Sputtering by particle bombardment:
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Berlin [u.a.]
Springer
|
| Schriftenreihe: | Topics in applied physics
... |
| Schlagworte: |
Internformat
MARC
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Datensatz im Suchindex
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| id | DE-604.BV021857696 |
| illustrated | Not Illustrated |
| index_date | 2024-07-02T16:02:52Z |
| indexdate | 2024-07-09T20:46:13Z |
| institution | BVB |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-015073475 |
| open_access_boolean | |
| publishDateSort | 0000 |
| publisher | Springer |
| record_format | marc |
| series2 | Topics in applied physics |
| spelling | Sputtering by particle bombardment ed. by R. Behrisch ... Berlin [u.a.] Springer txt rdacontent n rdamedia nc rdacarrier Topics in applied physics ... Oberflächenphysik (DE-588)4134881-3 gnd rswk-swf Teilchenstrahl (DE-588)4165339-7 gnd rswk-swf Oberflächenphysik (DE-588)4134881-3 s DE-604 Teilchenstrahl (DE-588)4165339-7 s Behrisch, Rainer Sonstige oth |
| spellingShingle | Sputtering by particle bombardment Oberflächenphysik (DE-588)4134881-3 gnd Teilchenstrahl (DE-588)4165339-7 gnd |
| subject_GND | (DE-588)4134881-3 (DE-588)4165339-7 |
| title | Sputtering by particle bombardment |
| title_auth | Sputtering by particle bombardment |
| title_exact_search | Sputtering by particle bombardment |
| title_exact_search_txtP | Sputtering by particle bombardment |
| title_full | Sputtering by particle bombardment ed. by R. Behrisch ... |
| title_fullStr | Sputtering by particle bombardment ed. by R. Behrisch ... |
| title_full_unstemmed | Sputtering by particle bombardment ed. by R. Behrisch ... |
| title_short | Sputtering by particle bombardment |
| title_sort | sputtering by particle bombardment |
| topic | Oberflächenphysik (DE-588)4134881-3 gnd Teilchenstrahl (DE-588)4165339-7 gnd |
| topic_facet | Oberflächenphysik Teilchenstrahl |
| work_keys_str_mv | AT behrischrainer sputteringbyparticlebombardment |