Special issue on contributions from the 1992 Advanced Semiconductor Manufacturing Conference and Workshop and the 1992 International Semiconductor Manfacturing Science Symposium:
Gespeichert in:
| Körperschaft: | |
|---|---|
| Format: | Tagungsbericht Buch |
| Sprache: | Undetermined |
| Veröffentlicht: |
Piscataway, NJ
IEEE Service Center
1993
|
| Schlagworte: | |
| Beschreibung: | In: IEEE transactions on semiconductor manufacturing. Vol. 6, No. 2, 1993 |
| Beschreibung: | S. 93 - 195 Ill., graph. |
Internformat
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| spelling | Advanced Semiconductor Manufacturing Conference and Workshop 3 1992 Cambridge, Mass. Verfasser (DE-588)5080101-6 aut Special issue on contributions from the 1992 Advanced Semiconductor Manufacturing Conference and Workshop and the 1992 International Semiconductor Manfacturing Science Symposium Piscataway, NJ IEEE Service Center 1993 S. 93 - 195 Ill., graph. txt rdacontent n rdamedia nc rdacarrier In: IEEE transactions on semiconductor manufacturing. Vol. 6, No. 2, 1993 Produktion (DE-588)4047347-8 gnd rswk-swf Halbleiter (DE-588)4022993-2 gnd rswk-swf (DE-588)1071861417 Konferenzschrift gnd-content Halbleiter (DE-588)4022993-2 s DE-604 Produktion (DE-588)4047347-8 s International Semiconductor Manufacturing Science Symposium 4 1992 San Francisco, Calif. Sonstige (DE-588)5077819-5 oth |
| spellingShingle | Special issue on contributions from the 1992 Advanced Semiconductor Manufacturing Conference and Workshop and the 1992 International Semiconductor Manfacturing Science Symposium Produktion (DE-588)4047347-8 gnd Halbleiter (DE-588)4022993-2 gnd |
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| title | Special issue on contributions from the 1992 Advanced Semiconductor Manufacturing Conference and Workshop and the 1992 International Semiconductor Manfacturing Science Symposium |
| title_auth | Special issue on contributions from the 1992 Advanced Semiconductor Manufacturing Conference and Workshop and the 1992 International Semiconductor Manfacturing Science Symposium |
| title_exact_search | Special issue on contributions from the 1992 Advanced Semiconductor Manufacturing Conference and Workshop and the 1992 International Semiconductor Manfacturing Science Symposium |
| title_exact_search_txtP | Special issue on contributions from the 1992 Advanced Semiconductor Manufacturing Conference and Workshop and the 1992 International Semiconductor Manfacturing Science Symposium |
| title_full | Special issue on contributions from the 1992 Advanced Semiconductor Manufacturing Conference and Workshop and the 1992 International Semiconductor Manfacturing Science Symposium |
| title_fullStr | Special issue on contributions from the 1992 Advanced Semiconductor Manufacturing Conference and Workshop and the 1992 International Semiconductor Manfacturing Science Symposium |
| title_full_unstemmed | Special issue on contributions from the 1992 Advanced Semiconductor Manufacturing Conference and Workshop and the 1992 International Semiconductor Manfacturing Science Symposium |
| title_short | Special issue on contributions from the 1992 Advanced Semiconductor Manufacturing Conference and Workshop and the 1992 International Semiconductor Manfacturing Science Symposium |
| title_sort | special issue on contributions from the 1992 advanced semiconductor manufacturing conference and workshop and the 1992 international semiconductor manfacturing science symposium |
| topic | Produktion (DE-588)4047347-8 gnd Halbleiter (DE-588)4022993-2 gnd |
| topic_facet | Produktion Halbleiter Konferenzschrift |
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