ULSI technology:
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
New York, NY [u.a.]
McGraw-Hill
1996
|
| Ausgabe: | [Nachdr.] |
| Schriftenreihe: | McGraw-Hill series in electrical and computer engineering
|
| Schlagworte: | |
| Beschreibung: | Literaturangaben |
| Beschreibung: | XXV, 726 S. graph. Darst. |
| ISBN: | 0070630623 |
Internformat
MARC
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| 003 | DE-604 | ||
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| 008 | 980305s1996 d||| |||| 00||| eng d | ||
| 020 | |a 0070630623 |9 0-07-063062-3 | ||
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| 041 | 0 | |a eng | |
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| 245 | 1 | 0 | |a ULSI technology |c ed. by C. Y. Chang ... |
| 250 | |a [Nachdr.] | ||
| 264 | 1 | |a New York, NY [u.a.] |b McGraw-Hill |c 1996 | |
| 300 | |a XXV, 726 S. |b graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 0 | |a McGraw-Hill series in electrical and computer engineering | |
| 500 | |a Literaturangaben | ||
| 650 | 4 | |a Integrated circuits |x Ultra large scale integration | |
| 650 | 0 | 7 | |a Ätzen |0 (DE-588)4000648-7 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Lithografie |g Halbleitertechnologie |0 (DE-588)4191584-7 |2 gnd |9 rswk-swf |
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| 650 | 0 | 7 | |a Epitaxie |0 (DE-588)4152545-0 |2 gnd |9 rswk-swf |
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| 700 | 1 | |a Chang, C. Y. |e Sonstige |4 oth | |
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Datensatz im Suchindex
| _version_ | 1804135898947780608 |
|---|---|
| adam_txt | |
| any_adam_object | |
| any_adam_object_boolean | |
| building | Verbundindex |
| bvnumber | BV021939120 |
| callnumber-first | T - Technology |
| callnumber-label | TK7874 |
| callnumber-raw | TK7874.76 |
| callnumber-search | TK7874.76 |
| callnumber-sort | TK 47874.76 |
| callnumber-subject | TK - Electrical and Nuclear Engineering |
| ctrlnum | (OCoLC)35136111 (DE-599)BVBBV021939120 |
| dewey-full | 621.395 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.395 |
| dewey-search | 621.395 |
| dewey-sort | 3621.395 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| discipline_str_mv | Elektrotechnik / Elektronik / Nachrichtentechnik |
| edition | [Nachdr.] |
| format | Book |
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| id | DE-604.BV021939120 |
| illustrated | Illustrated |
| index_date | 2024-07-02T16:06:48Z |
| indexdate | 2024-07-09T20:47:50Z |
| institution | BVB |
| isbn | 0070630623 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-015154270 |
| oclc_num | 35136111 |
| open_access_boolean | |
| owner | DE-706 |
| owner_facet | DE-706 |
| physical | XXV, 726 S. graph. Darst. |
| publishDate | 1996 |
| publishDateSearch | 1996 |
| publishDateSort | 1996 |
| publisher | McGraw-Hill |
| record_format | marc |
| series2 | McGraw-Hill series in electrical and computer engineering |
| spelling | ULSI technology ed. by C. Y. Chang ... [Nachdr.] New York, NY [u.a.] McGraw-Hill 1996 XXV, 726 S. graph. Darst. txt rdacontent n rdamedia nc rdacarrier McGraw-Hill series in electrical and computer engineering Literaturangaben Integrated circuits Ultra large scale integration Ätzen (DE-588)4000648-7 gnd rswk-swf Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd rswk-swf Reinraumtechnik (DE-588)4177592-2 gnd rswk-swf Epitaxie (DE-588)4152545-0 gnd rswk-swf ULSI (DE-588)4226286-0 gnd rswk-swf Ätzen (DE-588)4000648-7 s DE-604 Epitaxie (DE-588)4152545-0 s Reinraumtechnik (DE-588)4177592-2 s Lithografie Halbleitertechnologie (DE-588)4191584-7 s ULSI (DE-588)4226286-0 s Chang, C. Y. Sonstige oth |
| spellingShingle | ULSI technology Integrated circuits Ultra large scale integration Ätzen (DE-588)4000648-7 gnd Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd Reinraumtechnik (DE-588)4177592-2 gnd Epitaxie (DE-588)4152545-0 gnd ULSI (DE-588)4226286-0 gnd |
| subject_GND | (DE-588)4000648-7 (DE-588)4191584-7 (DE-588)4177592-2 (DE-588)4152545-0 (DE-588)4226286-0 |
| title | ULSI technology |
| title_auth | ULSI technology |
| title_exact_search | ULSI technology |
| title_exact_search_txtP | ULSI technology |
| title_full | ULSI technology ed. by C. Y. Chang ... |
| title_fullStr | ULSI technology ed. by C. Y. Chang ... |
| title_full_unstemmed | ULSI technology ed. by C. Y. Chang ... |
| title_short | ULSI technology |
| title_sort | ulsi technology |
| topic | Integrated circuits Ultra large scale integration Ätzen (DE-588)4000648-7 gnd Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd Reinraumtechnik (DE-588)4177592-2 gnd Epitaxie (DE-588)4152545-0 gnd ULSI (DE-588)4226286-0 gnd |
| topic_facet | Integrated circuits Ultra large scale integration Ätzen Lithografie Halbleitertechnologie Reinraumtechnik Epitaxie ULSI |
| work_keys_str_mv | AT changcy ulsitechnology |