New trends in ion beam processing from ions and cluster ion beams to engineering issues: proceedings of the E-MRS '95 spring meeting, Symp. J on Correlated Effects in Atomic and Cluster Ion Bombardment and Implantation ; Symp. C on Pushing the Limits of Ion Beam Processing - from engineering to atomic scale issues ; Strasbourg, France, May 22 - 26, 1995
Gespeichert in:
| Format: | Tagungsbericht Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Amsterdam [u.a.]
North-Holland
1996
|
| Schlagworte: | |
| Beschreibung: | In: Nuclear instruments & methods in physics research / B ; 112 (1996), 1/4 |
| Beschreibung: | XV, 355 S. Ill., graph. Darst. |
Internformat
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| physical | XV, 355 S. Ill., graph. Darst. |
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| spelling | New trends in ion beam processing from ions and cluster ion beams to engineering issues proceedings of the E-MRS '95 spring meeting, Symp. J on Correlated Effects in Atomic and Cluster Ion Bombardment and Implantation ; Symp. C on Pushing the Limits of Ion Beam Processing - from engineering to atomic scale issues ; Strasbourg, France, May 22 - 26, 1995 eds. P. L. F. Hemment ... Amsterdam [u.a.] North-Holland 1996 XV, 355 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier In: Nuclear instruments & methods in physics research / B ; 112 (1996), 1/4 Ion bombardment Congresses Ions Congresses Ionenimplantation (DE-588)4027606-5 gnd rswk-swf Ionenstrahl (DE-588)4162347-2 gnd rswk-swf Halbleiter (DE-588)4022993-2 gnd rswk-swf (DE-588)1071861417 Konferenzschrift gnd-content Halbleiter (DE-588)4022993-2 s DE-604 Ionenimplantation (DE-588)4027606-5 s Ionenstrahl (DE-588)4162347-2 s Hemment, P. L. F. Sonstige oth European Materials Research Society Sonstige (DE-588)5000064-0 oth Symposium on Correlated Effects in Atomic and Cluster Ion Bombardment and Implantation 1995 Straßburg Sonstige (DE-588)1900764-4 oth |
| spellingShingle | New trends in ion beam processing from ions and cluster ion beams to engineering issues proceedings of the E-MRS '95 spring meeting, Symp. J on Correlated Effects in Atomic and Cluster Ion Bombardment and Implantation ; Symp. C on Pushing the Limits of Ion Beam Processing - from engineering to atomic scale issues ; Strasbourg, France, May 22 - 26, 1995 Ion bombardment Congresses Ions Congresses Ionenimplantation (DE-588)4027606-5 gnd Ionenstrahl (DE-588)4162347-2 gnd Halbleiter (DE-588)4022993-2 gnd |
| subject_GND | (DE-588)4027606-5 (DE-588)4162347-2 (DE-588)4022993-2 (DE-588)1071861417 |
| title | New trends in ion beam processing from ions and cluster ion beams to engineering issues proceedings of the E-MRS '95 spring meeting, Symp. J on Correlated Effects in Atomic and Cluster Ion Bombardment and Implantation ; Symp. C on Pushing the Limits of Ion Beam Processing - from engineering to atomic scale issues ; Strasbourg, France, May 22 - 26, 1995 |
| title_auth | New trends in ion beam processing from ions and cluster ion beams to engineering issues proceedings of the E-MRS '95 spring meeting, Symp. J on Correlated Effects in Atomic and Cluster Ion Bombardment and Implantation ; Symp. C on Pushing the Limits of Ion Beam Processing - from engineering to atomic scale issues ; Strasbourg, France, May 22 - 26, 1995 |
| title_exact_search | New trends in ion beam processing from ions and cluster ion beams to engineering issues proceedings of the E-MRS '95 spring meeting, Symp. J on Correlated Effects in Atomic and Cluster Ion Bombardment and Implantation ; Symp. C on Pushing the Limits of Ion Beam Processing - from engineering to atomic scale issues ; Strasbourg, France, May 22 - 26, 1995 |
| title_exact_search_txtP | New trends in ion beam processing from ions and cluster ion beams to engineering issues proceedings of the E-MRS '95 spring meeting, Symp. J on Correlated Effects in Atomic and Cluster Ion Bombardment and Implantation ; Symp. C on Pushing the Limits of Ion Beam Processing - from engineering to atomic scale issues ; Strasbourg, France, May 22 - 26, 1995 |
| title_full | New trends in ion beam processing from ions and cluster ion beams to engineering issues proceedings of the E-MRS '95 spring meeting, Symp. J on Correlated Effects in Atomic and Cluster Ion Bombardment and Implantation ; Symp. C on Pushing the Limits of Ion Beam Processing - from engineering to atomic scale issues ; Strasbourg, France, May 22 - 26, 1995 eds. P. L. F. Hemment ... |
| title_fullStr | New trends in ion beam processing from ions and cluster ion beams to engineering issues proceedings of the E-MRS '95 spring meeting, Symp. J on Correlated Effects in Atomic and Cluster Ion Bombardment and Implantation ; Symp. C on Pushing the Limits of Ion Beam Processing - from engineering to atomic scale issues ; Strasbourg, France, May 22 - 26, 1995 eds. P. L. F. Hemment ... |
| title_full_unstemmed | New trends in ion beam processing from ions and cluster ion beams to engineering issues proceedings of the E-MRS '95 spring meeting, Symp. J on Correlated Effects in Atomic and Cluster Ion Bombardment and Implantation ; Symp. C on Pushing the Limits of Ion Beam Processing - from engineering to atomic scale issues ; Strasbourg, France, May 22 - 26, 1995 eds. P. L. F. Hemment ... |
| title_short | New trends in ion beam processing from ions and cluster ion beams to engineering issues |
| title_sort | new trends in ion beam processing from ions and cluster ion beams to engineering issues proceedings of the e mrs 95 spring meeting symp j on correlated effects in atomic and cluster ion bombardment and implantation symp c on pushing the limits of ion beam processing from engineering to atomic scale issues strasbourg france may 22 26 1995 |
| title_sub | proceedings of the E-MRS '95 spring meeting, Symp. J on Correlated Effects in Atomic and Cluster Ion Bombardment and Implantation ; Symp. C on Pushing the Limits of Ion Beam Processing - from engineering to atomic scale issues ; Strasbourg, France, May 22 - 26, 1995 |
| topic | Ion bombardment Congresses Ions Congresses Ionenimplantation (DE-588)4027606-5 gnd Ionenstrahl (DE-588)4162347-2 gnd Halbleiter (DE-588)4022993-2 gnd |
| topic_facet | Ion bombardment Congresses Ions Congresses Ionenimplantation Ionenstrahl Halbleiter Konferenzschrift |
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