APA (7th ed.) Citation

(1990). Handbook of plasma processing technology: Fundamentals, etching, deposition, and surface interactions (2.print.). Noyes.

Chicago Style (17th ed.) Citation

Handbook of Plasma Processing Technology: Fundamentals, Etching, Deposition, and Surface Interactions. 2.print. Park Ridge, NJ: Noyes, 1990.

MLA (9th ed.) Citation

Handbook of Plasma Processing Technology: Fundamentals, Etching, Deposition, and Surface Interactions. 2.print. Noyes, 1990.