Special issue on ion beam and laser processing of materials:
Gespeichert in:
Format: | Buch |
---|---|
Sprache: | English |
Veröffentlicht: |
Warrendale, PA
TMS
1996
|
Schlagworte: | |
Beschreibung: | In: Journal of electronic materials ; 25 (1996), 1 |
Beschreibung: | 164 S. Ill., graph. Darst. |
Internformat
MARC
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genre | (DE-588)1071861417 Konferenzschrift gnd-content |
genre_facet | Konferenzschrift |
id | DE-604.BV021934979 |
illustrated | Illustrated |
index_date | 2024-07-02T16:06:32Z |
indexdate | 2024-07-09T20:47:44Z |
institution | BVB |
language | English |
oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-015150133 |
oclc_num | 635357563 |
open_access_boolean | |
owner | DE-706 |
owner_facet | DE-706 |
physical | 164 S. Ill., graph. Darst. |
publishDate | 1996 |
publishDateSearch | 1996 |
publishDateSort | 1996 |
publisher | TMS |
record_format | marc |
spelling | Special issue on ion beam and laser processing of materials Warrendale, PA TMS 1996 164 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier In: Journal of electronic materials ; 25 (1996), 1 Oberflächenphysik (DE-588)4134881-3 gnd rswk-swf Implantation (DE-588)4026660-6 gnd rswk-swf Halbleiter (DE-588)4022993-2 gnd rswk-swf (DE-588)1071861417 Konferenzschrift gnd-content Halbleiter (DE-588)4022993-2 s DE-604 Implantation (DE-588)4026660-6 s Oberflächenphysik (DE-588)4134881-3 s |
spellingShingle | Special issue on ion beam and laser processing of materials Oberflächenphysik (DE-588)4134881-3 gnd Implantation (DE-588)4026660-6 gnd Halbleiter (DE-588)4022993-2 gnd |
subject_GND | (DE-588)4134881-3 (DE-588)4026660-6 (DE-588)4022993-2 (DE-588)1071861417 |
title | Special issue on ion beam and laser processing of materials |
title_auth | Special issue on ion beam and laser processing of materials |
title_exact_search | Special issue on ion beam and laser processing of materials |
title_exact_search_txtP | Special issue on ion beam and laser processing of materials |
title_full | Special issue on ion beam and laser processing of materials |
title_fullStr | Special issue on ion beam and laser processing of materials |
title_full_unstemmed | Special issue on ion beam and laser processing of materials |
title_short | Special issue on ion beam and laser processing of materials |
title_sort | special issue on ion beam and laser processing of materials |
topic | Oberflächenphysik (DE-588)4134881-3 gnd Implantation (DE-588)4026660-6 gnd Halbleiter (DE-588)4022993-2 gnd |
topic_facet | Oberflächenphysik Implantation Halbleiter Konferenzschrift |