Special issue on microelectronics manufacturing science and technology:
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
New York, NY
IEEE
1994
|
| Schlagworte: | |
| Beschreibung: | In: IEEE transactions on semiconductor manufacturing. Vol. 7, No. 2, 1994 |
| Beschreibung: | S. 105 - 244 Ill., graph. Darst. |
Internformat
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Datensatz im Suchindex
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| id | DE-604.BV021925773 |
| illustrated | Illustrated |
| index_date | 2024-07-02T16:05:58Z |
| indexdate | 2024-07-09T20:47:32Z |
| institution | BVB |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-015140930 |
| oclc_num | 35544064 |
| open_access_boolean | |
| owner | DE-706 |
| owner_facet | DE-706 |
| physical | S. 105 - 244 Ill., graph. Darst. |
| publishDate | 1994 |
| publishDateSearch | 1994 |
| publishDateSort | 1994 |
| publisher | IEEE |
| record_format | marc |
| spelling | Special issue on microelectronics manufacturing science and technology Microelectronics manufacturing science and technology New York, NY IEEE 1994 S. 105 - 244 Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier In: IEEE transactions on semiconductor manufacturing. Vol. 7, No. 2, 1994 CIM (DE-588)4113228-2 gnd rswk-swf Mikroelektronik (DE-588)4039207-7 gnd rswk-swf Mikroelektronik (DE-588)4039207-7 s DE-604 CIM (DE-588)4113228-2 s |
| spellingShingle | Special issue on microelectronics manufacturing science and technology CIM (DE-588)4113228-2 gnd Mikroelektronik (DE-588)4039207-7 gnd |
| subject_GND | (DE-588)4113228-2 (DE-588)4039207-7 |
| title | Special issue on microelectronics manufacturing science and technology |
| title_alt | Microelectronics manufacturing science and technology |
| title_auth | Special issue on microelectronics manufacturing science and technology |
| title_exact_search | Special issue on microelectronics manufacturing science and technology |
| title_exact_search_txtP | Special issue on microelectronics manufacturing science and technology |
| title_full | Special issue on microelectronics manufacturing science and technology |
| title_fullStr | Special issue on microelectronics manufacturing science and technology |
| title_full_unstemmed | Special issue on microelectronics manufacturing science and technology |
| title_short | Special issue on microelectronics manufacturing science and technology |
| title_sort | special issue on microelectronics manufacturing science and technology |
| topic | CIM (DE-588)4113228-2 gnd Mikroelektronik (DE-588)4039207-7 gnd |
| topic_facet | CIM Mikroelektronik |