APA (7th ed.) Citation

Sherman, A. (1987). Chemical vapor deposition for microelectronics: Principles, technology, and applications (5. print.). Noyes.

Chicago Style (17th ed.) Citation

Sherman, Arthur. Chemical Vapor Deposition for Microelectronics: Principles, Technology, and Applications. 5. print. Park Ridge, NJ: Noyes, 1987.

MLA (9th ed.) Citation

Sherman, Arthur. Chemical Vapor Deposition for Microelectronics: Principles, Technology, and Applications. 5. print. Noyes, 1987.