Laser microfabrication: thin film processes and lithography
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Boston [u.a.]
Acad. Pr.
1989
|
| Ausgabe: | 1.print. |
| Schlagworte: | |
| Beschreibung: | XII, 587 S. |
| ISBN: | 0122334302 |
Internformat
MARC
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|---|---|---|---|
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| 008 | 891013s1989 |||| 00||| eng d | ||
| 020 | |a 0122334302 |9 0-12-233430-2 | ||
| 035 | |a (OCoLC)18379020 | ||
| 035 | |a (DE-599)BVBBV021886761 | ||
| 040 | |a DE-604 |b ger | ||
| 041 | 0 | |a eng | |
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| 245 | 1 | 0 | |a Laser microfabrication |b thin film processes and lithography |
| 250 | |a 1.print. | ||
| 264 | 1 | |a Boston [u.a.] |b Acad. Pr. |c 1989 | |
| 300 | |a XII, 587 S. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 650 | 4 | |a Lasers |x Industrial applications | |
| 650 | 4 | |a Microfabrication | |
| 650 | 4 | |a Microlithography | |
| 650 | 4 | |a Thin film devices |x Design and construction | |
| 650 | 0 | 7 | |a Oberflächenbehandlung |0 (DE-588)4042908-8 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Fotolithografie |g Halbleitertechnologie |0 (DE-588)4174516-4 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Laserbearbeitung |0 (DE-588)4139080-5 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Lithografie |g Halbleitertechnologie |0 (DE-588)4191584-7 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Laser |0 (DE-588)4034610-9 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Dünnschichttechnik |0 (DE-588)4136339-5 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Dünne Schicht |0 (DE-588)4136925-7 |2 gnd |9 rswk-swf |
| 689 | 0 | 0 | |a Dünne Schicht |0 (DE-588)4136925-7 |D s |
| 689 | 0 | |5 DE-604 | |
| 689 | 1 | 0 | |a Lithografie |g Halbleitertechnologie |0 (DE-588)4191584-7 |D s |
| 689 | 1 | |5 DE-604 | |
| 689 | 2 | 0 | |a Laserbearbeitung |0 (DE-588)4139080-5 |D s |
| 689 | 2 | 1 | |a Oberflächenbehandlung |0 (DE-588)4042908-8 |D s |
| 689 | 2 | |8 1\p |5 DE-604 | |
| 689 | 3 | 0 | |a Fotolithografie |g Halbleitertechnologie |0 (DE-588)4174516-4 |D s |
| 689 | 3 | 1 | |a Laser |0 (DE-588)4034610-9 |D s |
| 689 | 3 | |8 2\p |5 DE-604 | |
| 689 | 4 | 0 | |a Dünnschichttechnik |0 (DE-588)4136339-5 |D s |
| 689 | 4 | 1 | |a Laser |0 (DE-588)4034610-9 |D s |
| 689 | 4 | |8 3\p |5 DE-604 | |
| 700 | 1 | |a Ehrlich, Daniel J. |e Sonstige |4 oth | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-015102006 | ||
| 883 | 1 | |8 1\p |a cgwrk |d 20201028 |q DE-101 |u https://d-nb.info/provenance/plan#cgwrk | |
| 883 | 1 | |8 2\p |a cgwrk |d 20201028 |q DE-101 |u https://d-nb.info/provenance/plan#cgwrk | |
| 883 | 1 | |8 3\p |a cgwrk |d 20201028 |q DE-101 |u https://d-nb.info/provenance/plan#cgwrk | |
Datensatz im Suchindex
| _version_ | 1804135828475084800 |
|---|---|
| adam_txt | |
| any_adam_object | |
| any_adam_object_boolean | |
| building | Verbundindex |
| bvnumber | BV021886761 |
| callnumber-first | T - Technology |
| callnumber-label | TA1677 |
| callnumber-raw | TA1677 |
| callnumber-search | TA1677 |
| callnumber-sort | TA 41677 |
| callnumber-subject | TA - General and Civil Engineering |
| classification_rvk | UH 5750 UH 5790 |
| ctrlnum | (OCoLC)18379020 (DE-599)BVBBV021886761 |
| dewey-full | 621.36/6 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.36/6 |
| dewey-search | 621.36/6 |
| dewey-sort | 3621.36 16 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Physik Elektrotechnik / Elektronik / Nachrichtentechnik |
| discipline_str_mv | Physik Elektrotechnik / Elektronik / Nachrichtentechnik |
| edition | 1.print. |
| format | Book |
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| id | DE-604.BV021886761 |
