Micromechanics special issue of the Micromechanics section of Sensors and actuators, based on contributions revised from the technical digest of the Tenth IEEE International Workshop on Micro Electro Mechanical Systems ( MEMS-97 ), Nagoya, Japan, 26 - 30 January 1997 |
| title_full | Micromechanics special issue of the Micromechanics section of Sensors and actuators, based on contributions revised from the technical digest of the Tenth IEEE International Workshop on Micro Electro Mechanical Systems ( MEMS-97 ), Nagoya, Japan, 26 - 30 January 1997 |
| title_fullStr | Micromechanics special issue of the Micromechanics section of Sensors and actuators, based on contributions revised from the technical digest of the Tenth IEEE International Workshop on Micro Electro Mechanical Systems ( MEMS-97 ), Nagoya, Japan, 26 - 30 January 1997 |
| title_full_unstemmed | Micromechanics special issue of the Micromechanics section of Sensors and actuators, based on contributions revised from the technical digest of the Tenth IEEE International Workshop on Micro Electro Mechanical Systems ( MEMS-97 ), Nagoya, Japan, 26 - 30 January 1997 |
| title_short | Micromechanics |
| title_sort | micromechanics special issue of the micromechanics section of sensors and actuators based on contributions revised from the technical digest of the tenth ieee international workshop on micro electro mechanical systems mems 97 nagoya japan 26 30 january 1997 |
| title_sub | special issue of the Micromechanics section of Sensors and actuators, based on contributions revised from the technical digest of the Tenth IEEE International Workshop on Micro Electro Mechanical Systems ( MEMS-97 ), Nagoya, Japan, 26 - 30 January 1997 |
| topic | Mikroelektronik (DE-588)4039207-7 gnd Mikromechanik (DE-588)4205811-9 gnd Mikrosensor (DE-588)4561097-6 gnd Mikroschaltung (DE-588)4169849-6 gnd |
| topic_facet | Mikroelektronik Mikromechanik Mikrosensor Mikroschaltung Konferenzschrift |
| work_keys_str_mv | AT internationalworkshoponmicroelectromechanicalsystemsnagoya micromechanicsspecialissueofthemicromechanicssectionofsensorsandactuatorsbasedoncontributionsrevisedfromthetechnicaldigestofthetenthieeeinternationalworkshoponmicroelectromechanicalsystemsmems97nagoyajapan2630january1997 |