| illustrated | Not Illustrated |
| index_date | 2024-07-02T16:04:00Z |
| indexdate | 2024-07-09T20:46:42Z |
| institution | BVB |
| isbn | 0122334302 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-015102006 |
| oclc_num | 18379020 |
| open_access_boolean | |
| owner | DE-706 |
| owner_facet | DE-706 |
| physical | XII, 587 S. |
| publishDate | 1989 |
| publishDateSearch | 1989 |
| publishDateSort | 1989 |
| publisher | Acad. Pr. |
| record_format | marc |
| spelling | Laser microfabrication thin film processes and lithography 1.print. Boston [u.a.] Acad. Pr. 1989 XII, 587 S. txt rdacontent n rdamedia nc rdacarrier Lasers Industrial applications Microfabrication Microlithography Thin film devices Design and construction Oberflächenbehandlung (DE-588)4042908-8 gnd rswk-swf Fotolithografie Halbleitertechnologie (DE-588)4174516-4 gnd rswk-swf Laserbearbeitung (DE-588)4139080-5 gnd rswk-swf Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd rswk-swf Laser (DE-588)4034610-9 gnd rswk-swf Dünnschichttechnik (DE-588)4136339-5 gnd rswk-swf Dünne Schicht (DE-588)4136925-7 gnd rswk-swf Dünne Schicht (DE-588)4136925-7 s DE-604 Lithografie Halbleitertechnologie (DE-588)4191584-7 s Laserbearbeitung (DE-588)4139080-5 s Oberflächenbehandlung (DE-588)4042908-8 s 1\p DE-604 Fotolithografie Halbleitertechnologie (DE-588)4174516-4 s Laser (DE-588)4034610-9 s 2\p DE-604 Dünnschichttechnik (DE-588)4136339-5 s 3\p DE-604 Ehrlich, Daniel J. Sonstige oth 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 2\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 3\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Laser microfabrication thin film processes and lithography Lasers Industrial applications Microfabrication Microlithography Thin film devices Design and construction Oberflächenbehandlung (DE-588)4042908-8 gnd Fotolithografie Halbleitertechnologie (DE-588)4174516-4 gnd Laserbearbeitung (DE-588)4139080-5 gnd Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd Laser (DE-588)4034610-9 gnd Dünnschichttechnik (DE-588)4136339-5 gnd Dünne Schicht (DE-588)4136925-7 gnd |
| subject_GND | (DE-588)4042908-8 (DE-588)4174516-4 (DE-588)4139080-5 (DE-588)4191584-7 (DE-588)4034610-9 (DE-588)4136339-5 (DE-588)4136925-7 |
| title | Laser microfabrication thin film processes and lithography |
| title_auth | Laser microfabrication thin film processes and lithography |
| title_exact_search | Laser microfabrication thin film processes and lithography |
| title_exact_search_txtP | Laser microfabrication thin film processes and lithography |
| title_full | Laser microfabrication thin film processes and lithography |
| title_fullStr | Laser microfabrication thin film processes and lithography |
| title_full_unstemmed | Laser microfabrication thin film processes and lithography |
| title_short | Laser microfabrication |
| title_sort | laser microfabrication thin film processes and lithography |
| title_sub | thin film processes and lithography |
| topic | Lasers Industrial applications Microfabrication Microlithography Thin film devices Design and construction Oberflächenbehandlung (DE-588)4042908-8 gnd Fotolithografie Halbleitertechnologie (DE-588)4174516-4 gnd Laserbearbeitung (DE-588)4139080-5 gnd Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd Laser (DE-588)4034610-9 gnd Dünnschichttechnik (DE-588)4136339-5 gnd Dünne Schicht (DE-588)4136925-7 gnd |
| topic_facet | Lasers Industrial applications Microfabrication Microlithography Thin film devices Design and construction Oberflächenbehandlung Fotolithografie Halbleitertechnologie Laserbearbeitung Lithografie Halbleitertechnologie Laser Dünnschichttechnik Dünne Schicht |
| work_keys_str_mv | AT ehrlichdanielj lasermicrofabricationthinfilmprocessesandlithography |